• 제어로봇시스템학회:학술대회논문집
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• 2001.10a
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• pp.37.3-37
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• 2001

The quality of a precision product, in genera, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the workpiece in the process. Recently the positioning accuracy level employed for some of precision product has reached the level of submicron and long range of motion is required. For example, for 1GDRM lithography, 20nm accuracy and 300nm stroke needs. This paper refers to the lithography stage especially fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM(Linear DC Noter) is used and for fine or VCM is used ...

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.301-302
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• 2006

• Journal of the Korean Society for Precision Engineering
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• v.34 no.1
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• pp.53-58
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• 2017

A fine stage is developed for the 3-DOF error compensation of a linear axis in order to improve the positioning accuracy. This stage is designed as a planar parallel mechanism, and the joints are based on a flexure hinge to achieve ultra-precise positioning. Also, the effect of Abbe's offsets between the measuring and driving coordinate systems is minimized to ensure an exact error compensation. The mode shapes of the designed stage are analyzed to verify the desired 3-DOF motions, and the workspace and displacement of a piezoelectric actuator (PZT) for compensation are analyzed using forward and inverse kinematics. The 3-DOF error of a linear axis is measured and compensated by using the developed fine stage. A marked improvement is observed compared to the results obtained without error compensation. The peak-to-valley (PV) values of the positional and rotational errors are reduced by 92.6% and 91.3%, respectively.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.05a
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• pp.45-46
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• 2006

In this paper, a dual stage servo mechanism has been developed for image tracking system to improve transient control performances such as small rise time, small overshoot, small settling time, etc. A secondary stage, a platform, actuated by a pair of electro-magnets is mounted on a conventional elevation gimbal. In this mechanism, the gimbal provides large range but slow motion and the platform provides small range but fast positioning. A sliding mode control is applied to the platform positioning to attain robust performances and stability in the presence of the disturbance related to dynamic coupling of the gimbal and the platform. Results from experiments illustrate that the suggested dual stage mechanism controlled by the sliding mode control is effective in improving transient responses and attenuating the disturbance related with dynamic coupling.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.277-283
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• 2014

This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A micro-position stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2007.06a
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• pp.355-356
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• 2007

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.13 no.6
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• pp.15-22
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• 2014

With a conventional positioning apparatus, it is very difficult simultaneously to achieve desired driving ranges and precision levels at the sub-micrometer level. Generally, a lead screw and friction drive have been used as servo control systems. These have large driving ranges, and high-speed positioning is feasible. In this study, we present a global servo system controlled by a laser interferometer acting as a displacement measurement sensor for achieving positioning accuracy at the sub-micrometer level.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.2
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• pp.85-89
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• 2007

Linear ball guideways have been used recently in precision or ultra-precision positioning devices. However, when the inner balls begin to roll or the moving direction reverses, these guideways are subject to rolling friction or nonlinear spring behavior. An ultra-precision device with a linear motor, referred to as a 'tunnel actuator' (TA), has been constructed to measure these phenomena. The application of a TA is beneficial for two reasons: it mostly cancels the attractive magnetic force between the stator and mover (armature), and its magnetic flux leakage is very low. The influence of the nonlinear spring behavior in ball guideways was investigated in this study using the pure driving force from a TA. The equilibrium between the driving force from the TA and the nonlinear spring force provided great accuracy for a positioning stage using a linear ball guideway.

• Journal of the Korea Safety Management & Science
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• v.14 no.1
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• pp.217-224
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• 2012

Location-Based Services(LBS) is a service that provide location information by using communication network or satellite signal. In order to provide LBS precisely and efficiently, we studied how we can reduce the error on location determination of objects such people and things. We focus on using the least square method and triangulation positioning method to improves the accuracy of the existing location determination method. Above two methods is useful if the distance between the AP and the tags can be find. Though there are a variety of ways to find the distance between the AP and tags, least squares and triangulation positioning method are wildely used. In this thesis, positioning method is composed of preprocessing and calculation of location coordinate and detail of methodology in each stage is explained. The distance between tag and AP is adjusted in the preprocessing stage then we utilize least square method and triangulation positioning method to calculate tag coordinate. In order to confirm the performance of suggested method, we developed the test program for location determination with Labview2010. According to test result, triangulation positioning method showed up loss error than least square method by 38% and also error reduction was obtained through adjustment process and filtering process. It is necessary to study how to reduce error by using additional filtering method and sensor addition in the future and also how to improve the accuracy of location determination at the boundary location between indoor and outdoor and mobile tag.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.56 no.4
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• pp.730-738
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• 2007

As well known when the linear machine is operated between two points repeatedly under positioning control, there are various positioning error at the moment of zero speed owing to the non-linear disturbance like as unpredictable friction force. To remove this positioning error, a simple least order disturbance observer is introduced and is actually implemented in this study. Due to this simple algorithm the over-all machine system can be modified to simple arbitrary given one-mass load without any disturbance. So, the total construction process for positioning control system is much easier than old one. Moreover, to generate a proper effective position profile with the limited actual machine force, a very powerful on-line mass identification algorithm using the load force estimator is presented. In the proposed mass identification algorithm, the exact load mass can be calculated during only one moving stage under a normally generated position profile. All presented algorithm is verified with experimental result with commercial linear servo machine system.