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Nanoprobe Application Technologies  

장원석 (한국기계연구원 나노공정그룹)
신보성 (한국기계연구원 나노공정그룹)
황경현 (한국기계연구원 나노공정그룹)
Publication Information
Journal of the Korean Society for Precision Engineering / v.20, no.3, 2003 , pp. 5-14 More about this Journal
Keywords
Scanning Probe Microscope; Scanning Tunneling Microscope; STM; Atomic Force Microscope; AFM; Scanning Near-field Optical Microscope; SNOM; Lithography;
Citations & Related Records
Times Cited By KSCI : 3  (Citation Analysis)
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