Thermocompression bonding for wafer level hermetic packaging of RF-MEMS devices
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Park, Gil-Soo
(Department of Materials Science and Engineering, Korea University)
Seo, Sang-Won (Department of Electrical Engineering, Korea University) Choi, Woo-Beom (B&P Science) Kim, Jin-Sang (Korea Institute of Science and Technology) Nahm, Sahn (Department of Materials Science and Engineering, Korea University) Lee, Jong-Heun (Department of Materials Science and Engineering, Korea University) Ju, Byeong-Kwon (Department of Electrical Engineering, Korea University) |
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