• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.742-745
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• 2003

Piezoelectric elements driven ultra-precision stages have been used for high accuracy, fast response and high load rapacity. which are allowable to apply the stages to AFMs. Most of the piezoelectric driven stages are guided by flexure hinges for force transmission and mechanical amplification. However the flexure hinge mechanisms cause lack of position accuracy due to coupled and parasitic motions. Hence it is important that the mechanism design of the stage is focused on the stiffness of the flexure hinges to accomplish fast response and hish accuracy without the coupled and parasitic motions. In this study, some constraints for optimal design of a piezoelectric elements driven stage and a design method are proposed. Next, an optimal design is carried out using mathematical calculation. Finally the designed results are verified by FEM.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1219-1222
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.11a
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• pp.25-26
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.583-584
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.471-472
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.679-680
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2013.05a
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• pp.691-692
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• 2013

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.563-564
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• 2007

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.342-347
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• 2002

After the industrial revolution in 20 century, the world are preparing for new revolution that is society with knowledge for a basis such as IT(Information Technology), NT(Nano Technology) and BT(Bio Technology). Recently, NT is applied to various fields that are composed of science, industry, media and semiconductor-micro technology. It has need of IT that is ultra-precision positioning technology with strokes of many hundreds mm and maintenance of nm precision in fields of ultra micro process, ultra precision measurement, photo communication part and photo magnetic memory. Performance test of servo control system that is used ultra-precision positioning system with single plane X-Y stage is performed by simulation with Matlab. Analyzed for previous control algorithm and adapted for modern control theory, dual servo algorithm is developed by minimum order observer, and stability and priority on controller are secured. Through the simulation and experiments on ultra precision positioning, stability and priority on ultra-precision positioning system with single plane X-Y stage and control algorithm are secured by using Matlab with Simulink and ControlDesk made in dSPACE

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1883-1886
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• 2005

In this paper, a decoupled dual servo (DDS) stage for ultra-precision scanning system with large working range is introduced. In general, dual servo systems consist of a fine stage for short range and a coarse stage for long range. The proposed DDS also consists of a $XY\theta$ fine stage for handling and carrying workpieces and one axis coarse stage. Its coarse stage consists of air bearing guide system and a coreless linear motor with force ripple. The fine has four voice coil motors(VCM) as its actuator. According to a VCM's nature, there are no mechanical connections between coils and magnetic circuits. Moreover, VCM doesn't have force ripples due to imperfections of commutation components of linear motor systems - currents and flux densities. However, due to the VCM's mechanical constraints the working range of the fine is about $25mm^2$. To break that hurdle, the coarse stage with linear motors is used to move the fine about 500mm. Because of the above reasons, the proposed DDS can achieve higher precision scanning than other stages with only one servo. With MATLAB's Sequential Quadratic Programming (SQP), the VCMs are optimally designed for the highest force under conditions and constraints such as thermal dissipations due to its coil, its size, and so on. And for their movements without any frictions, guide systems of the DDS are composed of air bearings. To get precisely their positions, a linear scale with 5nm resolution are used for the coarse stage's motion and three plane mirror laser interferometers with 5nm for the fine's $XY\theta$ motions. With them, on scanning the two stages have same trajectories. The control algorithm is named Parallel method. The embodied ultra-precision scanning system has sub 100nm following error and in-positioning stability.