Diamond-Like Carbon Films Deposited by Pulsed Magnetron Sputtering System with Rotating Cathode |
Chun, Hui-Gon
(School of Materials Science and Engineering, ReMM, University of Ulsan)
You, Yong-Zoo (School of Materials Science and Engineering, ReMM, University of Ulsan) Nikolay S. Sochugov (Inst. of High Current Electronics, Siberian Div, of RAS) Sergey V. Rabotkin (Inst. of High Current Electronics, Siberian Div, of RAS) |
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