• 제목/요약/키워드: Precursor Analysis

검색결과 647건 처리시간 0.029초

Change the Properties of Amorphous Carbon Hardmask Film Prepared with the Variation of Process Parameters in Plasma Enhanced Chemical Vapor Depostion Systems

  • Kim, Seok Hwan;Yeo, Sanghak;Yang, Jaeyoung;Park, Keunoh;Hur, Gieung;Lee, Jaeho;Lee, Jaichan
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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    • pp.381.2-381.2
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    • 2014
  • In this study the amorphous carbon films were deposited by PECVD at the substrate temperature range of 250 to $600^{\circ}C$, and the process conditions of higher and lower precursor flow rate, respectively. The temperature was a main parameter to control the density and mirco-structures of carbon films, and their's properties depended with the process temperatrue are changed by controlling precursor flow rate. The precursor feeding rate affect on the plasma ion density and a deposition reactivity. This change of film properties was obtained the instrinsic stress, FT-IR & Raman analysis, refractive index (RI) and ext. coef. (k) measured by ellipsometer. In the process conditions of lower and higher flow rate of precursor it had a different intrinsic stress as a function of the substrate temperature.

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PAN 전구체 섬유의 안정화시 전자선 전류의 영향 (Effect of Electron Beam Currents on Stabilization of Polyacrlonitrile Precursor Fiber)

  • 신혜경;전준표;김현빈;강필현
    • 방사선산업학회지
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    • 제5권1호
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    • pp.41-46
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    • 2011
  • Polyacrylonitrile (PAN) fibers are the most widely used precursor of the materials for carbon fibers. The conventional process of carbon fibers from PAN precursor fiber includes two step; stabilization at low temperature and carbonization at high temperature. Compared to thermal stabilization, the stabilization process by electron beam (E-beam) irradiation is a advanced and brief method. However, a stabilization by E-beam irradiation was required a high dose (over 5,000 kGy) and spend over 1.5 hr (1.14 MeV, 1 mA). In the present work the main goal is exploring a quick stabilization process by cotrolling E-beam currents. The effect of various E-beam currents on stabilization of PAN precursor fiber was studied by gel fraction test, thermo gravimertic analysis (TGA), differential scanning calorimetry (DSC), tensile strength, and scanning electron microscopy (SEM) images.

터보압축기의 스톨 발단에 관한 연구 리뷰 (Review of Stall Inception in Turbocompressors)

  • 강정식;강신형
    • 한국유체기계학회 논문집
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    • 제6권4호
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    • pp.58-65
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    • 2003
  • Stall inception means the phenomena of rotating stall initiation. The initiation mechanism of rotating stall, the existence of stall precursor, the behavior of stall precursor, stall warning scheme and control scheme are the main interests in stall inception research. Compared to the studies on rotating stall which has long history, the stall inception has been studied for about recent 20 years. After the first discovery of stall precursor in about 20 years ago, many studies were reported on stall inception phenomena. The inception pattern of 'mode' and 'spike' were found, and some of its characteristics are known. And now the stall inception has become one of the fascinating fields in turbomachinery. The development stall control scheme which apply the reliable stall warning scheme will play a great role in future compressor and aeroengine. This paper reviews the results and analysis methods on stall inception studies.

금속유기물증착법에 의한 $La_2Ti_2O_{7}$ 박막의 제조 (Fabrication of $La_2Ti_2O_{7}$ Film by Metalorganic Deposition)

  • 조경호;우동찬;박철우;이희영;남효덕
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
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    • pp.122-125
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    • 1995
  • Using metalorganic deposition technique, $La_2Ti_2O_{7}$ precursor solution was deposited on platinium coated SiO$_2$/SI(100) substrates by spin-coating process. Crystalline and crack-free films of ∼0.2$\mu\textrm{m}$ thickness were successfully fabricated on the above substrate from four different types of $La_2Ti_2O_{7}$ precursor solutions by proper heat treatment in the temperature range of $700^{\circ}C$$1200^{\circ}C$. Microstructure and X-ray diffraction analysis of $La_2Ti_2O_{7}$ thin film showed that the crystallization temperature and the preferred orientation of $La_2Ti_2O_{7}$ thin film were strongly dependent on the precursor used.

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Development of an Accident Sequence Precursor Methodology and its Application to Significant Accident Precursors

  • Jang, Seunghyun;Park, Sunghyun;Jae, Moosung
    • Nuclear Engineering and Technology
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    • 제49권2호
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    • pp.313-326
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    • 2017
  • The systematic management of plant risk is crucial for enhancing the safety of nuclear power plants and for designing new nuclear power plants. Accident sequence precursor (ASP) analysis may be able to provide risk significance of operational experience by using probabilistic risk assessment to evaluate an operational event quantitatively in terms of its impact on core damage. In this study, an ASP methodology for two operation mode, full power and low power/shutdown operation, has been developed and applied to significant accident precursors that may occur during the operation of nuclear power plants. Two operational events, loss of feedwater and steam generator tube rupture, are identified as ASPs. Therefore, the ASP methodology developed in this study may contribute to identifying plant risk significance as well as to enhancing the safety of nuclear power plants by applying this methodology systematically.

터보압축기의 스톨 발단에 관한 연구 리뷰 (Review of Stall Inception in Turbocompressors)

  • 강정식;강신형
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2003년도 추계학술대회
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    • pp.875-880
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    • 2003
  • Stall inception means the phenomena of rotating stall initiation. The initiation mechanism of rotating stall, the existence of stall precursor, the behavior of stall precursor, stall warning scheme and control scheme are the main interests in stall inception research. Compared to the studies on rotating stall which has long history, the stall inception has been studied for about recent 20 years. After the first discovery of stall precursor in about 20 years ago, many studies were reported on stall inception phenomena. The inception pattern of "mode" and "spike" were found, and some of its characteristics are known. And now the stall inception has become one of the fascinating fields in turbomachinery. This paper reviews the results and analysis methods on stall inception studies.

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Redoxcitrinin, a Biogenetic Precursor of Citrinin from Marine Isolate of Fungus Penicillium sp.

  • Zhang, Dahai;Li, Xianguo;Kang, Jung-Sook;Choi, Hong-Dae;Jung, Jee-H.;Son, Byeng-Wha
    • Journal of Microbiology and Biotechnology
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    • 제17권5호
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    • pp.865-867
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    • 2007
  • A chemical analysis of the fermentation of the marine-derived fungus Penicillium sp. led to the isolation of a biogenetic precursor of citrinin, redoxcitrinin(1), together with polyketide mycotoxins, phenol A(2), citrinin H2(3), 4-hydroxymellein(4), citrinin(5), and phenol A acid(6). The structures of compounds 1-6 were determined on the basis of physicochemical data analyses. Among them, compounds 1-3 exhibited a potent radical scavenging activity against 1,1-diphenyl-2-picrylhydrazyl(DPPH) with $IC_{50}$ values of 27.7, 23.4, and $27.2{\mu}M$, respectively.

Hydroxy-Substituted Polyenaminonitrile as a Soluble Precursor for Rigid-Rod Polybenzoxazole

  • 김지흥;이재관
    • Bulletin of the Korean Chemical Society
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    • 제22권9호
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    • pp.999-1004
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    • 2001
  • (1-Chloro-2,2-dicyanovinyl)benzene or 1,4-bis(1-chloro-2,2-dicyanovinyl)benzene was reacted with 2-amino-phenol to give the model compound, hydroxy enaminonitrile, which was found to undergo thermal cyclization reaction to form the corresponding benzoxazole. This intramolecular cyclization reaction is expected to occur through nucleophilic attack to electropositive enamine carbon by ortho-hydroxy group on the phenyl ring, which is accompanied by the release of neutral malononitrile through rearrangement. From each bifunctional monomer, o-hydroxy substituted polyenaminonitrile was prepared and characterized as a new precursor polymer for well-known aromatic polybenzoxazole. Also the unusual macrocyclic dimer formation from the 1,4-bis(1-chloro-2,2-dicyanovinyl)benzene and 2,2-bis(3-amino-4-hydroxyphenyl)hexafluoropropane polymerization reaction system was discussed. The thermal cyclization reactions and the properties of polymers were investigated using FT-IR and thermal analysis (DSC & TGA).

GC-TSQ CI 분석법을 이용한 제32차 OPCW 숙련도 시험 시료 분석 연구 (Analysis Study on 32nd OPCW Proficiency Test Sample with GC-TSQ CI)

  • 김현석;정창희;이용한
    • 한국군사과학기술학회지
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    • 제17권6호
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    • pp.828-835
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    • 2014
  • GC-TSQ CI technique was applied for analysis of samples for the $32^{nd}$ OPCW proficiency test. Eight chemical weapon convention(CWC) related chemicals were identified by product ion mode analysis with GC-TSQ in the samples. Choice of specific precursor ion made it possible to supply selective total ion chromatograms(TICs) of target molecule. GC-TSQ CI anaylsis technique was useful method for chemical warfare agent verification because analysis selectivity was improved by choice of mother molecule as precursor ion and gave mass spectra.

BTMSM/O2 고유량으로 증착된 SiOCH 박막의 2차원 상관관계 분석을 통한 유전특성 연구 (Dielectric Characteristics through 2D-correlation Analysis of SiOCH Thin Film deposited by BTMSM/O2 High Flow Rates)

  • 김민석;황창수;김홍배
    • 한국전기전자재료학회논문지
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    • 제21권6호
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    • pp.544-551
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    • 2008
  • We have studied the dielectric characteristics of low-k interlayer dielectric materials fabricated by PECVD for various precursor's flow rates. BTMSM precursor was introduced with the flow rates from 42 sccm to 60 sccm by 2 sccm step in the constant flow rate of 60 sccm $O_2$. The absorption intensities of Si-O-$CH_x$ bonding group and Si-$CH_x$ bonding group changed synchronously for the variation of precursor flow rate, but the intensity of Si-O-Si(C) responded asynchronously with the $CH_x$ combined bonds. The heat treatment reduced the FTIR absorption intensity of Si-O-$CH_x$ bonding group and Si-$CH_x$ bonding group but increased the intensity of Si-O-Si(C). The nanopore and free space formed by the increasement of caged link mode and cross link mode of Si-O-Si(C) group implied the origin of low-k SiOCH films.