• Title/Summary/Keyword: Probe force

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Nanomachining on Single Crystal Silicon Wafer by Ultra Short Pulse Electrochemical Oxidation based on Non-contact Scanning Probe Lithography (비접촉 SPL기법을 이용한 단결정 실리콘 웨이퍼 표면의 극초단파 펄스 전기화학 초정밀 나노가공)

  • Lee, Jeong-Min;Kim, Sun-Ho;Kim, Tack-Hyun;Park, Jeong-Woo
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.20 no.4
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    • pp.395-400
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    • 2011
  • Scanning Probe Lithography is a method to localized oxidation on single crystal silicon wafer surface. This study demonstrates nanometer scale non contact lithography process on (100) silicon (p-type) wafer surface using AFM(Atomic force microscope) apparatuses and pulse controlling methods. AFM-based experimental apparatuses are connected the DC pulse generator that supplies ultra short pulses between conductive tip and single crystal silicon wafer surface maintaining constant humidity during processes. Then ultra short pulse durations are controlled according to various experimental conditions. Non contact lithography of using ultra short pulse induces electrochemical reaction between micro-scale tip and silicon wafer surface. Various growths of oxides can be created by ultra short pulse non contact lithography modification according to various pulse durations and applied constant humidity environment.

Hybridization by an Electrical Force and Electrochemical Genome Detection Using an Indicator-free DNA on a Microelectrode-array DNA Chip

  • Choi, Yong-Sung;Lee, Kyung-Sup;Park, Dae-Hee
    • Bulletin of the Korean Chemical Society
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    • v.26 no.3
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    • pp.379-383
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    • 2005
  • This research aims to develop DNA chip array without an indicator. We fabricated microelectrode array by photolithography technology. Several DNA probes were immobilized on an electrode. Then, indicator-free target DNA was hybridized by an electrical force and measured electrochemically. Cyclic-voltammograms (CVs) showed a difference between DNA probe and mismatched DNA in an anodic peak. Immobilization of probe DNA and hybridization of target DNA could be confirmed by fluorescent. This indicator-free DNA chip microarray resulted in the sequence-specific detection of the target DNA quantitatively ranging from $10^{-18}\;M\;to\;10^{-5}$ M in the buffer solution. This indicator-free DNA chip resulted in a sequence-specific detection of the target DNA.

Scanning Probe Microscopy Study on the Degradation of Optical Recoding Disks by Environmental Factors (광디스크의 노화에 관한 주사 탐침 현미경 연구)

  • Yoon, Man-Young;Shin, Hyun-Chang
    • Journal of the Korean Graphic Arts Communication Society
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    • v.29 no.3
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    • pp.97-104
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    • 2011
  • The storing ability of information of optical disks directly depends on the physical property of recording unit cells. It means that the degradation of optical disks ultimately causes the loss of the physical and chemical properties of recording unit cells and leads also information, too. We investigated the degradation and life time of optical disks which tell us the longevity of the preservation of information. Optical disks were aged using the accelerated aging system and studied by optical reflectivity spectroscopy and atomic force microscopy(AFM), and the preservation environment of electronic media in National central library of Korea also were analysed. Results show that the double reflective coated optical disks have good preservation of recording information but revealed some deformation of dye area in the AFM images. It means that we should include the mechanical and chemical degradation of the optical disks in the life time expectation evaluation.

Fabrication of Nano-Structures on NiFe Film by Anodization with Atomic Force Microscope

  • Okada, T.;Uchida, H.;Inoue, M.
    • Journal of Magnetics
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    • v.11 no.3
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    • pp.135-138
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    • 2006
  • We studied local anodization on permalloy $(Ni_{80}Fe_{20})$ thin film with an atomic force microscope (AFM), which was performed by applying a voltage between the permalloy sample and conductive AFM tip. Comparing with anodization on Si (100) substrate, nano-structures on the permalloy thin film was fabricated with low processability.In order to improve the processability on the permalloy thin film, we used dot-fabrication method, thatis, a conductive AFM probe was kept at a position on the film during the anodization process.

Characterization of Two-Dimensional Transition Metal Dichalcogenides in the Scanning Electron Microscope Using Energy Dispersive X-ray Spectrometry, Electron Backscatter Diffraction, and Atomic Force Microscopy

  • Lang, Christian;Hiscock, Matthew;Larsen, Kim;Moffat, Jonathan;Sundaram, Ravi
    • Applied Microscopy
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    • v.45 no.3
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    • pp.131-134
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    • 2015
  • Here we show how by processing energy dispersive X-ray spectrometry (EDS) data obtained using highly sensitive, new generation EDS detectors in the AZtec LayerProbe software we can obtain data of sufficiently high quality to non-destructively measure the number of layers in two-dimensional (2D) $MoS_2$ and $MoS_2/WSe_2$ and thereby enable the characterization of working devices based on 2D materials. We compare the thickness measurements with EDS to results from atomic force microscopy measurements. We also show how we can use electron backscatter diffraction (EBSD) to address fabrication challenges of 2D materials. Results from EBSD analysis of individual flakes of exfoliated $MoS_2$ obtained using the Nordlys Nano detector are shown to aid a better understanding of the exfoliation process which is still widely used to produce 2D materials for research purposes.

Effect of Contact Conditions on the Micro-adhesion Characteristics using SPM (SPM을 이용한 접촉조건 변화에 따른 미소응착 특성 연구)

  • 윤의성;박지현;양승호;공호성
    • Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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    • 2000.11a
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    • pp.18-22
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    • 2000
  • An experimental study was carried out to investigate the effect of nano-contact condition on the nano-adhesion phenomena. SPM(scanning probe microscope) tips with different radius of curvature were fabricated by a series of masking and etching processes. DLC(diamond-like carbon) and W-DLC (tungsten-incorporated diamond-like carbon) were coated on (100) silicon wafer by PACVD(plasma assisted chemical vapor deposition). Pull-off forces of Pure Si-wafer, DLC and W-DLC were measured with SPM(scanning probe microscope). Also, the same series of tests were carried out with the tips with different radius of curvature. Results showed that DLC and W-DLC showed much lower pull-off force than Si-wafer and Pull-off force increased with the tip radius.

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The importance of probing in diagnosing the periodontal diseases (임상가를 위한 특집 1 - 치주질환 진단에 있어서 탐침의 중요성)

  • Park, Junseok;Ku, Young
    • The Journal of the Korean dental association
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    • v.50 no.8
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    • pp.460-464
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    • 2012
  • Periodontitis is the most prevalent noncontagious disease. Periodontal probing for measuring probing depth (PD) and clinical attachment level (CAL) has been an important diagnostic tool to determine the presence and severity of periodontal diseases. For probing reproducibility, adroit probe handling with constant force is required.

Development of Prototype Stylus Prototype for Large Optics Testing

  • Yang, Ho-Soon;Walker, David
    • Journal of the Optical Society of Korea
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    • v.5 no.2
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    • pp.60-66
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    • 2001
  • The authors discuss a prototype stylus profilometer designed to measure large optics. It consists of a low contact force type probe system, laser reference system, interferometric distance measurement system, and horizontal driving system. The probe contacts the surface ; the height and the horizontal distances of the measurement points are measured by the interferometer. The freely propagated laser beam provides the reference line during the measurement. The developed stylus profilometry shows only $\pm$60 nm of P-V error for the 157 mm diameter spherical mirror.