• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2009년도 제38회 동계학술대회 초록집
• /
• pp.464-464
• /
• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• 한국수자원학회논문집
• /
• 제30권5호
• /
• pp.561-570
• /
• 1997

본 연구에서는 (1) 운동과 이론에 기초한 강우, 유출 특성을 파악하고, (2) 강우 및 유수에 의해서 발생하는 침식, 퇴적량을 산정하는 모형을 연구하며, (3) 유사량 산정식, 유역의 불할 수 등이 하상변동 예측에 미치는 영향을 분석하고, (4) 평창강 유역에서 하도자료, 강우, 유츨량, 유사량 등을 실측하여 모형의 적용성을 검증하였다. 운동파 방정식을 평창강 유역에 적용하여 유출해석을 실시한 결과, 첨두 유량의 발생시간은 다소 빠르게 계산되었으나 전체적인 수문곡선의 형태 및 크기에 있어서는 비교적 실측치에 접근하고 있었다. 유사량 곡선은 유출수문곡선에 따라 변화되며, 실측치와 계산치는 비교적 일치하고 있어서 모형의 적용성을 확인할 수 있었다. 유역의 분할 소유역 개수를 증가하여 유출량 및 유사량을 계산하는 것이 실측치에 더욱 접근한 결과를 얻을 수 있었다. 6개의 유사량 산정공식 중 지표면에서는 Yalin 식을, 하도에서는 Acker-White 식을 적용하여 계산한 결과치가 실측치에 가장 가까운 결과를 얻을 수 있었다.

• Bulletin of the Korean Chemical Society
• /
• 제18권12호
• /
• pp.1274-1280
• /
• 1997

The photodissociation dynamics of CH2I2 has been studied at 304 nm by state-selective photofragment translational spectroscopy. Velocity distributions, anisotropy parameters, and relative quantum yields are obtained for the ground I(2P3/2) and spin-orbit excited state I*(2P1/2) iodine atoms, which are produced from photodissociation of CH2I2 at this wavelength. These processes are found to occur via B1 ← A1 type electronic transitions. The quantum yield of I*(2P1/2) is determined to be 0.25, indicating that the formation of ground state iodine is clearly the favored dissociation channel in the 304 nm wavelength region. From the angular distribution of dissociation products, the anisotropy parameters are determined to be β(I)=0.4 for the I(2P3/2) and β(I*)=0.55 for the I*(2P1/2) which substantially differ from the limiting value of 1.13. The positive values of anisotropy parameter, however, show that the primary processes for I and I* formation channels proceed dominantly via a transition which is parallel to I-I axis. The above results are interpreted in terms of dual path formation of iodine atoms from two different excited states, i.e., a direct and an indirect dissociation via curve crossing between these states. The translational energy distributions of recoil fragments reveal that a large fraction of the available energy goes into the internal excitation of the CH2I photofragment; < Eint > /Eavl=0.80 and 0.82 for the I and I* formation channels, respectively. The quantitative analysis for the energy partitioning of available energy into the photofragments is used to compare the experimental results with the prediction of direct impulsive model for photodissociation dynamics.

• Steel and Composite Structures
• /
• 제33권4호
• /
• pp.489-507
• /
• 2019

In order to obtain high bearing capacity and good ductility simultaneously, a structural column with hybrid normal and high strength steel (HNHSS) welded box section has been developed. Residual stress is an important factor that can influence the behaviour of a structural member in steel structures. Accordingly, the magnitudes and distributions of residual stresses in HNHSS welded box sections were investigated experimentally using the sectioning method. In this study, the following four box sections were tested: one normal strength steel (NSS) section, one high strength steel (HSS) section, and two HNHSS sections. Based on the experimental data from previous studies and the test results of this study, the effects of the width-to-thickness ratio of plate, yield strength of plate, and the plate thickness of the residual stresses of welded box sections were investigated in detail. A unified residual stress model for NSS, HSS and HNHSS welded box sections was proposed, and the corresponding simplified prediction equations for the maximum tensile residual stress ratio (${\sigma}_{rt}/f_y$) and average compressive residual stress ratio (${\sigma}_{rc}/f_y$) in the model were quantitatively established. The predicted magnitudes and distributions of residual stresses for four tested sections in this study by using the proposed residual stress model were compared with the experimental results, and the feasibility of this proposed model was shown to be in good agreement.

• 대한조선학회논문집
• /
• 제31권4호
• /
• pp.119-129
• /
• 1994

본 연구의 목적은 좌초시 선저 보강판 부재를 대상으로 강체 웨지가 종방향으로 보강된 판으로 진입할 때의 흡수에너지-찢김길이 관계를 나타내는 실험식을 도출하는 것이다. 본 연구는 제1보에서 수행한 시리즈 실험 결과 및 찢김응답에 관한 주요 인자들의 중요도 조사 결과를 바탕으로 하고 있다. 준정적 하중상태에서 수행된 실험 결과를 바탕으로 무차원 해석을 수행하여 찢김이 진행되는 동안의 판부재의 흡수에너지를 찢김길이, 항복응력, 등가판두께, 웨지각도의 함수로 정식화하였다. 또한, 이식을 충격하중 작용시에도 적용할 수 있도록 동적 효과를 고려하였다. 특히, 본 연구에서는 동적 마찰 효과를 고려하기 위하여 동적 마찰 감소 계수의 개념을 도입하였다. 본 제안식의 유용성을 확인하기 위하여 기존의 제안식 및 충격 실험에 의해 얻어진 결과와 본 제안식의 결과를 비교하였다.

• Journal of Plant Biotechnology
• /
• 제48권3호
• /
• pp.148-155
• /
• 2021

Gibberellins (GAs) are essential phytohormones for plant growth that influence developmental processes and crop yields. Recent functional genomic analyses of model plants have yielded good characterizations of the canonical GA signaling pathways and related genes. Although Panax ginseng has long been considered to have economic and medicinal importance, functional genomic studies of the GA signaling pathways in this crucial perennial herb plant have been rarely conducted. Here, we identified and performed functional analysis of the GA signaling-related genes, including PgGID1s, PgSLY1s, and PgRGAs. We confirmed that the physiological role of GA signaling components in P. ginseng was evolutionarily conserved. In addition, the important functional domains and amino acid residues for protein interactions among active GA, GID1, SCF^SLY1, and RGA were also functionally conserved. Prediction and comparison of crystallographic structural similarities between PgGID1s and AtGID1a supported their function as GA receptors. Moreover, the subcellular localization and GA-dependent promotion of DELLA degradation in P. ginseng was similar to the canonical GA signaling pathways in other plants. Finally, we found that overexpression of PgRGA2 and PgSLY1-1 was sufficient to complement the GA-related phenotypes of atgid1a/c double- and rga quintuple-mutants, respectively. This critical information for these GA signaling genes has the potential to facilitate future genetic engineering and breeding of P. ginseng for increased crop yield and production of useful substances.

• 대한원격탐사학회지
• /
• 제35권1호
• /
• pp.57-81
• /
• 2019

Satellite images can be integrated into a crop model to strengthen the advantages of each technique for crop monitoring and to compensate for weaknesses of each other, which can be systematically applied for monitoring inaccessible croplands. The objective of this study was to outline the productivity of paddy rice based on simulation of the yield of all paddy fields in North Korea, using a grid crop model combined with optical satellite imagery. The grid GRAMI-rice model was used to simulate paddy rice yields for inaccessible North Korea based on the bidirectional reflectance distribution function-adjusted vegetation indices (VIs) and the solar insolation. VIs and solar insolation for the model simulation were obtained from the Geostationary Ocean Color Imager (GOCI) and the Meteorological Imager (MI) sensors of the Communication Ocean and Meteorological Satellite (COMS). Reanalysis data of air temperature were achieved from the Korea Local Analysis and Prediction System (KLAPS). Study results showed that the yields of paddy rice were reproduced with a statistically significant range of accuracy. The regional characteristics of crops for all of the sites in North Korea were successfully defined into four clusters through a spatial analysis using the K-means clustering approach. The current study has demonstrated the potential effectiveness of characterization of crop productivity based on incorporation of a crop model with satellite images, which is a proven consistent technique for monitoring of crop productivity in inaccessible regions.

• 한국산학기술학회논문지
• /
• 제20권2호
• /
• pp.200-209
• /
• 2019

미래 값을 예측할 때, 학습 오차(training error)를 최소화하여 추정된 모형은 보통 많은 테스트 오차(test error)를 야기할 수 있다. 이것은 추정 모델이 주어진 데이터 집합에만 집중하여 발생하는 모델 복잡성에 따른 과적합(overfitting) 문제이다. 일부 정규화 및 리샘플링 방법은 이 문제를 완화하여 테스트 오차를 줄이기 위해 도입되었지만, 이 방법들 또한 주어진 데이터 집합에서만 국한 되도록 설계되었다. 본 논문에서는 테스트 오차 최소화 문제를 학습 오차 최소화 문제로 변환하여 테스트 오차를 줄이기 위한 새로운 최적화 방법을 제안한다. 이 변환을 수행하기 위해 주어진 데이터 집합에 대해 의사(pseudo) 데이터라고 하는 새로운 데이터를 추가하였다. 그리고 적절한 의사 데이터를 만들기 위해 결측 데이터 보정법의 세 가지 유형을 사용하였다. 예측 모델로서 선형회귀모형, 자기회귀모형, ridge 회귀모형을 사용하고 이 모형들에 의사 데이터 방법을 적용하였다. 또한, 의사 데이터로 조정된 최적화 방법을 활용하여 환경 데이터 및 금융 데이터에 적용한 사례를 제시하였다. 결과적으로 이 논문에서 제시된 방법은 원래의 예측 모형보다 테스트 오차를 감소시키는 것으로 나타났다.

• 한국정보통신학회:학술대회논문집
• /
• 한국정보통신학회 2014년도 춘계학술대회
• /
• pp.816-818
• /
• 2014

갑상선암 진단 방사성의약품인 $^{123}I$ 생산을 목적으로 한 가스타겟챔버를 개발하고 MCNPX를 이용해 30MeV 빔에너지 가 가스타겟챔버에 어떻게 들어가는지와 들어갔을 경우의 $^{124}Xe$와 핵반응은 어떻게 발생하는지를 모델링하였다. 빔에너지 가 확산되어 가스타겟챔버 내경에 맞아 에너지 손실이 생긴다. 그것은 즉 손실된 에너지가 열로 바뀜으로 타겟챔버가 변형이 일어나기 않게 냉각수를 이용한다. 쿨링시스템도 타겟챔버를 효율적으로 냉각하기위해 냉각수라인을 나선형으로 설계하였다. KIRAMS에서 보유하고 있는 사이크로트론 C30을 이용하여 30MeV 에너지에 100A 빔을 조사해 $^{124}Xe(p,2n)$, $^{124}Xe(p,n)$, $^{124}Xe(p,pn)$ 각각의 핵반응이 일어나는걸 알 수 있었고 생산량을 예측 할 수 있었다.

• Steel and Composite Structures
• /
• 제43권2호
• /
• pp.271-278
• /
• 2022

Buckling is one of the most critical phoneme in the design of steel structures. Lateral torsional buckling (LTB) is particularly significant for slender beams generally subjected to loading in plane. The web distortion effects on LTB are not addressed explicitly in standards for flexural design of steel I-section members. Hence, the present study is focused to predict the influence of the web distortion on the elastic (L_r) limiting lengths given in American Institute of Steel Construction (AISC) code for the lateral torsional buckling (LTB) behavior of steel beams due to no provision in the code for consideration of web distortion. For this aim, the W44x335 beam is adopted in the buckling analysis carried out by the ABAQUS finite element (FE) program since it is one of the most critical sections in terms of lateral torsional buckling (LTB). The strain results at mid-height of the web at mid-span of the beam are taken into account as the monitoring parameters. The web strain results are found to be relatively greater than the yield strain value when L/L_r is equal to 1.0. In other words, the ratio of L/L_r is estimated from the numerical analysis to be about 1.5 when the beam reaches its first yielding at mid-span of the beam at mid-height of the section. Due to the effect of web distortion, the elastic limiting length (L_r) from the numerical analysis is obtained to be considered as greater than the calculated length from the code formulation. It is suggested that the formulations of the limiting length proposed in the code can be corrected considering the influence of the web distortion. This correction can be a modification factor or a shape factor that reduces sectional slenderness for the LTB formulation in the code.