• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.48 no.1
• /
• pp.1-6
• /
• 2011

We have developed the process of forming one body S-type cantilever probe in the recessed trench for fine-pitched MEMS probe card. The probe (cantilever beam and pyramid tip) was formed using Deep RIE etching and wet etching. The pyramid tip was formed by the wet etching using KOH and TMAH. The process of forming the curved probe was also developed by the wet etching. Therefore, the fabricated probe is applicable for the probe card for DRAM, Flash memory and RF devices tests and probe tip for IC test socket.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.10a
• /
• pp.552-555
• /
• 2004

The reliability issue of the probe tip/recording media interface is one of the most crucial concerns in the Atomic Force Microscope (AFM)-based recording technology. In this work, the tribological characteristics of the probe/media interface were investigated by performing wear tests using an AFM. The ranges of applied normal load and sliding velocity for the wear test were 10 to 50nN and 2 to 20$\mu$m/s respectively. The damage of the probe tip was quantitatively as well as qualitatively characterized by Field Emission Scanning Probe Microscope (FESEM) analysis and calculated based on Archard s wear equation. It was shown that the wear coefficient of the probe tip was in the order of 10$^{-4}$ ~ 10$^{-3}$ , and significant contamination at the end of the probe tip was observed. Thus in order to implement the AFM-based recording technology, tribological optimization of the probe/media interface must be achieved.

• Journal of Power System Engineering
• /
• v.14 no.2
• /
• pp.60-64
• /
• 2010

This paper introduces reliability improvement and time saving in eddy current inspection by signal characteristic optimization of multi-coil eddy current array probe. In the past, Multi-coil array probe and single probe were used for the gas turbine rotor surface inspection & defect evaluation. The multi-coil array probe was used for the broad area inspection. But the signal deviations among multi-coil array probe are maximum 28% in commercial probe. This differences were considered to impedance differences among coils, so it is very difficult to evaluate exact defect size. The signal deviations among multi-coil array probe are maximum 28% in commercial probe. So, single coil inspection was used for exact defect sizing. The purpose of this study is to improve signal deviations of multi-coil array probe. The introduced new technology can improves this deviation by adjusting input voltage in each coil. At first, apply same voltage in each coil and collect signal amplitude of each coil. And calculate new input voltage based on signal amplitude of each coil. If the signal amplitude deviation is within 5% among multi-coil array probe, the signal amplitude of multi-coil array probe is reliable. The proposed technology gives 2% signal deviation among multi-coil array probe. The proposed new technology gives reliability improvement and inspection time saving in eddy current inspection.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
• /
• v.21 no.7
• /
• pp.831-841
• /
• 2010

The conventional vertical probe has the thin and long signal path that makes transfer characteristic of probe worse because of the S-shaped structure. So we propose the new vertical probe structure that has branch springs in the S-shaped probe. It makes closed loop when the probe mechanically connects to the electrode on a wafer. We fabricated the proposed vertical probe and measured the transfer characteristic and mechanical properties. Compared to the conventional S-shaped vertical probe, the proposed probe has the overdrive that is 1.2 times larger and the contact force that is 2.5 times larger. And we got the improved transfer characteristic by 1.4 dB in $0{\sim}10$ GHz. Also we developed the simulation model of the probe card by using full-wave simulator and the simulation result is correlated with measurement one. As a result of this simulation model, the cantilever probe and PCB have the worst transfer characteristic in the probe card.

• Journal of Astronomy and Space Sciences
• /
• v.14 no.2
• /
• pp.269-274
• /
• 1997

Langmuir probe was housed in the sounding rocket to test the probe's performance and to find the environmental parameters at the F layer of the ionosphere. The gold plated cylindrical probe had a length of 14㎝ and a diameter of 0.096 ㎝. The applied voltage to the probe consisted of 0.9 sec fixed positive bias followed by 0.1 sec of down/up sweep. This ensured that the probe swept through the probe's current-voltage characteristic at least once during 1 second quiescent periods enabling the electron temperature to be measured during the undisturbed times of the flight. The experimental results showed good agreement of the temperature distribution with IRI model at the lower F layer. In the upper layer, the experimental temperatures were 100-200K lower than the IRI model's because of the different geomagnetic conditions: averaged conditions were used in IRI model and specific conditions were reflected in the experiment.

• Korean Journal of Food Science and Technology
• /
• v.35 no.3
• /
• pp.470-474
• /
• 2003

DNA sequence information on small-subunit rRNA gene (16S rDNA) obtained from food-poisoning bacterial culture was used to investigate the presence of bacterial pathogens in food. By reverse dot blot detection method, presence of food-poisoning bacteria could be confirmed on hybridization of digoxigenin-labeled 16S rDNA Polymerase Chain Reaction (PCR) primer product and biotin-labeled specific oligonucleotide probe. Escherichia coli, Bacillus cereus. and Salmonella sp. were used as the representative food-poisoning bacterial microorganisms. An oligonucleotide probe, based on the variable region of 16S rRNA gene, was used as the specific probe. These tools may be more useful than classic biochemical method for rapid identification of contaminated food.

• Transactions of the Korean Society of Pressure Vessels and Piping
• /
• v.5 no.1
• /
• pp.25-31
• /
• 2009

Steam Generator(SG) tube is an important component of Nuclear Power Plant(NPP), which comprises of the pressure boundary of primary system. The integrity of SG tube has been confirmed by the eddy current test every outage. In Korea, Bobbin probe and MRPC probe have been generally used for the eddy current test. Meanwhile the usage of Array probe has gradually increased in U.S., Japan and other countries. In this study, we investigated the defect detection capability of the Array probe through its preliminary application to SG tube inspection. The Array probe has the equivalent capability in the defect detection and sizing as the conventional methods. Thus it is desirable that the Array probe is generally applied to SG tube inspection in the domestic NPPs.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.05a
• /
• pp.811-812
• /
• 2012

• Journal of the Korean Society for Aviation and Aeronautics
• /
• v.14 no.1
• /
• pp.43-48
• /
• 2006

The present study was carried out in order to develope a seven-hole pressure probe which is able to measure high flow angles. The seven-hole pressure probe is a non-nulling, directional velocity probe used for measuring three dimensional flow that having high flow angles. A 4 mm diameter seven-hole conical pressure probe was manufactured with a cone angle of 70$^{\circ}$. The probe was comprised of seven 1 mm diameter stainless steel tubes packed close together and fitted into an outer stainless steel sleeve. The calibration procedure is based on the use of the Callington's polynomial curve-fit method. The validity of the seven-hole conical pressure probe is demonstrated by comparisons with hot-wire data.

• Proceedings of the KIEE Conference
• /
• 1989.11a
• /
• pp.151-154
• /
• 1989

In the measurement of plasma parameters of the plasma C.V.D with probe method, the most important problem is the contamination of the probe surface. In this paper, we observe the surface contamination of probe surface with microscope and determine the critical current and the critical time to sustain the clean surface of probe in the plasma C.V.D.