• Title/Summary/Keyword: Powder target

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Manufacturing and Macroscopic Properties of Cold Sprayed Cu-Ga Coating Material for Sputtering Target

  • Jin, Young-Min;Jeon, Min-Gwang;Park, Dong-Yong;Kim, Hyung-Jun;Oh, Ik-Hyun;Lee, Kee-Ahn
    • Journal of Powder Materials
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    • v.20 no.4
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    • pp.245-252
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    • 2013
  • This study attempted to manufacture a Cu-Ga coating layer via the cold spray process and to investigate the applicability of the layer as a sputtering target material. In addition, changes made to the microstructure and properties of the layer due to annealing heat treatment were evaluated, compared, and analyzed. The results showed that coating layers with a thickness of 520 mm could be manufactured via the cold spray process under optimal conditions. With the Cu-Ga coating layer, the ${\alpha}$-Cu and $Cu_3Ga$ were found to exist inside the layer regardless of annealing heat treatment. The microstructure that was minute and inhomogeneous prior to thermal treatment changed to homogeneous and dense with a more clear division of phases. A sputtering test was actually conducted using the sputtering target Cu-Ga coating layer (~2 mm thickness) that was additionally manufactured via the cold-spray coating process. Consequently, this test result confirmed that the cold sprayed Cu-Ga coating layer may be applied as a sputtering target material.

ITO Films Deposited by Sputter Method of Powder Target at Room Temperature. (상온에서 분말타겟의 스퍼터에 의해 증착된 ITO박막)

  • 김현후;이재형;신성호;신재혁;박광자
    • Journal of the Korean institute of surface engineering
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    • v.33 no.5
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    • pp.349-355
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    • 2000
  • Indium tin oxide (ITO) thin films have been deposited on PET (polyethylene terephthalate) and glass substrates by a do magnetron sputter method of powder target without heat treatments such as substrate heater and post heat treatment. During the sputtering deposition, sputtering parameters such as sputtering power, working pressure, oxygen gas mixture, film thickness and substrate-target distance are important factors for the high quality of ITO thin films. The structural, electrical and optical properties of as-deposited ITO oxide films are investigated by sputtering power, oxygen partial pressure and films thickness among the several sputtering conditions. XRD patterns of ITO films are affected by sputtering power and pressure. As the power and pressure are increased, (411) and (422) peaks of ITO films are grown strongly. Electrical resistivity is also increased, as the sputtering power and pressure are increased. Transmittance of ITO thin films in the visible light ranges is lowered with an increase of sputtering power and film thickness. Reflectance of ITO films in infra-red region is decreased, as the power and pressure is increased.

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Nuclear Design Methodology of Fission Moly Target for Research Reactor

  • Cho, Dong-Keun;Kim, Myung-Hyun;Sohn, Dong-Seong
    • Nuclear Engineering and Technology
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    • v.31 no.4
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    • pp.365-374
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    • 1999
  • A nuclear design of fission moly production targets for a research reactor, HANARO was peformed. It was found that the use of MCNP-4A, ORIGEN-2 code was reliable for the analysis of production characteristics of $^{99}$ Mo in a target fuel at an irradiation holes. A parametric study was done for the optimization of target location, target dimension, target shape and fuel materials. It was shown that a fuel thickness was the most sensitive parameters and electro-deposited target gave the highest 99Mo yield ratio. A pellet target with vibro-compaction powder, however, showed the largest production capacity and better engineering feasibility even with less yield ratio. Ten kinds of optimized target design for both LEU and HEU satisfied all the given design constraints. The most favorable design was the HEU ring-shaped electro-deposited target, considered the safety limit, production yield, chemical process easiness, yield ratio, and amount of radioactive waste.

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Sintering Characteristics of Nickel Silicide Alloy (니켈 실리사이드 화합물의 소결특성)

  • Byun, Chang-Sop;Lee, Sang-Hou
    • Korean Journal of Materials Research
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    • v.16 no.6
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    • pp.341-345
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    • 2006
  • [ $Ni_2Si$ ] mixed powders were mechanically alloyed by a ball mill and then processed by hot isostatic pressing (HIP) and spark plasma sintering (SPS). In the powder that was mechanically alloyed for 15minutes(MA 15 min), only Ni and Si were observed but in the powder that was mechanically alloyed for 30minutes(MA 30 min), $Ni_2Si$, Ni and Si were mixed together. Some of the MA 15 min powder and MA 30 min powder were processed by HIP under pressure of 150MPa at the temperature of $1000^{\circ}C$ for two hours and some of them were processed by SPS under pressure of 60 MPa at the temperature of $1000^{\circ}C$ for 60 seconds. Both methods completely compounded the powders to $Ni_2Si$. The maximum density of sintered lumps by HIP method was 99.5% and the maximum density of the sintered lump by SPS method was 99.3%. with the hardness of HRc 66 with the hardness of HRc 63. Therefore, the SPS method that can sinter in short time at low cost is considered to be more economical that the HIP method that requires complicated sintering conditions and high cost and the sintering can produce target materials in desired sizes and shapes to be used for thin film.

Characteristics of Electromagnetic Wave Absorber Sheet for 2.4 GHz Wireless Communication Frequency Bands Using Fe Based Alloy Soft Magnetic Metal Powder (Fe-계 연자성 금속분말을 이용한 2.4 GHz 대역 무선통신용 전파 흡수체의 특성 평가)

  • Kim, ByeongCheol;Seo, ManCheol;Yun, Yeochun
    • Korean Journal of Materials Research
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    • v.29 no.9
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    • pp.532-541
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    • 2019
  • Information and communication technologies are developing rapidly as IC chip size becomes smaller and information processing becomes faster. With this development, digital circuit technology is being widely applied to mobile phones, wireless LANs, mobile terminals, and digital communications, in which high frequency range of GHz is used. In high-density electronic circuits, issues of noise and EMC(Electro-Magnetic Compatibility) arising from cross talk between interconnects or devices should be solved. In this study, sheet-type electromagnetic wave absorbers that cause electromagnetic wave attenuation are fabricated using composites based on soft magnetic metal powder and silicon rubber to solve the problem of electromagnetic waves generated in wireless communication products operating at the frequency range of 2.4 GHz. Sendust(Fe-Si-Al) and carbonyl iron(Fe-C) were used as soft magnetic metals, and their concentrations and sheet thicknesses were varied. Using soft magnetic metal powder, a sheet is fabricated to exhibit maximum electromagnetic attenuation in the target frequency band, and a value of 34.2dB(99.9 % absorption) is achieved at the target frequency.

Fabrication of ZnS-SiO2 Composite and its Mechanical Properties (방전플라즈마 소결법을 이용한 ZnS-SiO2 복합재료의 제조와 기계적 특성)

  • Shin, Dae-Hoon;Kim, Gil-Su;Lee, Young-Jung;Cho, Hoon;Kim, Young-Do
    • Journal of Powder Materials
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    • v.15 no.1
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    • pp.1-5
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    • 2008
  • ZnS-$SiO_2$ composite is normally used for sputtering target. In recent years, high sputtering power for higher deposition rate often causes crack formation of the target. Therefore the target material is required that the sintered target material should have high crack resistance, excellent strength and a homogeneous microstructure with high sintered density. In this study, raw ZnS and ZnS-$SiO_2$ powders prepared by a 3-D mixer or high energy ball-milling were successfully densified by spark plasma sintering, the effective densification method of hard-to-sinter materials in a short time. After sintering, the fracture toughness was measured by the indentation fracture (IF) method. Due to the effect of crack deflection by the residual stress occurred by the second phase of fine $SiO_2$, the hardness and fracture toughness reached to 3.031 GPa and $1.014MPa{\cdot}m^{1/2}$, respectively.

Synthesis of TiC/Co Composite Powder by the Carbothermal Reduction Process (환원/침탄공정에 의한 TiC/Co 복합분말 합성)

  • Lee, Gil-Geun;Ha, Gook-Hyun
    • Journal of Powder Materials
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    • v.16 no.5
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    • pp.310-315
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    • 2009
  • Ultra-fine TiC/Co composite powder was synthesized by the carbothermal reduction process without wet chemical processing. The starting powder was prepared by milling of titanium dioxide and cobalt oxalate powders followed by subsequent calcination to have a target composition of TiC-15 wt.%Co. The prepared oxide powder was mixed again with carbon black, and this mixture was then heat-treated under flowing argon atmosphere. The changes in the phase, mass and particle size of the mixture during heat treatment were investigated using XRD, TG-DTA and SEM. The synthesized oxide powder after heat treatment at 700$^{\circ}C$ has a mixed phase of TiO$_2$ and CoTiO$_3$ phases. This composite oxide powder was carbothermally reduced to TiC/Co composite powder by the solid carbon. The synthesized TiC/Co composite powder at 1300$^{\circ}C$ for 9 hours has particle size of under about 0.4 $\mu$m.

Preparation of ZrVFe Nano Powders by Laser Ablation (Laser Ablation법에 의한 ZrVFe 합금 나노분말 제조)

  • Kil Daesup;Suh Yongjae;Jang Heedong;Lee Jaechen;Song Changbin;Kim Wonbaek
    • Korean Journal of Materials Research
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    • v.15 no.4
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    • pp.257-262
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    • 2005
  • Nano-sized ZrVFe alloy powders were prepared by the ablation of powder compact in alcobol using a Nd-YAG pulsed Laser. The $Zr_{57}V_{35.}8Fe_{7.2}$ alloy commercially designated as ST707 has long been known as the ideal solution for various vacuum applications. The target for the ablation was sintered pellets of $Zr_{57}V_{35.}8Fe_{7.2}$ alloy powder. The alloy was prepared by arc melting and Hydride-DeHydride method. The ablated powders were mostly circular having fairly large size distribution smaller than 200 nm in all cases. The X-ray diffraction study revealed that the ablated alloy retained the crystal structure of the target alloy. Nevertheless, Fe and V contents in the ablated powder were lower than those in the target alloy. This was believed to result from the high vapour pressures of Fe and V compared to that of Zr. The size of the powders ablated at high energy fluence tends to decrease due at least partly to the breakdown of previously made ones.

Characterization of Films Sputtered with the Cu-Ga Target Prepared by the Cold Spray Process (저온분사법에 의해 제조된 Cu-Ga 타겟의 스퍼터링 특성평가)

  • Cho, Youngji;Yoo, Jung Ho;Yang, Jun-Mo;Park, Dong-Yong;Kim, Jong-Kyun;Choi, Gang-Bo;Chang, Jiho
    • Journal of Powder Materials
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    • v.23 no.1
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    • pp.21-25
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    • 2016
  • The microstructural properties and electrical characteristics of sputtering films deposited with a Cu-Ga target are analyzed. The Cu-Ga target is prepared using the cold spray process and shows generally uniform composition distributions, as suggested by secondary ion mass spectrometer (SIMS) data. Characteristics of the sputtered Cu-Ga films are investigated at three positions (top, center and bottom) of the Cu-Ga target by X-ray diffraction (XRD), SIMS, 4-point probe and transmission electron microscopy (TEM) analysis methods. The results show that the Cu-Ga films are composed of hexagonal and unknown phases, and they have similar distributions of composition and resistivity at the top, center, and bottom regions of the Cu-Ga target. It demonstrates that these films have uniform properties regardless of the position on the Cu-Ga target. In conclusion, the cold spray process is expected to be a useful method for preparing sputter targets.

Hangambujeongsan or Kangai Fuzheng Powder shows the anti-cancer effect by enhancing macrophage activation

  • Yang, Wan-Quan;Han, Hyung Soo
    • The Korea Journal of Herbology
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    • v.29 no.1
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    • pp.1-6
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    • 2014
  • Objectives : Many of currently used anti-cancer drugs were developed to target cell death mechanisms and had serious side effects by causing damage to normal cells. Hangambujeongsan or Kangai Fuzheng Powder was a mixture based on the traditional Chinese medicine. It had been used in the local Chinese hospitals to treat cancer patients for decades and had shown a certain level of beneficial effects without major toxic effects. But its mechanism of action had not been elucidated yet. Thus this study aimed to investigate the effects of Kangai Fuzheng Powder in an in vitro experiment. Methods : Cancer lines or RAW264.7 mouse macrophage cells were treated with Kangai Fuzheng Powder. Cell viability was measured by MTT assay, and morphological observation was also performed. Gene expression of cytokines in macrophages was determined by real-time polymerase chain reaction. Phagocytic function assay was also performed in macrophage cells. Results : Kangai Fuzheng Powder had no direct detrimental effect on cancer cells. When macrophages were co-cultured with cancer cells, Kangai Fuzheng Powder had toxic effect on cancer cells. After exposing macrophages to Kangai Fuzheng Powder, macrophages transformed into activated form and the mRNA level of tumor necrosis factor-alpha, interleukin-1beta, interleukin-6, interleukin-10 and monocyte chemotactic protein-1 was significantly enhanced. Phagocytic activity of macrophages was dramatically potentiated. Conclusions : We demonstrated that anti-cancer effect of Kangai Fuzheng Powder was related to activation of macrophages including enhanced cytokine production and phagocytic function.