• 한국레이저가공학회지
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• 제6권3호
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• pp.11-17
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• 2003

Recoil force exerted on the substrate during a nanosecond laser ablation of silicon is measured. The ablation sample is placed at the end of a 400 $\mu\textrm{m}$ thick and 13 mm long silicon cantilever. The vibration amplitude of the cantilever induced by the recoil force is measured in real time with a probe beam. By comparing the deflection amplitude of the cantilever with a theoretical model, the recoil momentum is estimated. For laser irradiance in the order of 10$\^$11/ W/$\textrm{cm}^2$, the recoil pressure reached a value over 40${\times}$10$\^$9/ Pa.

• 대한기계학회논문집A
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• 제22권4호
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• pp.868-878
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• 1998

There are recently increasing needs for precision XYZ-stage in the fields of nanotechnology, specially in AFMs(Atomic Force Microscope) and STMs(Scanning Tunneling Microscope). Force measurements are made in the AFM by monitoring the deflection of a flexible element (usually a cantilever) in response to the interaction force between the probe tip and the sample and controlling the force neasyred constant topography can be obtained. The power of the STM is based on the strong distance dependence of the tunneling current in the vacuum chamber and the current is a feedback for the tip to trace the surface topography. Therefore, it is required for XYZ-stage to position samples with nanometer resolution, without any crosscouples and any parasitic motion and with fast response. Nanometer resolution is essential to investigate topography with reasonable shape. No crosscouples and parasitic motion is essential to investigate topography without any shape distortion. Fast response is essential to investigate topography without any undesirable interaction between the probe tip and sample surface ; sample scratch. To satisfy these requirements, this paper presents a novel XYZ-stage concept, it is actuated by PZT and has a monolithic flexible body that is made symmetric as possible to guide the motion of the moving body linearly. PZT actuators have a very fast response and infinite resolution. Due to the monolithic structure, this XYZ-stage has no crosscouples and by symmetry it has no parasitic motion. Analytical modeling of this XYZ-stage and its verification by FEM modeling are performed and optimal design that is to maximize 1st natural frequencies of the stage is also presented and with that design values stage is manufactured.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2005년도 창립60주년 기념 추계 학술대회
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• pp.151.2-151.2
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• 2005

• 한국정밀공학회지
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• 제20권3호
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• pp.5-14
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• 2003

• 대한환경공학회지
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• 제22권10호
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• pp.1833-1841
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• 2000

생물학적 수처리공정의 생물막 (호기성 혹은 혐기성) 내의 생물막 두께 및 이온들의 농도구배등에 대한 모델링을 위하여 종래에 이론적으로만 접근하던 방법 대신, 실제로 생물막을 이동하며 측정하여 분석하는 첨단 연구 방법인 미소전극탐침을 제작하여 적용하였다. 미소전극 센서장치에서 가장 중요한 요소 중에 하나인 working 미소전극탐침은 생물막내의 전위차 (EMF, electromotive force)를 측정할 때 오염과 파손 등에 의해서 수명이 짧아지기 쉽기 때문에, 각각의 working 미소전극탐침의 제작방법에 대하여 논의하였으며, 제작된 pH와 $NO_3{^-}$ 미소전극탐침으로 탈질 미생물막 이온들의 농도를 막 깊이별로 측정하였다. 미소전극 센서장치에 의한 측정결과, 탈질 미생물막 내부에서의(생물막 표면에서 약 $350{\mu}m$) pH는 8.3 정도로 벌크용액상(bulk solution)의 pH 8보다 약간 상승하였으며, $NO_3{^-}$의 농도는 벌크용액상의 30 mg N/L농도에서 최종 4 mg N/L 청도로 나타났다.

• 마이크로전자및패키징학회지
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• 제12권4호통권37호
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• pp.289-299
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• 2005

실험과 비선형 유한요소해석을 병행하여, area array 패키지에서 솔더 접합부 특성을 판별하기 위한 전단시험 결과에 미치는 전단속도와 높이의 영향을 연구하였다. 전단속도의 증가와 전단높이의 감소에 따라 전단강도는 증가하는 경향을 나타내었다. 과대하게 높은 전단높이는 비정상적으로 높은 표준편차 또는 솔더볼 표면으로부터 전단 프로브의 밀림 현상과 같은 실험오차를 발생시켰다. 반면, 낮은 전단 속도는 취약한 계면 파괴나 계면에서 가장 약한 층의 판별에 있어서 유용하였다. 한편, 리플로우 회수 증가에 따른 Sn-37Pb/Cu와 Sn-3.5Ag/Cu BGA 솔더 접합부의 기계적${\cdot}$전기적 특성에 대하여 연구하였다. Cu6Sn5와 Cu3Sn으로 구성된 금속간화합물 층의 총 두께는 리플오우 시간의 1/3승에 비례하여 증가하였다. 전단 강도는 3회 또는 4회 리플로우까지 증가한 후, 이후 리플로우 회수에 비례하여 감소하는 경향을 나타내었다. 이때, 파괴는 리플로우 회수에 관계없이 솔더 내에서 발생하였다. 진기 비저항은 리플로우 회수에 비례하여 증가하였다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.637-640
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• 2005

In this paper, we investigate the characteristics of a piezoresistive AFM cantilever in the range of $0\~30{\mu}N$ by using nano force calibrator (NFC), which consists of a high precision balance with resolution of 1 nN and 1-D fine positioning stage. Brief modeling of the cantilever is presented and then, the calibration results are shown. Tests revealed a linear relationship between the probing force and sensor output (resistance change), and the force vs. deflection. From this relationship, the force constant of the cantilever was calculated to 3.45 N/m with a standard deviation of 0.01 N/m. It shows that there is a big difference between measured and nominal spring constant of 1 N/m provided by the manufacturer s specifications.

• 전기학회논문지
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• 제60권12호
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• pp.2276-2280
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• 2011

An indium-tin-oxide (ITO) is normally used as a substrate in organic photovoltaic cells. We examined the effects of an oxygen ($O_2$) plasma treatment on the electrical properties of an organic photovoltaic cell. Experiments with four-point probe method and atomic force microscope revealed the lowest surface resistance of 17.64 ${\Omega}$/sq and the lowest average surface roughness of 1.39 nm at the plasma treatment power of 250 W. A device structure of ITO/CuPc/$C_{60}$/BCP/$Cs_2CO_3$/Al was fabricated by thermal evaporation with and without the plasma treated ITO substrate. It was found that the power conversion efficiency of the cell with the plasma treated ITO is 65 % higher than the one without the plasma treated ITO.

• Transactions on Electrical and Electronic Materials
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• 제11권6호
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• pp.271-274
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• 2010

We examined the tunneling current behaviors of magnetic tunneling junction (MTJ) cells utilizing conductive atomic force microscopy (AFM) interfaced with an external magnetic field generator. By introducing current through coils, a magnetic field was generated and then controlled by a current feedback circuit. This enabled the characterization of the tunneling current under various magnetic fields. The current-voltage (I-V) property was measured using a contact mode AFM with a metal coated conducting cantilever at a specific magnetic field intensity. The obtained magnetoresistance (MR) ratios of the MTJ cells were about 21% with no variation seen from the different sized MTJ cells; the value of resistance $\times$ area (RA) were 8.5 K-12.5 K $({\Omega}{\mu}m^2)$. Since scanning probe microscopy (SPM) performs an I-V behavior analysis of ultra small size without an extra electrode, we believe that this novel characterization method utilizing an SPM will give a great benefit in characterizing MTJ cells. This novel method gives us the possibility to measure the electrical properties of ultra small MTJ cells, namely below $0.1\;{\mu}m\;{\times}\;0.1\;{\mu}m$.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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• pp.323-323
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• 2012

We present ferroelectricity of Bi-doped ZnO film probed by piezoresponse force microscopy (PFM), which is one of the Scanning Probe Microscopy techniques. Perovskite ferroelectrics are limited to integration of devices into semiconductor microcircuitry due to hard adjusting their lattice structure to the semiconductor materials. Transition metal doped ZnO film is one of the candidate materials for replacing the perovskite ferroelectrics. In this study, ferroelectric characteristics of the Bi-doped ZnO grown by pulsed laser deposition were probed by PFM. The polarization switching and patterning of the ZnO films were performed by applying DC bias voltage between the AFM tips and the films with varying voltages and polarity. The PFM contrast before and after patterning showed clearly polarization switching for a specific concentration of Bi atoms. In addition, the patterned regions with nanoscale show clearly the local piezoresponse hysteresis loop. The spontaneous polarization of the ZnO film is estimated from the local piezoresponse based on the comparison with LiNbO3 single crystals.