• Proceedings of the Korean Geotechical Society Conference
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• 2009.03a
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• pp.464-475
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• 2009

Electrical resistivity can be used for porosity estimation. In order to improve previously developed ERCP(Electrical Resistivity Cone Probe), 4ERP(4 Electrical Resistivity Probe), which has Wenner array at the tip of probes, has been developed. In properties of current flow Wenner array measures electrical properties of undisturbed area during penetration and relatively correct measurements are guaranteed without polarization. Furthermore, Wenner array equation can estimate electrical resistivity without extra calibration. 4ERP is developed into 2 types, penetration and fixation. Penetration type has wedge-shaped tip. Considering disturbance minimization, fixed type has plane tip. Fixed type 4ERP in consolidation cell measure electrical resistivity increment along porosity decrease, and penetration type 4ERP measured resistivity profile along the depth in chamber. Applying Archie's law, porosity profile was estimated with electrical resistivity. The tests result suggests that 4ERP can be new site investigation equipment with little disturbance.

• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1963-1966
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• 2008

We fabricate and evaluate the metal-oxide-semiconductor (MOS) transistor probe with the focused-ionbeam (FIB) for surface electric properties. The probes are designed with the rectangular and V-shaped structures, and their dimensions are determined considering the contact mode operation. The conductive nano tip is grown with FIB system, and deposition condition is controlled for the sharp tip. The fabricated device is applied to the various test patterns like the metal lines and PZT poling regions, and the results show the well defined measurement patterns.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.502-505
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• 2005

To overcome some of the limitations in the conventional photolithography technique, MC-SPL which has advantages such as flexibility and high speed was developed in the past. To make a fine pattern using MC-SPL, there are many variables to control, for example, applied load, scribing speed, chemical etching condition, and etc. In this work, the effect of contact load on the width of the pattern was investigated. The load not only influences the width of the pattern but it also affects the wear of the probe tip. It was found that it is beneficial to load the tip in two stages. Futhermore, the experimental results showed that the pattern width was more sensitive to the initial contact force.

• Proceedings of the Korean Society of Tribologists and Lubrication Engineers Conference
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• 2002.10b
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• pp.61-62
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• 2002

In order to clarify the contact mechanism between specimen surface and probe tip in the surface observation by the AFM (atomic force microscope) or the FFM (friction force microscope), several molecular dynamics simulations have been performed. In the simulation, a 3-dimensional simulation model is proposed where the specimen and the probe are assumed to consist of mono-crystal line copper and a carbon atom respectively and the effect of cantilever stiffness is also taken into considered. The surface observation process on a well-defined Cu{100} is simulated. The influences of cantilever stiffness on the reactive force images and the behavior of probe tip were evaluated. As a resuIt, several phenomena similar to those observed by the actual surface observation experiment, such as double-slip behavior and dispersion in the stick-slip wave period were observed.

• Proceedings of the IEEK Conference
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• 2005.11a
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• pp.821-824
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• 2005

Probe storage is one of the strong candidates for future mobile storage device since it has potential of recording density over I $Tb/in^2$ with r/w speed over 100 Mbps. It also uses silicon-processing technology that suits the purpose of small form factor. In this paper, write characteristics of resistive probe that can rotate the field direction of PZT by field-induced resistance changes in a small resistive region at the apex of the tip will be presented. Also, the relationship between the size of tip and the available write width is investigated for different source bias conditions. For this study, two-dimensional computer simulation ($SILVACO^{TM}$) was performed. With optimum design, the width of the writing electric field can be smaller than 50nm

• Applied Science and Convergence Technology
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• v.23 no.5
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• pp.240-247
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• 2014

Modelling and measurements of normal and lateral stiffness for atomic force microscopy (AFM) are presented in this work. Important issues, such as element discretisation, stiffness calibration, and deflection angle are explored using the finite element (FE) model. Elements with various dimension ratios are investigated and comparisons with several mathematical models are reported to verify the accuracy of the model. Investigation of the deflection angle of a cantilever is also shown. Moreover, AFM force measurement experiments with conical and colloid probe tips are demonstrated. The relationships between force and displacement, required for stiffness measurement, in normal and lateral directions are acquired for the conical tip and the limitations of the colloid probe tip are highlighted.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.26-31
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• 2007

A novel scanning probe measurement system was developed to enable precise profile measurements of microaspheric surfaces. An air-bearing stylus with a microprobe was used to perform the surface profile scanning. The new system worked in a contact mode and had the capability of measuring micro-aspheric surfaces with large tilt angles and complex profiles. Due to limitations resulting from the contact mode, such as possible damage caused by the contact force and lateral resolution restrictions from the curvature of the probe tip, several system improvements were implemented. An air bearing was used to suspend the shaft of the probe to reduce the contact force, enabling fine adjustments of the contact force by changing the air pressure. The movement of the shaft was measured by a linear encoder with a scale attached to the actual shaft to avoid Abbe errors. A $50-{\mu}m-diameter$ glass sphere was bonded to the tip of the probe to improve the lateral resolution of the system. The maximum contact force of the probe was 10 mN. The shaft was capable of holding the probe continuously if the contact force was less than 40 mN, and the resolution of the probe could be as high as 10 nm, The performance of the new scanning probe measurement system was verified by experimental data.

• Journal of the Korean Society for Aviation and Aeronautics
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• v.14 no.1
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• pp.43-48
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• 2006

The present study was carried out in order to develope a seven-hole pressure probe which is able to measure high flow angles. The seven-hole pressure probe is a non-nulling, directional velocity probe used for measuring three dimensional flow that having high flow angles. A 4 mm diameter seven-hole conical pressure probe was manufactured with a cone angle of 70$^{\circ}$. The probe was comprised of seven 1 mm diameter stainless steel tubes packed close together and fitted into an outer stainless steel sleeve. The calibration procedure is based on the use of the Callington's polynomial curve-fit method. The validity of the seven-hole conical pressure probe is demonstrated by comparisons with hot-wire data.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.235.1-235.1
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• 2014

Precise measurement of plasma parameters including density and temperature is the most essential part for understanding plasma characteristics. To persue more accurate measurement, it is very important to understand the intrinsic error of the measurement method. In this paper, we performed the plasma measurement with different method; langmuire probe and cutoff probe. Both measurement technology are known to be exactly correlate with etch other. We conducted the four set of same experiments process by diffrent persons to observe the intrinsic error based on measurement tools. As a result, the cutoff probe is relatively reliable then the Langmuir probe. This difference is analyzed to be intrinsic since it cames from the inevitable error such as manufacturing of probe tip. From this study, we sure that it is good decision to choose cutoff probe as repeatable measurement independent with intrinsic human factor.

• Proceedings of the Materials Research Society of Korea Conference
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• 2007.11a
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• pp.74.1-74.1
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• 2007