• 제목/요약/키워드: Porous Thin Film

검색결과 201건 처리시간 0.023초

Y-doped BaZrO3을 이용한 저온형 박막 연료전지 연구 (Study on Low-Temperature Solid Oxide Fuel Cells Using Y-Doped BaZrO3)

  • 장익황;지상훈;백준열;이윤호;박태현;차석원
    • 대한기계학회논문집B
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    • 제36권9호
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    • pp.931-935
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    • 2012
  • 본 연구에서는 저온형 연료전지와 고온형 연료전지의 작동 및 구성 요소 측면 단점들을 보완하기 위해 중온 영역에서 작동하는 박막 연료전지를 제작하였다. 박막 연료전지는 이트륨이 도핑된 바륨 지르코네이트(BYZ) 전해질과 백금 수소극/공기극으로 이루어져 있으며, 성능은 $350^{\circ}C$에서 측정하였다. 350nm의 두께를 가지는 백금 수소극은 다공성 기판 위에 스퍼터링 기법을 이용하여 증착하였다. BYZ전해질은 펄스레이저 기법을 이용하여 $1{\mu}m$ 증착하였고, 상부에 스퍼터링 기법을 이용하여 200nm의 두께를 가지는 백금 공기극을 증착하였다. 개회로 전압은 약 0.81V이었고, 최대 출력 성능은 11.9mW/$cm^2$이었다.

Thermal Evaporation법으로 제조한 NiCr 박막의 증착 특성 (Deposition Properties of NiCr Thin Films Prepared by Thermal Evaporation)

  • 권용;박용주;최승평;정진;최광표;류현욱;박진성
    • 한국세라믹학회지
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    • 제41권6호
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    • pp.450-455
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    • 2004
  • NiCr 합금을 열증발원으로 사용한 thermal evaporation법으로 NiCr박막을 $Al_2$O$_3$/Si 기판 위에 증착시켰다. 이 때 동일한 량의 NiCr 합금을 1회에 모두 증착하는 방법과, l/2씩 2회 증착하는 방법으로 NiCr 박막을 각각 증착시켜, 박막의 미세구조에 따른 막의 특성변화를 고찰하였으며, 열처리 온도에 따른 NiCr 박막의 상 변화, 조성변화 및 미세구조 변화를 XRD, AES 및 FE-SEM으로 각각 분석하였다. 열처리 과정에서 박막내부에 존재하는 Cr 성분이 표면 쪽으로 확산하여 산화됨으로써 Cr산화층/Ni 층/Cr 산화층의 전형적인 다층구조를 형성함을 알 수 있었으며, 특히, $700^{\circ}C$ 이상에서는 Ni 층이 Cr산화층을 통하여 표면 쪽으로 확산됨으로써 표면에 원주형 결정립을 가지는 NiO 층을 형성하였다. 특히 Ni 층이 확산 전의 구조를 유지한 채 표면에 추가적인 NiO층이 형성되는데, 이는 형성된 Cr산화층의 확산이 상대적으로 Ni 층에 비하여 어려운데 기인한다.

RF 스퍼터링에 의해 제조된 Li-Ni-O 박막의 전기변색 특성 (RF Sputtered Lithium Nickel Oxide Films and Their Electrochromism)

  • 김영일;김배환;최진호;;박남규
    • 대한화학회지
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    • 제41권11호
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    • pp.594-599
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    • 1997
  • RF 스피터링법을 써서 $Li_{2x}Ni_{1-x}O$ 박막을 제조하였으며, 그 과정에서 기판의 온도$(50/230^{\circ}C)와$ 분위기 $(Ar/O_2)$를 변수로써 막의 미세구조를 조절하였다. 투과전자현미경을 이용한 막 구조 분석에 의해 낮은 기판 온도와 $O_2$ 조건에서 막의 조성입자가 작아짐을 관찰하였고, $50^{\circ}C/O_2$ 하에서 얻이진 $Li_{2x}Ni_{1-x}O$ 박막은 약 $80\AA$ 크기의 입자로 이루어져 있었다. 전기화학적 조건 하에서 $Li_{2x}Ni_{1-x}O$ 박막의 변색현상을 조사한 결과, 박막의 미세구조 발달에 의해 $Li^+$ 이온의 가역적 수용량이 증가하고, 결과적으로 전기변색 기능이 향상됨을 알 수 있엇다. 50 $^{\circ}C/O_2$ 하에서 얻어진 170 nm 두께의 $Li_{2x}Ni_{1-x}O$ 박막은 30 mC/$cm^2$$Li^+$ 이온 수용력과 함께 약 1.3의 흡광밀도(OD)를 나타내었다.

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말초신경 재건을 위한 인회석 박막 코팅 미세공성 신경재생관(nerve conduit)의 개발 (DEVELOPMENT OF MICROPOROUS CALCIUM PHOSPHATE COATED NERVE CONDUIT FOR PERIPHERAL NERVE REPAIR)

  • 이종호;황순정;최원재;김성민;김남열;이은진;안강민;명훈;서병무;최진영;정필훈;김명진;김현만
    • Journal of the Korean Association of Oral and Maxillofacial Surgeons
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    • 제29권3호
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    • pp.151-156
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    • 2003
  • This study was performed to develop a useful nerve conduit which provides favorable environment for Schwann cell viability and proliferation. Milipore membrane of $0.45{\mu}m$ pore size was selected because it permits nutritional inflow from the outside of the conduit and prevents from invading the fibrotic tissue into the conduit. The membrane was rolled and sealed to form a conduit of 2mm diameter and 20mm length. To improve the axonal regeneration and to render better environment for endogenous and exogenous Schwann cell behaviour, the microgeometry and surface of conduit was modified by coating with thin film of calcium phosphate. Cellular viability within the conduit and attachment to its wall were assessed with MTT assay and SEM study. Milipore filter conduit showed significantly higher rate of Schwann cell attachment and viability than the culture dish. However, the reverse was true in case of fibroblast. Coating with thin film of low crystalline calcium phosphate made more favorable environment for both cells with minimal change of pore size. These findings means the porous calcium phosphate coated milipore nerve conduit can provide much favorable environment for endogenous Schwann cell proliferation and exogenous ones, which are filled within the conduit for the more advanced strategy of peripheral nerve regeneration, with potential of reducing fibrotic tissue production.

이온빔 나노 패터닝을 위한 양극산화 알루미나의 이온빔 투과 (Ion Transmittance of Anodic Alumina for Ion Beam Nano-patterning)

  • 신상원;이종한;이성구;이재용;황정남;최인훈;이관희;정원용;문현찬;김태곤;송종한
    • 한국진공학회지
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    • 제15권1호
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    • pp.97-102
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    • 2006
  • 양극 산화된 알루미나 (anodized aluminum oxide : AAO)는 균일하고 일정한 크기의 나노기공 패턴을 지니고 있다. AAO를 이온빔 나노 patterning을 위한 이온조사 시 마스크로서 이용하기 위해 AAO 나노 기공을 통과하는 이온빔의 투과율(AAO에 입사한 이온에 대한 투과이온의 양의 비)을 측정하였다. Al bulk foil을 양극 산화하여 두께가 $4{\mu}m$이고 종횡비(두께와 기공의 지름의 비)가 각각 200:1, 100:1 인 AAO를 Goniometer에 부착하여 500 keV의 $O^{2+}$ 이온빔에 대해 나노기공을 정렬시킨 후, 기울임 각에 따른 투과율을 측정한 결과, 종횡비가 200:1, 100:1 일 때 투과율은 각각 약 $10^{-8},\;10^{-4}$로 거의 이온빔이 투과하지 못하였다. 반면에 $SiO_2$ 위에 증착된 Al 박막으로 양극산화하여 종횡비가 5:1인 AAO의 이온빔 투과율은 0.67로 투과율이 현저히 향상되었다. 높은 종횡비를 갖는 AAO의 경우에는 범과 AAO 기공의 정렬이 쉽지 않은데다 알루미나의 비전도성으로 인한 charge-up 현상으로 인해 이온빔이 극히 투과하기 어렵기 때문이다. 실제로 80 keV의 Co 음이온을 종횡비 5:1인 AAO에 조사시킨 후에는 AAO 나노기공과 동일한 크기의 나노 구조체가 형성됨을 주사전자현미경(scanning electron microscopy: SEM) 관찰을 통하여 확인하였다.

에어로졸 증착법(Aerosol Depostion method)에 의한 $Ba(Zr_{0.85}Y_{0.15})O_{3-\delta}$-NI 수소분리막 제조 ($Ba(Zr_{0.85}Y_{0.15})O_{3-\delta}$-NI Composite Membrane for Hydrogen Separation by Aerosol Deposition Method)

  • 박영수;최진섭;변명섭;김진호;황광택
    • 한국수소및신에너지학회논문집
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    • 제21권4호
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    • pp.271-277
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    • 2010
  • $(Ba(Zr_{0.85}Y_{0.15})O_{3-\delta})$ oxide, showing high protonic conductivity at high temperatures and good chemical stability with $CO_2$ are referred to as hydrogen separation membrane. For high efficiency of hydrogen separation ($H_2$ flux and selectivity) and low fabrication cost, ultimate thin and dense BZY-Ni layer has to be coated on a porous substrate such as $ZrO_2$. Aerosol depostion (AD) process is a novel technique to grow ceramic film with high density and nano-crystal structure at room-temperature, and may be applicable to the fabrication process of AD integration ceramic layer effectively. XRD, SEM, X-ray mapping measurements were conducted in order to analyze the characteristics of BZY-Ni membrane fabricated by AD process. it is observed that it is homogeneous distribution for BZY-Ni. The result of $H_2$ permeation rate suggests that BZY-Ni composite is higher than BZY.

블록 공중합체를 이용한 나노패턴의 크기제어방법 (Method to control the Sizes of the Nanopatterns Using Block Copolymer)

  • 강길범;김성일;한일기
    • 한국진공학회지
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    • 제16권5호
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    • pp.366-370
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    • 2007
  • 밀도가 높고 주기적으로 배열된 나노 크기의 기공이 25nm 두께의 실리콘 산화막 기판위에 형성 되었다. 나노미터 크기의 패턴을 형성시키기 위해서 자기조립물질을 사용했으며 폴리스티렌(PS) 바탕에 벌집형태로 평행하게 배열된 실린더 모양의 폴리메틸메타아크릴레이트(PMMA)의 구조를 형성하였다. 폴리메틸메타아크릴레이트를 아세트산으로 제거하여 폴리스티렌만 남아있는 나노크기의 마스크를 만들었다. 폴리스티렌으로 이루어진 나노패턴의 지름은 $8{\sim}30nm$ 였고 높이는 40nm였으며, 패턴과 패턴사이의 간격은 60nm였다. 형성된 패턴을 실리콘 산화막 위에 전사시키기 위해 불소 기반의 화학 반응성 식각을 사용하였다. 실리콘 산화막에 형성된 기공의 지름은 $9{\sim}33nm$였다. 실리콘 산화막을 불산으로 제거하여 실리콘에 형성된 기공을 관찰하였고, 실리콘기판에 형성된 기공의 지름은 $6{\sim}22nm$였다. 형성된 기공의 크기는 폴리메틸메타아크릴레이트의 분자량과 관계가 있음을 알 수 있었다.

열수처리 시간에 따른 Ti-6Al-7Nh 합금의 생체활성 평가 (Evaluation of Bioactivity of Ti-6Al-7Nb Alloys with Various Hydrothermal Treatment Times)

  • 권오성;최석규;박광범;이민호;배태성;이오연
    • 한국재료학회지
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    • 제14권12호
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    • pp.876-884
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    • 2004
  • This study was to investigate whether the bioactivity of the anodized and hydrothermally treated Ti-6Al-7Nb alloy were affected by the time of hydrothermal treatment. Anodizing was performed at current density 30 $mA/cm^2$ up to 300 V in electrolyte solutions containing $DL-{\alpha}-glycerophosphate$ disodium salt hydrate $(DL-{\alpha}-GP)$ and calcium acetate (CA). Hydrothermal treatment was done at $300^{\circ}C$ for 30 min, 1 hr, 2 hrs, and 4 hrs to produce a thin film layer of hydroxyapatite (HA). The bioactivity was evaluated from HA formation on the surfaces in a Hanks' solution with pH 7.4 at $36.5^{\circ}C$ for 10, 20, and 30 days. Anodic oxide films were porous with pore size of $1\sim4{\mu}m\;and\;3\sim4{\mu}m$ thickness. The anodic oxide films composed with strong anatase peak with presence of rutile peak, and showed the increase in intensity of anatase peak after hydrothermal treatment. It was shown that the intensity of anatase peak increased with increasing the time of hydrothermal treatment but was no difference in rutile peak. The corrosion voltage was the highest in the group of hydrothermal treatment for 2 hrs (Ecorr: -338.6 mV). The bioactivity in Hank's solution was accelerated with increasing the time of hydrothermal treatment.

Synthesis of IZTO(Indium Zinc Tin Oxide) particle by spray pyrolysis and post-heat treatment and characterization of deposited IZTO film

  • Lim, Seong Taek;Kim, Sang Hern
    • 한국응용과학기술학회지
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    • 제33권4호
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    • pp.734-740
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    • 2016
  • The micron-sized indium zinc tin oxide (IZTO) particles were prepared by spray pyrolysis from aqueous precursor solution for indium, zinc, and tin and organic additives such as citric acid (CA) and ethylene glycol (EG) were added to aqueous precursor solution for indium, zinc, and tin. The obtained IZTO particles prepared by spray pyrolysis from the aqueous solution without organic additives had spherical and filled morphologies, whereas the IZTO particles obtained with organic additives had more hollow and porous morphologies. The micron-sized IZTO particles with organic additives were changed fully to nano-sized IZTO particles, whereas the micron-sized IZTO particles without organic additives were not changed fully to nano-sized IZTO particle after post-treatment at $700^{\circ}C$ for 2 hours and wet-ball milling for 24 hours. Surface resistances of micron-sized IZTO's before post-heat treatment and wet-ball milling were much higher than those of nano-sized IZTO's after post-heat treatment and wet-ball milling. From IZTO with composition of 80 wt. % $In_2O_3$, 10 wt. % ZnO, and 10 wt. % $SnO_2$ which showed a smallest surface resistance IZTO after post-heat treatment and wet-ball milling, thin films were deposited on glass substrates by pulsed DC magnetron sputtering, and the electrical and optical properties were investigated.

SURFACE ANALYSES OF TITANIUM SUBSTRATE MODIFIED BY ANODIZATION AND NANOSCALE Ca-P DEPOSITION

  • Lee, Joung-Min;Kim, Chang-Whe;Lim, Young-Jun;Kim, Myung-Joo
    • 대한치과보철학회지
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    • 제45권6호
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    • pp.795-804
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    • 2007
  • Statement of problem. Nano-scale calcium-phosphate coating on the anodizing titanium surface using ion beam-assisted deposition (IBAD) has been recently introduced to improve the early osseointegration. However, not much is known about their surface characteristics that have influence on tissue-implant interaction. Purpose. This study was aimed to investigate microtopography, surface roughness, surface composition, and wettability of the titanium surface modified by the anodic oxidation and calcium phosphate coating using IBAD. Material and methods. Commercially pure titanium disks were used as substrates. The experiment was composed of four groups. Group MA surfaces represented machined surface. Group AN was anodized surface. Group CaP/AN was anodic oxidized and calcium phosphate coated surfaces. Group SLA surfaces were sandblasted and acid etched surfaces. The prepared titanium discs were examined as follows. The surface morphology of the discs was examined using SEM. The surface roughness was measured by a confocal laser scanning microscope. Phase components were analyzed using thin-film x-ray diffraction. Wettability analyses were performed by contact angle measurement with distilled water, formamide, bromonaphtalene and surface free energy calculation. Results. (1) The four groups showed specific microtopography respectively. Anodized and calcium phosphate coated specimens showed multiple micropores and tiny homogeneously distributed crystalline particles. (2) The order of surface roughness values were, from the lowest to the highest, machined group, anodized group, anodized and calcium phosphate deposited group, and sandblasted and acid etched group. (3) Anodized and calcium phosphate deposited group was found to have titanium and titanium anatase oxides and exhibited calcium phosphorous crystalline structures. (4) Surface wettability was increased in the order of calcium phosphate deposited group, machined group, anodized group, sandblasted and acid etched group. Conclusion. After ion beam-assisted deposition on anodized titanium, the microporous structure remained on the surface and many small calcium phosphorous crystals were formed on the porous surface. Nanoscale calcium phosphorous deposition induced roughness on the microporous surface but hydrophobicity was increased.