• 한국정보통신설비학회:학술대회논문집
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• 2003.08a
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• pp.269-271
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• 2003

초고주파/밀리미터파 대역에서 전력증폭기의 효율을 향상시키기 위해 MEMS 튜닝회로를 설계하였다. MEMS 튜닝회로의 효과를 확인하기 위해 2차 및 3차 고조파를 억제할 수 있도록 3-stub Class-E 증폭기를 설계하였으며 또한 설계된 증폭기에 대해 시뮬레이션을 실시하였다. 시뮬레이션의 결과로서 8GHz에서 14dBm입력에 대해 MEMS가 적용된 증폭기의 성능은 PAE=66 9%, drain efficiency=75.89%, 그리고 출력 P=23.37 dBm을 얻었다. 또한 FET의 기생리액턴스의 변화에 대해서 MEMS 튜닝회로의 효율증대효과를 확인하였다. 결론적으로 이 연구에서 제안된 새로운 방법을 통해 증폭기의 효율향상을 위한 효과적인 방법이 될 수 있음 보여 주었다.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.54 no.5
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• pp.232-237
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• 2005

In this paper, we fabricated $CO_2$ gas sensor based on the MEMS infrared sensor and characterized its electrical and $CO_2$-sensing properties. The fabricated $CO_2$ gas sensor by MEMS technique has many advanges over NDIR(nondispersive) $CO_2$ sensor such as monolithic fabrication, very high selectivity on $CO_2$, low power consumption and compact system. Microbolometer by surface micromachining was fabricated for gas detector and $CO_2$ filter chip by bulk micromachining was fabricated for signal referencing. By using the proposed and fabricated gas sensor, we are expected to measure $CO_2$ concentration more accurately with high reliability.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.2
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• pp.133-139
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• 2007

An unmanned ground vehicle can perform its mission automatically without human control in unknown environment. To move up to a destination in various surrounding situation, navigational information is indispensible. In order to be adopted for an unmanned vehicle, the navigation box is small, light weight and low power consumption. This paper suggests navigation system using a low grade MEMS IMU for supplying position, velocity, and attitude of an unmanned ground vehicle. This system consists of low cost and light weight MEMS sensors and a GPS receiver to meet unmanned vehicle requirements. The sensors are basically integrated by loosely coupled method using Kalman filter and internal algorithms are divided into initial alignment, sensor error compensation, and complex navigation algorithm. The performance of the designed navigation system has been analyzed by real time field test and compared to commercial tactical grade GPS/INS system.

• Proceedings of the KIPE Conference
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• 2010.11a
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• pp.40-43
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• 2010

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method with respect to the offset voltage and sensitivity of a accelerometer. Experimental results on the developed clinometer show that the proposed clinometer can provide useful information on the tilt angle and direction of an inclined plane.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.56 no.1
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• pp.56-62
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• 2007

In this paper, design method for power tower hazard diagnosis/predition system based on UsN was proposed. The proposed method used multi-hybrid sensors to measure rotation, displacement, and inclination state of power tower, and made decision/prediction of hazard of power tower. System design was made with requirement analysis of monitoring for transmission power facility and use of MEMS and optic fiber sensors. For hazard decision, analysis of correlation was made using sensor output. LN based on IEC61850,international standard for digital substation, was also proposed. For transmission facility monitoring, digital substation and power tower were considered as parts of power facility networks.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.15 no.3
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• pp.271-277
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• 2004

A Si(Silicon) MEMS(Micro Electro Mechanical System) package using a doped lossy Si carrier for CPW(Coplanar Waveguide) MMICs(Microwave and Millimeter-wave Integrated Circuits) is proposed in order to reduce parasitic problems of leakage, coupling and resonance. The proposed chip-carrier scheme is verified by fabricating and measuring a GaAs CPW on the two types of carriers(conductor-back metal, doped lossy Si) in the frequency from 0.5 to 40 ㎓. The proposed MEMS package using the lightly doped lossy(15 Ω$.$cm) Si chip-carrier and the HRS(High Resistivity Silicon, 15 ㏀$.$cm) shows the optimized loss and parasitic problems-free since the doped lossy Si-carrier effectively absorbs and suppresses the resonant leakage. The Si MEMS package for CPW MMICs has an insertion loss of only - 2.0 ㏈ and a power loss of - 7.5 ㏈ at 40 ㎓.

• Journal of the Korean Society of Marine Environment & Safety
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• v.19 no.6
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• pp.666-673
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• 2013

This paper proposes the performance evaluation test of attitude heading reference system (AHRS) suitable for small high speed autonomous underwater vehicle(AUV). Although IMU can provides the detail attitude information, it is sometime not suitable for small AUV with short operation time in view of price and the electrical power consumption. One of alternative for tactical grade IMU is the AHRS based micro-machined electro mechanical system(MEMS) which can overcome many problems that have inhibited the adoption of inertial system for small AUV such as cost and power consumption. A cost effective and small size AHRS which incorporates measurements from 3-axis MEMS gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for AUV and the attitude calculation algorithm is derived based the coordinate transform equation and Kalman filter. The developed AHRS was validated through various performance tests as like the magnetometer calibration, operating experiments using land mobile vehicle and flight motion simulator (FMS). The test of magnetometer calibration shows the developed MEMS AHRS is robust to the external magent field change and the test with land vehicle proves the leveling error of developed MEMS AHRS is below $0.5^{\circ}/hr$. The results of FMS test shows the fact that AHRS provides the measurement with $0.5^{\circ}/hr$ error during 5 minutes operation time. These results of performance evaluation tests showed that the developed AHRS provides attitude information which error of roll and pitch are below $1^{\circ}$ and the error of yaw is below $5^{\circ}$ and satisfies the required specification. It is expected that developed AHRS can provide the precise attitude measurement under sea trial with real AUV.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.4
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• pp.524-530
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• 2002

Micro electric spark discharge device was fabricated on a FOTURAN glass wafer using MEMS processing technique and its performance of electron discharge and subsequent formation of ignition kernel were tested. Micro electric spark device is an essential subsystem of a power MEMS that has been under development in this laboratories. In a combustion chamber of sub millimeter scale depth, spark electrodes are formed by electroplating Ni on a base plate of FOTURAN glass wafer. Optimization of spark voltage and spark gap is crucial for stable ignition and endurance of the electrodes. Namely, wider spark gaps insures stable ignition but requires higher ignition voltage to overcome the spark barrier. Also, electron discharge across larger voltage tends to erode the electrodes limiting the endurance of the overall system. In the present study, the discharge characteristics of the proptotype ignition device was measured in terms of electric quantities such as voltage and currant with spark gap and end shape as parameters. Discharge voltage shows a little decrease in width of less than 50㎛ and increases with electrode gap size. Reliability test shows no severe damage over 10$\^$6/ times of discharge test resulting in satisfactory performance for application to proposed power MEMS devices.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.16 no.7 s.98
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• pp.753-759
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• 2005

In this paper, we have developed a new type of single balanced mixer with the RF MEMS $180^{\circ}$ hybrid coupler using surface micromachining technology. The $180^{\circ}$ hybrid coupler in this mixer is composed of the dielectric-supported air gapped microstriplines(DAMLs) which have signal line with $10{\mu}m$ height to reduce substrate dielectric loss and dielectric posts with size of $20{\mu}m{\times}20{\mu}m$ to elevate the signal line on air with stability At LO power of 7.2 dBm, the conversion loss was 15.5 dB f3r RF frequency or 57 GHz and RF power of -15 dBm. Also, we obtained the good RF to LO isolation of -40 dB at LO frequency of 58 GHz and LO power of 7.2 dBm. The main advantage of this type of mixer is that we are able to reduce the size of the chips due to integrating the MEMS passive components.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.11
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• pp.544-547
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• 2006

In this paper, we present a temperature-controlled system for MEMS electrical resistance heaters without a temperature sensor. To rapidly control the heater temperature, the microheater system developed consists of a power supply, power amplifier, digital ${\underline{P}}roportional-{\underline{I}}ntegral-{\underline{D}}ifferential$ (PID) controller, and a quarter bridge circuit with the microheater and three resistors are nominally balanced. The microheaters are calibrated inside a convection oven to obtain the temperature coefficient with a linear or quadratic fit. A voltage amplifier applies the supply voltage proportional to the control signal from the PID controller. Small changes in heater resistance generate a finite voltage across the quarter bridge circuit, which is fed back to the PID controller to compare with the set-point and to generate the control signal. Two MEMS microheaters are used for evaluating the developed control system - a NiCr serpentine microheater for a preconcentrator and a Nickel microheater for ${\underline{P}}olymerase\;{\underline{C}}hain\;{\underline{R}}eaction$ (PCR) chip.