• E2M - 전기 전자와 첨단 소재
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• 제9권9호
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• pp.911-917
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• 1996

Platinum thin films were deposited on Si-wafer by DC rnagnetron sputtering for RTD (resistance thermometer devices). We investigated the physical and electrical characteristics of these films under various conditions, the input power, working vacuum, temperature of substrate and also after annealing these films. The deposition rate was increased with increasing the input power but decreased with increasing Ar gas pressure. The resistivity and sheet resistivity were decreased with increasing the temperature of substrate and the annealing time at 1000.deg. C. At substrate temperature of >$300^{\circ}C$, input power of 7 w/cm$^{2}$, working vacuum of 5 mtorr and annealing conditions of 1000.deg. C and 240 min, we obtained 10.65.mu..ohm..cm, resistivity of Pt thin films and 3800-3900 ppm/.deg. C, TCR(temperature coefficient of resistance). These values are close to the bulk value. These results indicate that the Pt thin films deposited by DC magnetron sputtering have potentiality for the development of Pt RTD temperature sensor.

• 한국멀티미디어학회논문지
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• 제17권11호
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• pp.1363-1373
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• 2014

In this study, a hybrid multi-cup electric cupping system (HMECS) was proposed, based on the ancient cupping method. HMECS consisted of several cups that could be used simultaneously to treat different areas of the patient's body. Each cup was equipped with its own pump and pressure-monitoring system. Moreover, the vacuum pressure of the cups was controlled using fuzzy logic. Through automated control of the vacuum pressure, long-term relief of muscle tightness was achieved. To develop a scientific foundation for this alternative treatment, we compared the VAS(Visual Analog Scale) and ODI(Oswestry Disability Index) scores from conventional basic cupping to the VAS and ODI scores for our proposed HMECS. The improvement rate in the VAS and ODI scores using HMECS after three treatments was higher than that achieved by basic cupping. These results, combined with the convenience offered by enhanced IT capabilities, should increase the popularity of this device among an aging society, and facilitate the opportunity to further explore the potential of Oriental medical practices.

• Journal of Magnetics
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• 제2권2호
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• pp.50-54
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• 1997

The vacuum-annealed Ni80Fe20/Ag discontinuous multilayers were found to show giant magnetoresistive behaviors comparable to those of corresponding multilayers annealed at atmospheric pressure in a mixture of H2 and Ar. This vacuum-annealing process will offer potential advantages, enabling a continuous batch process from the deposition to the annealing. Their giant magnetoresistive behaviors were attributed to the magnetostatic coupling that are induced at the edges of the discontinuous magnetic grains. We also present our results about the multilayer patterned into a basic device for the magnetic field sensor.

• 산업기술연구
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• 제34권
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• pp.67-70
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• 2014

In this paper, we propose a diagnosis algorithm for 25.8kV $N_2$ insulated Pad-mounted Switchgear in oder to improve reliability by preventing of fault in advance. The proposed algorithm can diagnose the problems of Pad-mounted Switchgear such as gas leakage and VI(Vacuum Interrupter) trouble (contact abrasion, coil aging etc.) by using pressure sensor, stroke sensor and coil current sensor.

• Applied Biological Chemistry
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• 제30권1호
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• pp.65-70
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• 1987

Strain gauge로 식품(食品)의 감압건조과정중(減壓乾燥過程中) 압력(壓力)과 수분감소량(水分減少量)을 계측(計測)할 수 있는 감응소자를 제작(製作)하고 이를 Apple II마이크로 컴퓨터에 접속(接續)하여 마이크로컴퓨터 감압건조(減壓乾燥)시스템을 제작(製作)하였다. 부르돈관 표면에 strain gauge를 접착하여 제작한 감압계측(減壓計測)단자의 출력(出力)값은 디지탈화시킨 후 MC 6821 접속 I.C. chip을 통하여 마이크로컴퓨터에 입력(入力)시켰다. 컴퓨터 입력값(D)과 감압실(減壓室)의 압력(壓力)(P,mmHg)과의 관계는 P=-146.136+3.620D(r=0.994)이었다. 감압건조실(減壓乾燥室)의 압력은 컴퓨터 프로그램에 의하여 $400{\sim}600mmHg$의 범위에서 30mmHg의 오차(誤差)로 제어(制御)할 수 있었다. 건조시료(乾燥試料)의 무게(W, g)와 load cell을 통한 컴퓨터 디지 털출력값(D)과의 관계는 W=-14.000十0.585D (r=0.9998)이었다. $64^{\circ}C,\;400{\sim}600mmHg$하에서 풋고추의 건조곡선(乾燥曲線)은 완숙고추의 상압건조곡선(常壓乾燥曲線)과 비슷하였으며 형태(形態)에 따른 건조속도(乾燥速度)의 변화(變化)는 상이하였고 진공도(眞空度)에도 영향을 받았다. 풋고추의 감압건조중(減壓乾燥中) 수분이동(水分移動)은 Page model을 따랐으며 그 관계식(關係式)은 원형(原型) 풋고추의 경우 $M-M_e/M_o-M_e={\exp}(-0.0673{\theta}^{1.177})$이었고 반절(半切)풋고추의 경우 $M-M_e/M_o-M_e={\exp}(-0.0655{\theta}^{1.477})$이었다.

• 센서학회지
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• 제32권1호
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• pp.39-43
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• 2023

Microscale thermophysical property measurements of liquids have been developed considering the increasing interest in the thermal management of cooling systems and energy storage/transportation systems. To accurately predict the heat transfer performance, information on the thermal conductivity, heat capacity, and density is required. However, a simultaneous analysis of the thermophysical properties of small-volume liquids has rarely been considered. Recently, we proposed a new methodology to simultaneously analyze the aforementioned three intrinsic properties using heater-integrated fluidic resonators (HFRs) in an atmospheric pressure environment comprising a microchannel, resistive heater/thermometer, and mechanical resonator. Typically, the thermal conductivity and volumetric heat capacity are measured based on a temperature response resulting from heating using a resistive thermometer, and the specific heat capacity can be obtained from the volumetric heat capacity by using a resonance densitometer. In this study, we analyze methods to improve the thermophysical property measurement performance using HFRs, focusing on the effect of the ambience around the sensor. The analytical method is validated using a numerical analysis, whose results agree well with preliminary experimental results. In a vacuum environment, the thermal conductivity measurement performance is enhanced, except for the thermal conductivity range of most gases, and the sensitivity of the specific heat capacity measurement is enhanced owing to an increase in the time constant.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.162.1-162.1
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• 2015

The use of plasma has increased in bio-application field in recent years. Particularly, water treated by arc discharge or atmospheric pressure plasma has been actively utilized in bio-industry. In this study, we have developed a plasma activated water generating system. For this system, two kinds of plasma sources; dielectric barrier discharge (DBD) plasma and arc discharge plasma have been used. The discharge energy was calculated using the breakdown voltage and current, and the emission spectrum was measured to investigate the generated reactive species. We also analyzed the amount of reactive oxygen and nitrogen species in water using the chemical methods and nitric oxide sensor. Finally, the influence of plasma generated reactive species on the germination and growth of spinach (Spinacia oleracea) was investigated. Spinach is a green leafy vegetable that contains a large amount of various physiologically active organic compounds. However, it is characterized with a low seed germination rate.

• Journal of Korean Vacuum Science & Technology
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• 제3권2호
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• pp.126-129
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• 1999

PbTio3 is a promising material with perovskite structure for pyroelectric sensor applications with its superior pyroelectric properties, low dielectric constants, and low piezoelectric constants. Growth of pyroelectric thin films in general, needs relatively higher temperatures than those of conventional Si semiconductor processing However, low growth temperature is advantageous for the device integration. We report the low temperature (350$^{\circ}C$) growth of PbTio3 thin films by 3-gun DC magnetron reactive sputtering. The effects of substrate temperature, Pb-flux, and total pressure on crystalinity and preferred orientation of PbTio3 thin films are reported.

• 한국전기전자재료학회논문지
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• 제19권5호
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• pp.405-410
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• 2006

We fabricated gas sensors using carbon nanotubes (CNTs) as electron emitters for the purpose of detecting inert gases. By using the silicon-glass anodic bonding and glass patterning technologies with the typical Si process, we improved the compactness of the sensors and the reliability in process. The proposed sensor, based on, an electrical discharge theory known as Paschen's law in principle, works by figuring the variation of the discharge current depending on gas concentration. In the experiment, the initial breakdown characteristics were measured for air and Ar as a function of gas pressure. As the result, even though it should be realized that there are many other factors which have an effect on the breakdown of a gap, the sensors led to similar result as predicted by Paschen's law, and they showed a possibility as gas sensors which enable to detect the gas density ranged to the vacuum pressure from 1 to $10^{-3}$ Torr.

• 대한의용생체공학회:의공학회지
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• 제42권4호
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• pp.193-200
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• 2021

Flowmeter and oxygen sensors are listed in COVID-19 essential medical devices. This article reports a Teensy microcontroller-based Oxygen mass flow controller (MFC), core part of the oxygen respirator or extracorporeal membrane oxygenation (ECMO). The developed MFC consisting of the microcontroller, MEMS flow sensor, and solenoid valve was able to accurately control 0 to 100 sccm of oxygen flow rate. The pressure of vacuum chamber increased proportionally to the flow rate (0.998 of Pearson correlation coefficient). The experimental results proved that the developed MFC exhibits comparable performance to a commercial MFC in accuracy, settling time, linearity with pressure, and repeatability of oxygen mass flow control. It is expected that this simple and cheap MFC is utilized for oxygen therapy against the severe acute respiratory syndrome coronavirus 2.