• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.20 no.12
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• pp.1128-1138
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• 2010

One of the typical problems in the precise vibration is resonance characteristics at low frequency disturbance due to a heavy mass. An electro-magnetic(EM) air spring is a kind of vibration control unit and active isolator. The EM air spring in this study aims at removing the low frequency resonance for semiconductor manufacturing. The mechanical and electronic parts in the active isolator are designed to operate under a weight of 2.5 tons. The EM spring is floated using air pressure in a pneumatic elastic chamber and actuated by EM levitation force. The actuator consists of a EM coil and a permanent magnetic plate which are installed inside of the chamber. An air mount was constructed for the experiment with a stone surface plate, 4 active air springs, 4 gap sensors, a DSP controller, and a multi-channel power amp. A PD control method and operating logic was applied to the DSP. Simulation using 1/4 model was carried out and compared with the experiments. The time duration and maximum peak at resonance frequency can be reduced sharply by the proposed system. The results show that the active system can avoid the resonance caused by the natural frequency of the passive system.

• Korean Journal of Agricultural and Forest Meteorology
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• v.22 no.3
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• pp.144-151
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• 2020

Agrivoltaic systems (AVS) is defined as combining farm-grown crops with photovoltaic panels (PV) installed several meters above the ground. Solar radiation (W/㎡), photosynthetic photon flux density (PPFD, µmol/㎡/s), air temperature (℃), vapor pressure (kPa), soil moisture (㎥/㎥), soil temperature (℃), wind direction (˚), and wind speed (m/s) were measured under the AVS in Boseong-gun during winter barley season. Data was collected by 5 minute interval. All data can download at Github site (https://github.com/chojaeil/AVS_Boseung). To gap-filling missing solar radiation data during about two weeks, the conversion coefficient from solar radiation to PPFD was estimated as 0.41. Further, according to the ratio of diffuse radiation to direct radiation, the maximum value among the twenty PPFD sensors under the AVS was related to the PPFD value of filed.

• Transactions of the Korean Society of Automotive Engineers
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• v.23 no.2
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• pp.199-207
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• 2015

Solid materials of ammonia sources with SCR have been considered for the application of lean NOx reduction in automobile industry, to overcome complex problems of liquid urea based SCR. These solid materials produce ammonia gas directly with proper heating and can be packaged by compact size, because of high volumetric ammonia density. Among ammonium salts and metal ammine chlorides, calcium ammine chloride was focused on this paper due to low decomposition temperature. In order to make calcium ammine chloride in lab-scale, simple reactor and glove box was designed and built with ammonium gas tank, regulator, and sensors. Basic test conditions of charging ammonia gas to anhydrous calcium chloride are chosen from equilibrium vapor pressure by Van't Hoff plot based on thermodynamic properties of materials. Synthetic method of calcium ammine chloride were studied for different durations, temperatures, and pressures with proper ammonia gas charged, as a respect of ammonia gas adsorption rate(%) from simple weight calculations which were confirmed by IC. Also, lab-made calcium ammine chloride were analyzed by TGA and DSC to clarify decomposition step in the equations of chemical reaction. To understand material characteristics for lab-made calcium ammine chloride, DA, XRD and FT-IR analysis were performed with published data of literature. From analytical results, water content in lab-made calcium ammine chloride can be discovered and new test procedures of water removal were proposed.

• Journal of Sensor Science and Technology
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• v.10 no.5
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• pp.279-285
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• 2001

The capnograph system for determining the partial pressure of carbon dioxide in the blood of a patient was developed based on the NDIR(non-dispersive infrared) absorption technology. NDIR gas analyzing method requires an optical absorption chamber and signal processing hardware. In this paper, we have designed and implemented NDIR type $CO_2$ gas chamber in consideration of the time response characteristics and lamp chopping frequency. And we have implemented signal processing hardware using two infrared sources to reduce the thermal background effect. The implemented gas chamber and signal processing hardware were tested in the temperature variation experiment and human expiratory experiment. The results showed that the system could produce a stable output signal and a good $CO_2$ gas concentration curve like a typical capnogram.

• Journal of Sensor Science and Technology
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• v.9 no.5
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• pp.334-340
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• 2000

This paper presents the fabrication of a micro electromagnetic flow sensor for the liquid flow rate measurement. The micro electromagnetic flow sensor has some advantages such as a simple structure, no heat generation, a rapid response and no pressure loss. The principle of the micro electromagnetic flow sensor is based on Faraday's law. If conductive fluid passes through a magnetic field, the electromotive force is generated and detected by two electrodes on the wall of the flow channel. The flow sensor consists of two permanent magnets and a silicon flow channel with two electrodes. The dimension of the flow sensor is $9\;mm\;{\times}\;9\;mm\;{\times}\;1\;mm$. The micro flow channel is mainly fabricated by anisotropic etching of two silicon wafers, and the detection electrodes are fabricated by metal evaporation process. The characteristic of the fabricated flow sensor is obtained experimentally. When the flow rates of water with the conductance of $100-200\;{\mu}S/cm$ are 9.1 ml/min and 62 ml/min, the generated electromotive forces are $261\;{\mu}V$ and 7.3 mV, respectively.

• Journal of Sensor Science and Technology
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• v.9 no.5
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• pp.380-388
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• 2000

The finite element analysis of a micro turbine was made to investigate safety margin of its operating condition for the high aspect ratio nickel micro turbine blades fabricated by conventional LIGA-like method. From our study, we found that the fabricated turbine could not exceed its yield strength even if the pressure difference between inlet and outlet of turbine blade was about 44kPa, and the correlation of friction coefficient and the maximum stress, caused by contact friction between outer diameter of shaft and inner diameter of turbine blade, was somewhat reciprocal. The maximum stress was decreased with the increasing contact friction, when turbine blade was in its state of rotation. By the results of our study, we conclude that it is possible to fabricate metal micro turbine more easily han surface micromachining technology and to operate with no risk of metal structure's damage, which is caused by yield strength, if the operating condition with the design of micro turbine itself are optimized. It is useful to adopt other applications which have the contact problems between a moving part and the fixed one in micro structures.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.58-64
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• 2006

In this study, we describe a low-temperature wafer-level thermocompression bonding using electroplated gold seal line and bonding pads by electroplating method for RF-MEMS devices. Silicon wafers, electroplated with gold (Au), were completely bonded at $320^{\circ}C$ for 30 min at a pressure of 2.5 MPa. The through-hole interconnection between the packaged devices and external terminal did not need metal filling process and was made by gold films deposited on the sidewall of the throughhole. This process was low-cost and short in duration. Helium leak rate, which is measured to evaluate the reliability of bonded wafers, was $2.7{\pm}0.614{\times}10^{-10}Pam^{3}/s$. The insertion loss of the CPW packaged was $-0.069{\sim}-0.085\;dB$. The difference of the insertion loss between the unpackaged and packaged CPW was less than -0.03. These values show very good RF characteristics of the packaging. Therefore, gold thermocompression bonding can be applied to high quality hermetic wafer level packaging of RF-MEMS devices.

• Transactions of the Korean Society of Automotive Engineers
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• v.19 no.3
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• pp.29-37
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• 2011

The modal characteristics of a compressor wheel of an automotive turbocharger have been investigated using an experimental method based on an acoustic frequency response function, p/f(${\omega}$), where p is sound pressure radiated from a structure, and f is impact force. First, a well-defined annular disc with narrow radial slots was examined to check whether the vibro-acoustic test could precisely determine natural quencies and vibration modes of structures showing that the vibro-acoustic test proposed in this paper was comparable to the conventional modal test with an accelerometer and the numerical analysis. The conventional method has been found to be inappropriate for compressor wheel because of additional mass due to the accelerometer and additional damping from the accelerometer cable alter the dynamic responses of the wheel blades. odal characteristics of the wheel have been defined using vibro-acoustic test and verified with the results from another conventional method using a laser vibrometer. Natural quencies and mode shapes of a turbocharger wheel, which can't be precisely obtained with onventional method, could be defined accurately without the additional effects from sensor and cable. Proposed method can be applied to small structures where conventional sensors and cables could generate troubles.

• Journal of Sensor Science and Technology
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• v.6 no.6
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• pp.466-475
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• 1997

In this paper, an implantable middle ear hearing aids using an electromagnetic transducer which consists of a tiny coil and a magnet is designed, and objective design method to implement a vibrator of the electromagnetic type transducer is proposed. Sound characteristic of the electromagnetic type vibrator is excellent but power transfer rate is lower than that of a ceramic type. To improve power transfer efficiency of system, external and inner part of a middle ear system is designed using FM transmission method. We implemented an experimental set of the designed transducer, inner part, and outer part. Then, we measured vibration characteristics of a metal strip and a temporal bone of a dead body. As the results, we confirmed the advantage of FM method and showed that designed transducer could effectively transmit vibration of amplified input sound pressure to ossicle.

• Journal of Sensor Science and Technology
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• v.4 no.3
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• pp.37-42
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• 1995

The PLT thin films on MgO substrate have been fabricated by RF magnetron sputtering and the dependence of properties on fabrication conditions have been studied. The PbO-rich target was used and the optimum fabrication conditions of the PLT thin films were such that substrate temperature, working pressure, $Ar/O_{2}$ ratio, and rf power was $640^{\circ}C$, 10 mTorr, 10:1, and $1.7\;W/cm^{2}$, repectively. In these conditions, the PLT thin film showed the deposition rate of $62.5\;{\AA}/min$, the Pb/Ti ratio of 1/2, and the dielectric constant of 200. The PLT thin film showed good c-axis orientation and crystalinity according to XRD and SEM analysis.