• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.449-449
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• 2013

최근 반도체 소자의 집적회로는 점점 복잡해지고 있는 반면, 소자의 크기는 작아지고 있으며 그로 인해 패드의 크기가 작아지고 패드사이의 간격 또한 협소해지고 있다. 따라서 웨이퍼 단계에서 제조된 집적회로의 불량여부를 판단하기위한 검사 장비인 프로브카드(Probe Card)의 높은 집적도가 요구되고 있다. 하지만 기존의 MEMS 공법으로 제작되는 프로브 빔은 복잡한 제조 공정과 높은 생산비용, 낮은 집적도의 문제점을 가지고 있다. 본 연구에서는 이러한 문제점을 해결하기 위하여 간단한 제조 공정과 낮은 생산비용, 높은 집적도를 가지는 프로브 빔을 개발하기 위하여 절연절단 방식으로 BeCu (Beryllium-Copper) 프로브 빔을 제작하였다. 낮은 소비 전력으로 우수한 프로브 빔 어레이를 제작하기 위해서 가장 고려해야할 대상은 프로브 빔의 재료와 구조(형상)이다. 절연전단 방식으로 프로브 빔을 형성할 때 요구되는 Fusing current는 프로브 빔의 구조(형상)에 크게 영향을 받는다. 낮은 Fusing current는 소비 전력을 줄여주고, 절연절단으로 형성되는 프로브 빔의 단면(끝)을 날카롭게 하여 프로브 빔과 집적회로의 패드 간의 접촉 저항을 감소시킨다. 프로브 빔의 제작은 BeCu 박판을 빔 형태로 식각하여 제작하였으며, 실리콘 비아 홀(Via hole) 구조의 기판위에 정렬하여 soldering 공정을 통해 실리콘 기판과 BeCu 박판을 접합시켰다. 접합된 프로브 빔의 끝부분을 들어 올린 상태로 전류를 인가하여 stress free 상태로 만들어 내부 응력을 제거하였으며, BeCu 박판에 fusing current를 인가하여 BeCu 박판 프레임으로부터 제거를 하였다. 제작된 프로브 빔의 길이는 1.7 mm, 폭은 $50{\mu}m$, 두께는 $15{\mu}m$, 절단부의 단면적은 1$50{\mu}m^2$로 제작되었다. 그리고 프로브 빔의 절단부의 길이는 $50{\mu}m$ 부터 $90{\mu}m$까지 $10{\mu}m$ 증가시켜 제작되었다. 이후에 절연절단 공정에 요구되는 Fusing current를 측정하였고, 절연절단 후의 절단면의 형상을 SEM (Scanning Electron Microscope)장비를 통하여 확인하였다. 절단부의 길이가 $50{\mu}m$일 때 5.98A의 fusing current를 얻었으며, 절연절단 후 절단부 상태 또한 가장 우수했다. 본 연구에서 제안된 프로브 빔 제작 방법은 프로브카드 및 테스트 소켓(Test socket) 생산에 응용이 가능하리라 기대한다.

• Korean Journal of Optics and Photonics
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• v.16 no.3
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• pp.235-238
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• 2005

A Multiple electron beam lithography system with arrayed microcolumns has been developed for high throughput applications. The small size of the microcolumn opens the possibility for arrayed operation on a scale commensurate. The arrayed microcolumns based on of Single Column Module (SCM) concept has been fabricated and successfully demonstrated. Low energy microcolumn lithography has been operated in the energy range from 250 eV to 300 eV for the generation of nano patterns. Probe beam current at the sample was measured about >1 nA at a total beam current of $0.5\;{\mu}A$ and a working distance of $\~1\;mm$. The magnitude of probe beam current is strong enough for the low energy lithography. The thin layers of PMMA resist have been employed. The results of nano-patterning by low energy microcolumn lithography will be discussed.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.2
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• pp.137-144
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• 2009

In this paper, the signal analysis of eddy current array probe was performed to analyze the electromagnetic characteristics with the variation of FBH(flat bottomed hole) defects size on steam generator tube in NPP(nuclear power plants) using the electromagnetic finite element method. To obtain the electromagnetic characteristic of probes, the governing equation was derived from Maxwell's equations, and the individual problem was analyzed by using the 3-dimensional finite element method. For the simulation FBH defects were used. The depth of FBH defects were 20%, 40%, 60%, 80% and 100% of steam generator(SG) tube thickness, and it was assumed that the defects were located on the tube outside. And the operation frequencies of 100 kHz, 300 kHz and 400 kHz were used. Material of specimen was Inconel 600 which is usually used for SG tubes in NPP. The signal difference could be observed according to the size variation of depth of FBH defects and operation frequencies. The results in this paper can be helpful when the ECT(eddy current testing) signals from EC array probe are evaluated and analyzed.

• Journal of the Korean Society for Nondestructive Testing
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• v.21 no.6
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• pp.650-657
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• 2001

This paper explains the process of designing a shielded encircling remote field eddy current (RFEC) probe to inspect nuclear fuel cladding tubes and investigates resulting signal characteristics. To force electromagnetic energy from exciter coil to penetrate into the tube, exciter coil is shielded outside by laminations of iron insulated electrically from each other. Effects of shielding and the proper operating frequency are studied by the finite element analysis and the location for sensor coil is decided. However, numerically simulated signals using the designed probe do not clearly show the defect indication when the sensor passes a defect and the other indication appeared as the exciter passes the defect is affected by the shape of shielding structure, which demonstrates that the sensor is directly affected by exciter fields. For this reason, the sensor is also shielded outside and this shielding dramatically improves signal characteristics. Numerical modeling with the finally designed probe shows very similar signal characteristics to those of inner diameter RFEC probe. That is, phase signals show almost equal sensitivity to inner diameter and outer diameter defects and the linear relationship between phase signal strength and defect depth is observed.

• Journal of the Korean institute of surface engineering
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• v.36 no.4
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• pp.296-300
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• 2003

Extended cylindrical magnetron sputtering system with rotating 600-mm long and 90-mm diameter graphite cathode and pulsed power supply voltage generator were developed and fabricated. Time-dependent Langmuir probe characteristics as well as carbon films thickness were measured. It was shown that ratio of ions flux to carbon atoms flux for pulsed magnetron discharge mode was equal to $\Phi_{i}$ $\Phi$sub C/ = 0.2. It did not depend on the discharge current in the range of $I_{d}$ / = 10∼60 A since both the plasma density and the film deposition rate were found approximately proportional to the discharge current. In spite of this fact carbon film structure was found to be strongly dependent on the discharge current. Grain size increased from 100 nm at $I_{d}$ = 10∼20 A to 500 nm at $I_{d}$ = 40∼60 A. To deposit fine-grained hard nanocrystalline or amorphous carbon coating current regime with $I_{d}$ = 20 A was chosen. Pulsed negative bias voltage ($\tau$= 40 ${\mu}\textrm{s}$, $U_{b}$ = 0∼10 ㎸) synchronized with magnetron discharge pulses was applied to a substrate and voltage of $U_{b}$ = 3.4 ㎸ was shown to be optimum for a hard carbon film deposition. Lower voltages were not sufficient for amorphization of a growing graphite film, while higher voltages led to excessive ion bombardment and effects of recrystalization and graphitization.

• Journal of the Microelectronics and Packaging Society
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• v.24 no.4
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• pp.73-77
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• 2017

Recently, fingerprint sensors have widely used for personal information security, and require quality evaluation to reduce an error of their recognition rate. Quality of fingerprint sensors is evaluated by variation of their electrical resistance introducing by contacts between a probe tip and a sensor electrode, Investigation on the materials compatability and structure optimization of probe is required to reduce deformation of sensor electrode for repeatability of quality testing. Nickel, steel(SK4), beryllium copper, and phosphor bronze were considered as probe materials, and beryllium copper was the most appropriate for materials of probe tips, considering indentation and contact resistance while being contacted probe tips on electrodes. Probes of an inspection part were manufactured with the single-unit structure for physical damage prevention and parallel processing capability. Inspection repeatability was evaluated by voltage variation of fingerprint sensors when the specific current was applied. A single-unit inspection part with beryllium copper probe tips showed excellent repeatability within ${\pm}0.003V$ of its voltage variation.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.29 no.10 s.241
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• pp.1336-1343
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• 2005

The detection mechanism of the flaw for the nondestructive testing using eddy current is related to the interaction of the induced eddy currents in the test specimen with flaws and the coupling of these interaction effects with the moving test probe. In this study, the two-dimensional electromagnetic finite element analysis(FEM) fur the eddy current signals of the aluminum plate with different depth of surface cracks is described and the comparison is also made between experimental and predicted signals analyzed by FEM. In addition, the characteristics of attenuation of the eddy current density due to the variation of the depth of a conductor are evaluated. The effective parameters for the application of eddy current technique to evaluate surface cracks are discussed by analyzing the characteristics of the eddy current signals due to the variation of crack depths.

• 한국정보디스플레이학회:학술대회논문집
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• 2009.10a
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• pp.854-857
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• 2009

The concept of a microplasma current switch for a device operated in a current mode like organic light-emitting diodes, which features matrix addressability and current switching, is presented as well as its architecture and operational principle. To verify the concept, we have fabricated a 100 mm ${\times}$ 100 mm microplasma current switch panel with a cell pitch of $1080{\mu}m{\times}1080{\mu}m$. Moreover, the current-voltage measurements of the unit cell are performed for three different driving voltage amplitudes. They show the characteristic of an asymmetric floating double probe diagnosing plasmas.

• Journal of the Korean Society for Nondestructive Testing
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• v.20 no.4
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• pp.285-289
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• 2000

This study suggests a rebar detection technique for simultaneous detection of size and cover of embedded reinforcement in concrete. The structure of the probe made in this study is somewhat different from commercial ones. This probe has three sensing coils. Rebar size and cover depth can be evaluated by detecting and analyzing the signal from them. Amplitude and phase variation of each coil in the probe was investigated using an impedance analyzer and the loci of transfer functions of the coils were analyzed. The locus of transfer function from the sensing coil positioned inside excitation coil was simple as well known, but the others from the coils outside excitation coil were not so. Actual experiment on rebar detection was performed with our probe and an eddy current test system for various rebar sizes and depths. The signal shape according to variation of cover depths showed the same tendency with the transfer function loci acquired by impedance analyzer. The different variation pattern of signal enabled to evaluate rebar size and cover depth simultaneously.

• Proceedings of the KOSOMBE Conference
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• v.1997 no.05
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• pp.216-219
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• 1997

We are developing a portable multipurpose gamma counting and imaging probe that will be useful for many applications in nuclear medicine including radioimmunoguided surgery in the detection and treatment of malignant tumors. Any diagnostic information provided by CT, MRI, PET, SPECT or gamma camera imaging prior to surgery obviously is very important, but current techniques are limited in many instances. To overcome some of these limitations, the portable multipurpose gamma probe is being developed. The gamma probe consists of NaI(Tl) crystal with 1" dia $\times$ 0.5" thick and singlechannel photomultiplier tube (SC-PMT) for counting, and 3" dia $\times$ 0.375" and multichannel photomultiplier tube (MC-PMT) for imaging, nuclear instrument module (NIM), position circuits, interface, and PC. The energy resolution using Tc-99m was measured as 14% and the spatial resolution using 3mm dia green LED was measured as 2.9mm. These priliminary results indicate that the currently developing probe is very promising and could be very useful for many applications in nuclear medicine.