• 한국전기전자재료학회논문지
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• 제33권3호
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• pp.219-224
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• 2020

Al₂O₃ powders with particle sizes of 0.35 ㎛, 0.5 ㎛, 1.5 ㎛, and 2.5 ㎛ are deposited onto glass and Cu substrates using the aerosol deposition (AD) process. The deposition characteristics of Al₂O₃ films using those four types of Al₂O₃ powders are investigated to determine the influence of the particle size on the films. To observe detailed micro-structures of the films, the cross-section and surface morphology are observed. Then, the crystalline size and internal strain are calculated from X-ray diffraction peaks in order to confirm the hammering effect as well as the micro-strain during the AD deposition. From the above results, deposition mechanisms related to the particle size are studied. The results of this study indicate the optimal particle size and formation mechanisms for dense Al₂O₃ film with a smooth surface roughness as well as for a porous Al₂O₃ film with a rough surface roughness.

• 공업화학
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• 제8권4호
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• pp.589-594
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• 1997

화학증착법을 통하여 $650^{\circ}C$의 증착온도와 0.0126Torr의 산소분압인 증착조건에서 원료물질로 $\beta$-diketonates 킬레이트 화합물을 사용하여 Si(111) 및 $SrTiO_3(100)$ 기판에 $YBa_2Cu_3O_y$ 고온 초전도 박막을 제조하였다. $SrTiO_3(100)$기판에서 제조된 박막의 $T_{c,onset}$과 $T_{c.0}$는 각각 91K와 87K로 나타났다. 또한, Si(111)기판에서 제조된 박막의 $T_{c,onset}$은 91K였지만 $T_{c.0}$는 액체질소 비등점(77.3K)에서는 보이지 않았다. $SrTiO_3(100)$에 증착된 초전도 박막은 치밀하고 2차원적으로 배열된 미세구조를 갖고 있는 반면, Si(111)에 증착된 초전도 박막은 상대적으로 기공이 많으며 무질서한 미세구조를 형성하였다.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 추계학술대회 논문집
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• pp.158-158
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• 2009

The electrophoretic deposition(EPD) technique with a wide range of novel applications in the processing of advanced ceramic materials and coatings, has recently gained increasing interest both in academic and industrial sector not only because of the high versatility of its use with different materials and their combinations but also because of its cost-effectiveness requiring simple apparatus. Compared to other advanced shaping techniques, the EPD process is very versatile since it can be modified easily for a specific application. For example, deposition can be made on flat, cylinderical or any other shaped substrate with only minor charge in electrode design and positioning[1]. The synthesis of the nano-sized Ce0.2Sm0.8O1.9(SDC)particles prepared by aurea based low temperature hydrothermal process was investigated in this study[2].When we made the SDC nanoparticles, changed the time of synthesis of the SDC. The SDC nanoparticles were characterized with field-emission scanning electron microscope(FESEM), energy dispersive X-ray analysis(EDX), and X-ray diffraction(XRD). And also we researched the results of our investigation on electrophoretic deposition(EPD) of the SDC particles from its suspension in acetone solution onto a non-conducting NiO-SDC substrate. In principle, it is possible to carry out electrophoretic deposition on non-conducting substrates. In this case, the EPD of SDC particles on a NiO-SDC substrate was made possible through the use of a adequately porous substrate. The continuous pores in the substrates, when saturated with the solvent, helped in establishing a "conductive path" between the electrode and the particles in suspension[3-4]. Deposition rate was found to increase its increasing deposition time and voltage. After annealing the samples $1400^{\circ}C$, we observed that deposited substrate.

• Current Photovoltaic Research
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• 제8권2호
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• pp.45-49
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• 2020

Molybdenum (Mo) thin films are widely used as back contact in copper indium diselenide (CISe) solar cells. However, despite this, there are only few published studies on the properties of Mo and characteristics of CISe solar cells formed on such Mo substrates. In this studies, we investigated the properties of sputter deposited Mo bilayer, and fabricated non-vacuum CISe solar cells using bilayer Mo substrates. The changes in surface morphology and electrical resistivity were traced by varying the gas pressure during deposition of the bottom Mo layer. In porous surface structure, it was confirmed that the electrical resistivity of Mo bilayer was increased as the amount of oxygen bonded to the Mo atoms increased. The resulting solar cell characteristics vary as the bottom Mo layer deposition pressure, and the maximum solar cell efficiency was achieved when the bottom layer was deposited at 7 mTorr with a thickness of 100 nm and the top layer deposited at 3 mTorr with a thickness of 400 nm.

• 공업화학
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• 제23권1호
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• pp.1-7
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• 2012

본 총론에서는 원자층 증착을 이용한 친환경 소재의 개발에 대한 최근 연구 결과들을 간단하게 소개하려 한다. 원자층 증착의 장점은 박막의 두께를 미세하게 조절할 수 있다는 것과, 3차원적으로 복잡한 구조를 가지는 담체의 형상을 유지하면서 균일한 박막을 제조할 수 있다는 것이다. 이러한 원자층 증착의 장점은 친환경소재를 제조하는 데 중요한 역할을 할 수 있다. Anodic aluminum oxide (AAO)와 같은 다공성 membrane을 담체로 이용하여, 다공성 구조는 그대로 유지하면서 10나노미터 정도의 $TiO_2$박막을 균일하게 증착할 경우 톨루엔 등의 휘발성 유기물 필터로 사용할 수 있는데, 이는 AAO의 특이한 기하학적 구조와 비정질 $TiO_2$의 강한 휘발성 유기물 흡착력의 조합에 의한 결과이다. 톨루엔 분해용 광촉매 및 이산화탄소 개질 반응에 의한 수소 생산 촉매 반응에 있어서도 나노다이아몬드나 니켈 담체 위에 $TiO_2$의 증착량을 미세하게 조절하여 $TiO_2$가 표면을 완전히 덮지 않고 부분적으로만 덮고 있는 구조를 만들 경우 촉매의 효율 및 수명을 극대화할 수 있게 된다. 이러한 예들은 원자층 증착이 기존의 반도체산업뿐만 아니라 환경소재의 개발에도 중요한 도구가 될 수 있음을 의미한다.

• 청정기술
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• 제28권2호
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• pp.154-162
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• 2022

알루미늄 (Al) 금속을 전구체 및 구조체로 이용, 수열 반응을 통하여 Al@Al₂O₃와 Al@Ni-Al LDH (LDH = layered double hydroxide) 코어-쉘 복합 구조체를 합성하였다. 제조된 구조체의 형상, 조성, 결정 구조는 수용액에 존재하는 이온들에 의하여 크게 영향을 받았으며, 이를 활용하여 다양한 특성의 촉매 구조체 유도가 가능하였다. Al@Ni-Al LDH 코어-쉘 구조체의 환원을 통하여 Ni 나노 입자가 고정화된 Ni/Al@Al₂O₃ 촉매를 제조하였고, CO₂ 메탄화 반응에 적용하여 촉매의 특성을 평가하였다. Ni/Al@Al₂O₃ 촉매는 전통적 incipient wetness impregnation 방법에 의하여 제조된 Ni/Al₂O₃ 촉매에 비교하여 Ni 입자의 분산도와 균일성이 매우 높았으며 약 2 배 이상의 CO₂ 전환율로 높은 촉매적 활성과 더불어 구조의 안정성을 보여 주었다. 이러한 Ni/Al@Al₂O₃ 구조체 촉매의 우수한 특성은 Al 금속을 기반으로 한 새로운 개념의 촉매 구조체 설계와 합성 방법의 타당성을 보여준다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1573-1575
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• 2004

An alumina membrane with nano-sized pores was fabricated by anodic oxidation. The shape and structure of the pore on alumina membrane were changed according to the roughness of aluminum surface. The shape and structure of the nano-sized pre were investigated according to purity of aluminum substrate for the anodization process. The aluminum substrates with 99.5% and 99.999% purities were used. The aluminum substrate(99.5%) was anodized after the processes of pressing, mechanical polishing, chemical polishing, and electrochemical polishing. The nano-sized pores with the pore size of 50 - 100nm, the cell size of 20-50nm and the thickness of $10{\mu}m{\sim}45{\mu}m$ were obtained. Even though the electrochemical polishing was used for the aluminum substrate (99.999%), the same characteristics as the aluminum substrate (99.5%) was obtained. The alumina membrane prepared by anodization for 5 min using fixed voltage method shows the pore with irregular shape. The pore shape was changed to regular shape after pore widening process.

• 대한환경공학회지
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• 제22권5호
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• pp.927-938
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• 2000

박테리아를 토양과 같은 다공성 매질에 주입시키고 적절한 기질과 영양분을 공급시키면 박테리아는 매질의 표면에 부착하여 성장한다. 그 결과 바이오필름이 생성되어 공극의 크기가 감소하여 매질의 투수계수가 감소되며, 오염물질을 분해시키는 생물학적 오염분해 능력을 갖게 된다. 본 연구는 투수계수가 비교적 큰 모래와 화강풍화토에 박테리아를 접종, 배양한 후 토양의 투수계수의 변화를 측정하였으며, 배양된 바이오필름의 화학물질에 대한 저항성 및 온도변화에 대한 내구성 실험을 통해 대용 차수재로의 가능성을 평가하였다. 또한 bio-barrier의 유기물질 분해능 및 bio-barrier의 두께에 따른 미생물의 생장도를 column test를 통하여 측정하여 bio-barrier 내에서의 기질의 이동 및 생분해와 박테리아 농도의 분포 변화간의 관계를 제시하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.150.2-150.2
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• 2015

In this study, we analyzed the electric and optical characteristics by using various deposition rate ($0.5{\AA}$, $1.0{\AA}$ and $1.5{\AA}/s$) in order to enhance the performance in organic light-emitting devices (OLED). The organic multi-layer structures were deposited with NPB ($500{\AA}$ as hole transport layer), Alq3 ($600{\AA}$ as electron transport layer and emission layer) and LiF ($8{\AA}$ as electron injection layer) via SUNIC PLUS200 on Glass/ITO substrates. In this experiment, we examined the relationship between porous state of organic deposition and mobility of the organic materials. Among the three deposition rates, $0.5{\AA}/s$ achieved the highest performance of (10,786cd/m2, 4.387cd/A) comparing with that of $1{\AA}/s$ (7,779cd/m2, 3.281cd/A) and $1.5{\AA}/s$ (5,167cd/m2, 2.693cd/A). We confirmed that low deposition rate helps to arrange organic materials densely and to move easily another atomic location using inter-chain transporting by orbital overlap.

• 전기학회논문지
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• 제59권4호
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• pp.754-758
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• 2010

In general, Dye-sensitized Solar Cells(DSCs) consist of the nanocrystalline titanium dioxide($TiO_2$) layer which is fabricated on a transparent conductive oxide(TCO) layer such as $F/SnO_2$ glass, a dye adhered to the $TiO_2$, an electrolyte solution and platinum-coated TCO. Among these components, two TCO substrates are estimated to be about 60% of the total cost of the DSCs. Currently novel TCO-less structures have been investigated in order to reduce the cost. In this study, TCO-less DSCs consisting of titanium electrodes were investigated. The titanium electrode is deposited on top of the porous $TiO_2$ layer using electron-beam evaporation process. The porosity of the titanium electrode was found out by the SEM analysis and dye adhesion. As a result, when the thickness of the titanium electrode increased, the surface resistance decreased and the conversion efficiency increased relatively.