• 한국표면공학회지
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• 제29권5호
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• pp.314-324
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• 1996

Scanning probe microscopes (SPMs) such as the scanning tunneling microscope (STM) and the atomic force microscope (AFM) were used for surface modification tools at the nanometer scale. Material surfaces, i. e., titanium, hydrogen-terminated silicon and trimethylsilyl organosilane monolayer on silicon, were locally oxidized with the best lateral spatial resolution of 20nm. The principle behind this proximal probe oxidation method is scanning probe anodization, that is, the SPM tip-sample junction connected through a water column acting as a minute electrochemical cell. An SPM-nanolithogrphy process was demonstrated using the organosilane monolayer as a resist. Area-selective chemical modifications, i. e., etching, electroless plating with gold, monolayer deposition and immobilization of latex nanoparticles; were achieved in nano-scale resolution. The area-selectivity was based on the differences in chemical properties between the SPM-modified and unmodified regions.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2001년도 추계학술대회논문집B
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• pp.388-393
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• 2001

An experimental study is conducted to investigate the interaction of vortices over a delta wing with leading edge extension(LEX) through the off-surface flow visualization and the 5-hole probe measurements of the wing wake region. Especially, the application of a new visualization technique is employed by ultrasonic humidifier water droplet and laser beam sheet. The results, both the off-surface visualization and the 5-hole probe, show that LEX tends to stabilize the vortices of the delta wing up to the high angle of attack even though the model is yawed. With increasing yaw, the windward leading edge vortex moves inward, and closer to the wing surface, while the leeward vortex moves outwards and away from the wing surface. The vortex interaction is promoted in the windward side, and is delayed in the leeward side.

• 한국재료학회지
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• 제13권9호
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• pp.606-612
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• 2003

Surface and mechanical properties of thin films with submicron thickness was characterized by nanoindentation with Berkovich and Vickers tips, and scanning probe microscopy. Nanoindention was made in a depth range of 15 to 200 nm from the surface by applying tiny force in a range from 150 to $9,000 \mu$N. Stiffness, contact area, hardness, and elastic modulus were determined from the force-displacement curve obtained. Reliability was first tested by using fused quartz, a standard sample. Elastic modulus and hardness values of fused quartz measured were the same as those reported in the literature within two percent of error. Mechanical properties of ITO thin film were characterized in a depth range of 15∼200nm. As indentation depth increased, elastic modulus and hardness decreased by substrate effect. Ion beam deposited DLC thin films were indented in a depth range of 40∼50 nm. The results showed that the DLC thin film using benzene and bias voltage 0∼-50 V has elastic modulus and hardness value of 132 and 18 GPa respectively. Pure DLC thin films showed roughnesses lower than 0.25 nm, but silicon-added DLC thin films showed much higher roughness values, and the wavy surface morphology.

• Tribology and Lubricants
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• 제27권6호
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• pp.344-350
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• 2011

Friction and wear behavior of tungsten oxide nanorods (TONs) was investigated using friction force microscopy(FFM) employing colloidal probes instead of conventional sharp tips. Vertically well-ordered TONs with 40 nm diameter, 130 nm length and 100 nm pitch width were synthesized on an anodic aluminium oxide substrate using two step electrochemical anodizing processes. The colloidal probe (diameter 20 ${\mu}m$) attached at the free end of tipless cantilever was oscillated(scanned) against a stationary surface of vertically aligned TONs with various scan speeds (1.2 ${\mu}m/s$, 3.0 ${\mu}m/s$ and 6.0 ${\mu}m/s$) and sliding cycles (100, 200 and 400) under normal load of 800 nN. The friction force and wear depth decreased with the increase of the scan speed. Plastically deformed thin layers were formed and sparsely deposited on the worn nonorod surface. The lower wear rate of the TONs with the longer oscillating cycles was attributed to the decreased real contact pressure due to the increase of real contact area between the colloidal probe and the TONs.

• 한국소음진동공학회논문집
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• 제15권11호
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• pp.1295-1302
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• 2005

This paper shows experimental evaluation results of the nano-positioning planar scanner used in the scanning probe microscope. The planar scanner is composed of flexure guides, piezoelectric actuators and feedback sensors as like explained in detail in Ref. (5). First, the fabrication methods were explained. Second, as the static Properties of the Planar scanner. we evaluated the maximum travel range & crosstalk. Also, we presented the correcting method for crosstalk using electric circuits finally. as the dynamic properties of the planar scanner, we evaluated the first resonant frequency. Also, we presented the actual AFM(atomic force microscope) imaging results with up to 2Hz imaging scan rate. Experimental results show that properties of the proposed planar scanner are well enough to be used in SPM applications like AFM.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.108.6-108
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• 2002

It is greatly important to understand the mechanics of AFM-based nanorobotic manipulation for efficient and reliable handling of nanoparticles. Robust motion control of an AFM-based nanorobotic manipulation is much challenging due to uncertain mechanics in tip-sample interaction dominated by surface and intermolecular force and limitations in force and visual sensing capability to observe environment. This paper investigates a nanomechanic modeling which enables simulation for AFM-based nanorobotic manipulation , and its application to motion planning of an AFM-based nanorobot. Based on the modeling of intermolecular and adhesion force in AFM-based nanomanipulation, the behaviors of an AFM ca...

• Journal of Mechanical Science and Technology
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• 제17권6호
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• pp.914-924
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• 2003

The interaction and breakdown of vortices over the Leading Edge Extension (LEX) - Delta wing configuration has been investigated through wing-surface pressure measurements, the off-surface flow visualization, and 5-hole probe measurements of the wing wake section. The description focused on analyzing the interaction and the breakdown of vortices depending on the angle of attack and the sideslip angle. The Effect of angle of attack and sideslip angle on the aerodynamic load characteristics of the model is also presented. The sideslip angle was found to be a very influential parameter of the vortex flow over the LEX-delta wing configuration. The introduction of LEX vortex stabilized the vortex flow, and delayed the vortex breakdown up to a higher angle of attack. The vortex interaction and breakdown was promoted on the windward side, whereas it was suppressed on the leeward side.

• ETRI Journal
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• 제26권3호
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• pp.189-194
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• 2004

We demonstrate a high-speed recording based on field-induced manipulation in combination with an optical reading of recorded bits on Au cluster films using the atomic force microscope (AFM) and the near-field scanning optical microscope (NSOM). We reproduced 50 nm-sized mounds by applying short electrical pulses to conducting tips in a non-contact mode as a writing process. The recorded marks were then optically read using bent fiber probes in a transmission mode. A strong enhancement of light transmission is attributed to the local surface plasmon excitation on the protruded dots.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1997년도 한국자동제어학술회의논문집; 한국전력공사 서울연수원; 17-18 Oct. 1997
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• pp.768-771
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• 1997

Geometric probing addresses the problem of determining geometric aspects of a structure from the mathematics and results of a physical measuring device such as a probe. This paper presents a new algorithm to recognize the shape of an unknown object by using a robot hand with a force and torque sensor. The new algorithm is called S.E.P.(Shape Exploration Procedure) which finds the global shape of an unknown object. The proposed method is composed of three major parts, finding contact informations such as contact point, calculation of shape information such as curvature, and expression of global shape from these informations. Comparing with the conventional approaches, the advantages of the proposed method are explained and verified by conducting experiments with a 3-dof SCARA robot.

• 한국기계가공학회지
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• 제6권2호
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• pp.22-27
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• 2007

In this study, the two methods of stiffness measurement(Spring constant) of cantilever were proposed for quantitative measurement in Atomic Force Microscopy(AFM). As the 1st method for the measurement of stiffness, the probe method, which is used in the measurement of the semiconductor mechanical and electrical properties, was applied to the measurement of the cantilever. Experiments by the probe method were performed finding the resistance value of cantilever. As the results, the resistance was measured differently along with the dimension and the thickness of cantilever that determined the stiffness(spring constant) of the lever. As the 2nd method, the vibration characteristics(Dunkerley expression) is used to obtain the stiffness of the complex structure which is combined by AFM cantilever and the standard cantilever. We measured the resonant frequency from the complex structure using the micro stages and stereo microscope. As the results, we confirmed that the vibration characteristics(Dunkerley expression) is effected the micro complex structure of AFM cantilever.