• Composites Research
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• 제16권6호
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• pp.56-61
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• 2003

In this Paper, a fiber Bragg grating(FBG) sensor system is described and FBGs are well-suited for long term and extremely severe experiments, where traditional strain gauges fail. In the system. a reflect wave-length measurement method which employs a tunable light source to find out the center wave-length of FBG sensor is used. We apply the FBG system to nuclear energy Power Plant for structural integrity test to measure the displacement of the structure under designed pressure and to check the elasticity of the structure by measuring the residual strain. The system works very well and it is expected that it can be used for a real-time strain, temperature and vibration detector of smart structure.

• 센서학회지
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• 제20권5호
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• pp.322-328
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• 2011

There are many ways to detect the heart rate non-invasively such as ECG, PPG, strain gauge, and pressure sensor. In this paper, the pulse wave measurement system using bipolar biased head on mode of the Hall sensor is proposed for measuring the radial artery pulse. TMS320F2812 was used to implement the proposed system and a portable wireless network(zig-bee) was used to show the experimental result. It was confirmed from experiment that the performance of the implemented system was more stable and faster than PPG sensor or piezoelectric film pressure sensor.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2006년도 하계학술대회 논문집 Vol.7
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• pp.350-351
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• 2006

Thick film mechanical sensors can be categorized into four main areas piezoresistive, piezoelectric, capacitive and mechanic tube. In this areas, the thick film strain gage is the earliest example of a primary sensing element based on the substrates. The latest thick film sensor is used various pastes that have been specifically developed for pressure sensor application. Some elastic materials exhibit a change in bulk resistivity when they are subjected to displacement by an applied pressure. This property is referred to as piezoresistivity and is a major factor influencing the sensitivity of a piezoresistive strain gage. The effect of thick film resistors was first noticed in the early 1970, as described by Holmes in his paper in 1973.

• 전자통신동향분석
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• 제35권4호
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• pp.11-20
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• 2020

With the widespread use of high-performance electronics and mobile communications, electromagnetic interference (EMI) shielding has become crucial for protection against malfunctioning of electronic equipment and harmful effects to human health. In addition, smart sensor technologies will be rapidly developed in untact (non-contact) environments and personal healthcare fields. Herein, we introduce our recently developed technologies for flexible multifunctional EMI shielding, and highly sensitive wearable pressure-strain and humidity sensors realized using low-dimensional nanomaterials.

• 센서학회지
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• 제5권2호
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• pp.1-8
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• 1996

본 논문에서는 감도를 향상시키고 저압력 범위에서 다이어프램의 휨을 감소시킴으로서 선형성이 향상되도록 한 센터 보스(center boss) 다이어프램 구조를 갖는 압력센서를 설계 하였다. 설계한 센터보스형 압력센서의 최대 휨은 $0.125{\mu}m$, 최대 응력은 $2.24{\times}10^{7}\;Pa$, 최대 스트레인은 $132\;{\mu}strain$, 감도는 27.67 mV/V.psi로서 휨은 다이어프램 두께의 약 1/160, 정사각형 구조일때의 1/35로 감소하였고 감도는 정사각형 구조일때보다 19배정도 증가하였다.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2002년도 추계학술대회 발표 논문집
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• pp.59-63
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• 2002

This paper reports on the fabrication process and characteristics of a ceramic thin-film pressure sensor based on Ta-N strain-gauges for harsh environment applications. The Ta-N thin-film strain-gauges are sputter-deposited on a thermally oxidized micromachined Si diaphragms with buried cavities for overpressure tolerance. The proposed device takes advantage of the good mechanical properties of single-crystalline Si as a diaphragm fabricated by SDB and electrochemical etch-stop technology, and in order to extend the temperature range, it has relatively higher resistance, stability and gauge factor of Ta-N thin-films more than other gauges. The fabricated pressure sensor presents a low temperature coefficient of resistance, high-sensitivity, low non-linearity and excellent temperature stability. The sensitivity is 1.21 ~ 1.097 mV/V.kgf/$\textrm{cm}^2$ in temperature ranges of 25~ $200^{\circ}C$ and a maximum non-linearity is 0.43 %FS.

• 센서학회지
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• 제21권1호
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• pp.75-81
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• 2012

Optimizing the tapping time of a blast furnace is important to a stable operation and life extension. To optimize the tapping time of the blast furnace, the location of Hearth Liquid Level should be recognized. There are several ways to measure the hearth liquid level in the blast furnace, such as Electromotive Force(EMF) measurement, pressure measurement by putting in nitrogen probe and manometry with strain gauge. In this paper, it will be discussed using strain gauge among the three methods. Conventional strain gauge must be revised periodically. Since, internal pressure, temperature of internal refractory material and wind pressure have effect on the strain gauge. However, static pressure value is required to compensate. To solve these problems, this paper suggests finding relationship between Hearth Liquid Level and strain gauge output, adding digital filter in strain gauge. Using the proposed method, it was possible to estimate the hearth liquid level and determine the appropriate tapping time. Usefulness of the proposed method through simulations and experimental results are confirmed.

• 대한기계학회논문집A
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• 제41권3호
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• pp.187-192
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• 2017

본 논문에서는 탄소나노튜브 전왜성 복합소재(Nano-Carbon Piezoresistive Composite, NCPC)를 기반으로 하며, 3D 프린팅 공정을 활용하여 제작된 압력센서의 개발 진행 연구를 소개하였다. 압력센서의 성능을 향상시키기 위하여 센서전극을 외팔보 형태로 설계하였고 3D 프린팅 공정을 활용하여 소형전극을 제작하였다. 압력을 전기적 저항의 변화로 바꾸는 전왜성 센서의 전극은 2wt%의 다중벽 탄소나노튜브/에폭시 전왜성 복합소재로 제작하였다. 센서는 압력시스템에 용이하게 적용하기 위하여 파이프 플러그 캡에 삽입하여 제작을 하였으며, 실험실 환경에서 압력교정기를 활용하여 실험을 하였다. 외팔보 전극의 압력센서는 16,500kPa까지 선형적인 출력전압 특성을 보였으며, 이는 벌크형 전극의 압력센서 대비 약 200% 압력측정 성능 향상을 보였다.

• E2M - 전기 전자와 첨단 소재
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• 제10권9호
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• pp.938-944
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• 1997

Cu-Ni thin film strain gauges for diaphragm-type pressure sensors were developed. Thin films of Cu-Ni alloys of various compositions were deposited onto glass and stainless steel substrates by RF magnetron sputtering. The effects of composition substrate temperature Ar partial pressure and aging on the electrical properties of Cu-Ni film strain gauges in the thickness range 500~2000$\AA$ are discussed. The maximum resistivity(95.6 $\mu$$\Omega$cm) is obtained from 53wt%Cu-47wt%Ni films while the temperature coefficient of resistance(TCR) becomes minimum(25.6ppm/$^{\circ}C$). The gauge factor is about 1.9.

• 센서학회지
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• 제33권3호
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• pp.173-178
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• 2024

Development of pressure sensors for harsh environments with high pressure, humidity, and temperature is essential for many applications in the aerospace, marine, and automobile industries. However, existing materials such as polymers, adhesives, and semiconductors are not suitable for these conditions and require materials that are less sensitive to the external environment. This study proposed a pressure sensor that could withstand harsh environments and had high durability and precision. The sensor comprised a piezoresistor pattern and an insulating film directly formed on a stainless-steel membrane. To achieve the highest sensitivity, a pattern design method was proposed that considered the stress distribution in a circular membrane using finite element analysis. The manufacturing process involved depositing and etching a dielectric insulating film and metal piezoresistive material, resulting in a device with high linearity and slight hysteresis in the range of a maximum of 40 atm. The simplicity and effectiveness of this sensor render it a promising candidate for various applications in extreme environments.