• Journal of the Korean Society for Precision Engineering
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• v.18 no.4
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• pp.64-71
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• 2001

In general, precise linear actuators using piezoelectric element are driven by friction force. Exact understanding of friction plays an important role in analysis and control of a motor. In this research, we designed a precise linear actuator using piezoelectric elements and observed its dynamic characteristics. By varying phase angle difference and amplitudes of the sinusoidal waves that are driving inputs, we can know that it is possible to control moving direction and distance of the slider. As preload is increased, its moving distance is decreased. And also, we have modeled a precise linear actuator using stick slip friction models such as classical, Karnopp. and reset integrator. Finally, by comparing the results of simulation and experiment, it was verified that the model is well designed.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.249-252
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• 2002

For a precise position control with the resolution of a micrometer, a dual servo system is constructed using a linear motor and a piezoelectric actuator. The switching mode dual servo algorithm is implemented on a DSP board in which A/D and D/A converters are also mounted. It is shown by the experimental results that the precise position control is performed within a few micrometer of position error by using the dual servo system.

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.1142-1146
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• 2004

The ultra precision linear stage is an essential device in the fields of MEMS and Bio technology. A piezo electric motor is widely used for its better linear characteristics, faster response time, and smaller size than conventional electro-magnetic actuator. We develop a new inchworm type motor to implement an actuator-integrated a long stroke linear stage which can move fast. To implement a servo system, we use a heterodyne interferometer as a position sensor, and we propose a new measurement technique using I/Q demodulator, and we propose a counting method to measure the position of fast moving object with low cost circuitry. The characteristics of the actuator and servo system are evaluated by measuring its displacement with a commercial laser interferometer.

• Transactions of the Korean Society of Automotive Engineers
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• v.2 no.3
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• pp.33-39
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• 1994

The purpose of this research is to examine precise linear motion and rotary motion. A six-degrees-of-freedom fine motion mechanism is introduced to drive an object precisely in directions of X, Y and Z-axes and around them : three rectangular linear motion and rotary ones. An experimental mechanism is introduced in which a $70$\times$70$\times$70$\times$(${mm}^3$) cube object is driven by six PZT actuator. The study is to establish the six-degrees-of-freedom fine motion mechanism of linear motion and rotary motion using PZT actuator.

• Transactions of the Korean Society of Mechanical Engineers
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• v.18 no.9
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• pp.2272-2283
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• 1994

In scanning tunneling microscopy, the piezoelectric actuator is popuilarly used in stacked type as it can provide remarkable positioning resolution and stiffness. The actuator, however, exhibits a considerable amount of hystereic nonlinearity, resulting in losses of overall measuring accuracy when a linear model is used for its control and calibration, In this study, a nonlinear model is proposed for predicting the precise relationship between the input connand voltage and the output displacement of the actuator itself, cross-coupled electrical behaviours of the driving circuit with the actuator, and mechanical characteristics of the driven components of the actuator. Finally experimental results prove that the nonlinear model enhances the measuring of scanning tunneling microscopy by an order ten in comparison with a conventional linear model.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.309-312
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• 2002

Precision stage is essential device for semiconductor equipments, fiber optic assembly systems and micro machines. In this paper, we develop a piezo-electric inchworm type actuator for long stroke ultra precision linear stages, and implement a controller to interface with commercial motion controllers. It provides fast implementation of precise position control system substituting for rotary motor. In the future, using a laser interferometer as a position sensor, we plan to implement a nano meter precision stage.

• Journal of Drive and Control
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• v.9 no.2
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• pp.8-14
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• 2012

Electro-hydraulic spring return actuator(ESRA) is utilized for air conditioning facilities in a nuclear power plant. It features self-contained, hydraulic power that is integrally coupled to a single acting hydraulic cylinder and provides efficient and precise linear control of valves as well as return of the actuator to the de-energized position upon loss of power. In this paper, the algebraic equations of ESRA at steady-state have been developed for the analysis of static characteristics that includes control pressure and valve displacement of pressure reducing valve, flow force on flapper as well as its displacement over the entire operating range. Also, the effect of external load on piston deviation is investigated in terms of linear system analysis. The results of static characteristics show the unique feature of force balance mechanism and can be applied to the stable self-controlled mechanical system design of ESAR.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.11a
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• pp.522-524
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• 2005

In this paper, we address an actuator system, which suppresses the micro-vibration engaged by environment. The actuator system consists of two modules with a permanent and an electromagnet. In vertical mode, one module is upper the other is lower. For optimal control of alternating vibration, the rate of the attraction force and the repulsion force is exactly one. Generally, the repulsive force is smaller than the attractive force. For linear control of engaged vibration, the ratio of repulsive force and attractive force is designed to equal. The actuator system will be applied to an active vibration control system for precise vibration suppression. In this paper, the actuator structure and its important sizes are calculated by RMS and FEM analysis.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.845-851
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• 2013

In this paper, a robust optimization approach is applied to the two-axes stage using a piezoelectric actuator for precise motion tracking. Robust control is based on LQG/LTR (linear quadratic Gaussian control with loop transfer recovery) control. Further, an LMI (linear matrix inequality) is used to find the optimal parameter in the loop transfer recovery step, instead of a trial and error method. A decoupler in the shape of FIR filter is added to reduce the coupling effect between the motions of the two axes, and hence, the feedback control loop is designed independently for each axis motion. The experimental result shows that the proposed control scheme can be applied effectively for motion control of the two-axes stage.

• Proceedings of the KIEE Conference
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• 2005.10b
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• pp.228-230
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• 2005

In this paper, we address an active vibration control system, which suppresses the vibration engaged by magnetically levitated stage. The stage system consists of a levitating platen with four permanent magnetic linear synchronous motors in parallel. Each motor generates vertical force for suspension against gravity and propulsion force horizontally as well. This stage can generate six degrees of freedom motion via the vertical and horizontal forces. In the stage system, which represents the settling-time critical system, the motion of the platen vibrates mechanically. We designed an active vibration control system for suppressing vibration due to the stage moving. The command feedforward with inertial feedback algorithm is used for solving stage system's critical problems. The components of the active vibration control system are accelerometers for detecting stage tables's vibrations, a digital controller with high precise signal converters. and electromagnetic actuators.