• Title/Summary/Keyword: Positioning Stage

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ENGINEERED SURFACE CONTROL IN TURNING PROCESS (선삭에서의 가공 표면 제어)

  • 홍민성
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.4 no.3
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    • pp.48-57
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    • 1995
  • The feasibility of generating controller surface topographies in single-point conventional turning operations is investigated. First, a mathematical model of the surface generation process was developed. Second, in order to control the texture of the machined surface, a micro-positioning stage and the associated command generation software were designed and built. Experimental examples have shown that surface texture can be precisely controlled and is in good agrement with the theoretical predictions.

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웨이퍼 스텝퍼에서의 기준정렬을 위한 2차원 버니어 패턴의 성능예측

  • 이종현;장원익;최부연;장기호;김도훈;유형준
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 1993.10a
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    • pp.243-248
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    • 1993
  • New methodology for fiducial alignment is proposed to improve the alignment accuracy in wafer steppers. The positioning error is detected by PSD(Position Sensitive Detector)when 2-dimensional vernier patterns on a reticle on a reticle are projected on the fiducial marks of wafer stage. The width and period of vernier patterns are deter mined to get the highest S/N ratio for the exposure wavelength 248.4nm of KrF excimer laser. This new method has an advantage of higher accuracy and faster alignment over the conventional one.

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ENGINEERED SURFACE CONTROL IN TURNING PROCESS

  • 홍민성
    • Proceedings of the Korean Society of Machine Tool Engineers Conference
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    • 1995.03a
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    • pp.24-33
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    • 1995
  • The feasibility of generating controlled surface topographies in single-point conventional turning operations is investigated. First a mathematical model of the surface generation process was developed. Second in order to control the texture of the machined surface a micro-positioning stage and the associated command generation software were designed and built. Experimental examples have shown that surface texture can be precisely controlled and is in good agreement with the theoretical predictions.

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The Cycle-Slip Correction of Kinematic Data using Doppler frequency (Doppler frequency를 이용한 Kinematic 자료의 Cycle-Slip 보정)

  • 손홍규;김중경;신대호
    • Proceedings of the Korean Society of Surveying, Geodesy, Photogrammetry, and Cartography Conference
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    • 2003.04a
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    • pp.105-109
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    • 2003
  • The occurrence of cycle slips is a major limiting factor to attain high precision positioning and navigation results with GPS. Cycle slips must be correctly repaired at the data processing stage. In this study, the technique to find cycle slips in the processing of data collected with Trimble 4700 GPS receivers is suggested. The use of Kalman filtering techniques is used in an attempt to reduce the effect of the noise in the different quantities involved and to improve the accuracy in cycle slip correction.

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초정밀 스테이지의 반복정밀도 분석

  • 박종하;황주호;박천홍;홍준희
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2004.05a
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    • pp.320-320
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    • 2004
  • 반도체용 노광장비나 검사장비, 초정밀 광학렌즈, 비구면 렌즈 가공 등의 핵심이 되는 것은 초정밀결정기술이다. 서브미크론의 정밀도를 갖는 장비는 한치의 오차도 허용치 야고 계획된 경로대로 정확하게 목표지점에 도달해야 초정밀 가공을 기대 할 수 있다 초정밀 공기정압 스테이지는 저마찰 특성과 높은 운동정밀도, 청정환경유지가 가능하여 반도체 노광장비에서 PDP 나 LCD검사장비, 초정밀가공 가공기 등 다양한 정밀장비에서 활용된다.(중략)

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Design and Application of Two-Stage Performance Measurement System Considering Dynamic Capabilities (동태적 역량을 고려한 2단계 성과측정시스템 설계 및 적용)

  • Kwon, Sun-Man;Han, Chang Hee
    • Journal of Korean Society of Industrial and Systems Engineering
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    • v.41 no.2
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    • pp.65-73
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    • 2018
  • The dynamic capabilities of sensing market signals, creating new opportunities and reconfiguring resources and capabilities to new opportunities in a rapidly changing economic environment determines the competitiveness of the enterprise to create added value and survival. This study conceptualized a two-stage performance measurement framework based on the casual model of resource (input)-process-performance (output). We have developed a 'Process capability index' that reflect the dynamic capabilities factors as a key intermediary product linking resource inputs and performance outputs in enterprise performance measurement. The process capability index consists of four elements : manpower (level of human resource), operation productivity, structure and risk management. The DEA (Data Envelopment Analysis) model was applied to the developed performance indicators to analyze the branch office performance of a telecom company. Process capability efficiency (stage 1) uses resource inputs to reach a certain level of process capabilities. In performance result efficiency (stage 2), the process capabilities are used to generate sales revenues and subscribers. The two-stage DEA model derives intermediate output values that optimize the individual stages simultaneously. Some branch offices in the telecom company have focused on process capability efficiency or some other branch offices focused on performance result efficiency. Positioning map using two-stage efficiency decomposition and benchmarking can help identify the sources of inefficiencies and visualize strategic directions for performance optimization. Applications of two-stage DEA in conjunction with the case study that are meaningfully used in performance measurement areas have been scarce. In particular, this paper has the contribution to present a new performance measurement model considering the organization theory, the dynamic capabilities.

A modeling of the magnetic levitation stage and its control

  • Nam, Taek-Kun;Kim, Yong-Joo;Jeon, Jeong-Woo;Lee, Ki-Chang
    • 제어로봇시스템학회:학술대회논문집
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    • 2003.10a
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    • pp.1082-1087
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    • 2003
  • In this paper, we address the development of magnetic levitation positioning system. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for drive levitation object called a platen This stage can generate six degrees of freedom motion by the vertical and horizontal force. We derived the mechanical dynamics equation using lagrangian method and used coenergy to express an electromagnetic force. We proposed control algorithm for the position and posture control from its initial value to its desired value using sliding mode control. Some simulation result is provided to verify the effectiveness of the proposed control scheme.

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The Seek Control Design with Gain-Scheduling in Hard Disk Drives

  • Hwang, Eun-Ju;Hyun, Chang-Ho;Park, Mig-Non
    • International Journal of Fuzzy Logic and Intelligent Systems
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    • v.11 no.1
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    • pp.65-70
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    • 2011
  • The increased disk rotational velocity to improve the data transfer rate has raised up many serious problems in its servo control system which should control the position and velocity of a spot relative to a rotating disk. This paper proposes gain-scheduling-based track-seek control for single stage actuator of hard disk drives. Gain scheduling is a technique that can extend the validity of the linearization approach to a range of operating points and one of the most popular approaches to nonlinear control design. The proposed method schedules controller gains to improve the transient response and minimize overshoot during the functions of the read/write head positioning servomechanism for the seek control. The validity of the proposed method is demonstrated through stability analysis and simulation results.

Modeling of a Magnetic Levitation Stage and its Control (자기부상 스테이지의 모델링과 제어)

  • Yong-Joo, Kim;Jeong-Woo, Jeon;Taek-Kun, Nam
    • Journal of Advanced Marine Engineering and Technology
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    • v.28 no.6
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    • pp.906-915
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    • 2004
  • In this paper, we address the development of magnetic levitation positioning system. This planar magnetic levitator employs four permanent magnet liner motors. Each motor generates vertical force for suspension against gravity, as well as horizontal force for driving levitation object called a platen. This stage can generate six degrees of freedom motion by the vertical and horizontal force. We derived the mechanical dynamics equation using Lagrangian method and used coenergy to express an electromagnetic force. We proposed a control algorithm for the position and posture control from its initial value to its desired value using sliding mode control. Some simulation results are provided to verify the effectiveness of the proposed control scheme.