• 제목/요약/키워드: Porous Substrate

검색결과 300건 처리시간 0.024초

Electrical properties of the Porous polycrystalline silicon Nano-Structure as a cold cathode field emitter

  • Lee, Joo-Won;Kim, Hoon;Lee, Yun-Hi;Jang, Jin;Oh, Myung-Hwan;Ju, Byung-Kwon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2002년도 International Meeting on Information Display
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    • pp.1035-1038
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    • 2002
  • The electrical properties of Porous polycrystalline silicon Nano-Structure (PNS) as a cold cathode were investigated as a function of anodizing condition, the thickness of Au film as a top electrode and the substrate temperature. Non-doped 2${\mu}m$-polycrystalline silicon was electrochemically anodized in HF: ethanol (=1:1) mixture as a function of the anodizing condition including a current density and anodizing time. After anodizing, the PNS was thermally oxidized for 1 hr at 900 $^{\circ}C$. Then, 20nm, 30nm, 45nm thickness of Au films as a top electrode were deposited by E-beam evaporator. Among the PNSs fabricated under the various kinds of anodizing conditions, the PNS anodized at a current density of 10mA/$cm^2$ for 20 sec has the lowest turn-on voltage and the highest emission current than those of others. Also, the electron emission properties were investigated as functions of measuring temperature and the different thickness of Au film as a top-electrode.

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Effect of Zincate Treatment of As-Cast AZ91 Mg Alloy on Electrodeposition of Copper in a Copper Pyrophosphate Bath

  • Nguyen, Van Phuong;Park, Min-Sik;Yim, Chang Dong;You, Bong Sun;Moon, Sungmo
    • 한국표면공학회지
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    • 제49권5호
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    • pp.401-407
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    • 2016
  • In this work, effect of zincate treatment of AZ91 Mg alloy on the following electrodeposition of copper was examined in a non-cyanide bath containing pyrophosphate ions in view of surface morphology and adhesion of the electrodeposited copper layer. Without zincate treatment, the electrodeposited copper layer showed very porous structure and poor adhesion. On the other hand, the copper layer electrodeposited on the zincate-treated surface showed dense structure and good adhesion. The dissolution rate of AZ91 Mg alloy after the zincate treatment appeared to decrease about 40 times in the copper pyrophosphate bath, as compared to that of the surface without zincate treatment. The porous morphology and poor adhesion of a copper layer on the AZ91 Mg alloy surface without zincate treatment were attributed to small number of nucleation sites of copper because of rapid dissolution of the magnesium substrate in the pyrophosphate bath. Based on the experimental results, it is concluded that the zincate treatment to form a conducting and protecting layer on the AZ91 Mg alloy surface is essential for successful electrodeposition of a copper layer on AZ91 Mg alloy with good adhesion and dense structure in the copper pyrophosphate bath.

Investigation of Photoluminescence and Annealing Effect of PS Layers

  • Han, Chang-Suk;Park, Kyoung-Woo;Kim, Sang-Wook
    • 한국재료학회지
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    • 제28권2호
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    • pp.124-128
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    • 2018
  • N-type porous silicon (PS) layers and thermally oxidized PS layers have been characterized by various measuring techniques such as photoluminescence (PL), Raman spectroscopy, IR, HRSEM and transmittance measurements. The top surface of PS layer shows a stronger photoluminescence peak than its bottom part, and this is ascribed to the difference in number of fine silicon particles of 2~3 nm in diameter. Observed characteristics of PL spectra are explained in terms of microstructures in the n-type PS layers. Common features for both p-type and n-type PS layers are as follows: the parts which can emit visible photoluminescence are not amorphous, but crystalline, and such parts are composed of nanocrystallites of several nm's whose orientations are slightly different from Si substrate, and such fine silicon particles absorb much hydrogen atoms near the surfaces. Light emission is strongly dependent on such fine silicon particles. Photoluminescence is due to charge carrier confinement in such three dimensional structure (sponge-like structure). Characteristics of visible light emission from n-type PS can be explained in terms of modification of band structure accompanied by bandgap widening and localized levels in bandstructure. It is also shown that hydrogen and oxygen atoms existing on residual silicon parts play an important role on emission stability.

Langmuir-Blodgett Films of Perfluoroalkyl Monomaleate Copolymers on Porous Substrate

  • Hyein Jeong;Burm-Jong Lee;Young-Soo Kwon
    • Bulletin of the Korean Chemical Society
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    • 제15권8호
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    • pp.650-654
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    • 1994
  • Stable polyion-complexed polymeric monolayers were prepared by spreading perfluoroalkyl monomaleate copolymers, $C_2F_8MA-VE_2$ and $C_2F_8MA-VE_3$, on a aqueous poly(allylamine) subphase. The monolayer properties have been studied by the surface pressure-area (${\pi}$-A) isotherms. The $C_2F_8MA-VE_3$ containing longer oligoethyleneglycol pendant showed more expanded monolayer phase than the $C_2F_8MA-VE_2$. The polyion-complexed monolayers were transferable on various substrates, and the resulting Langmuir-Blodgett (LB) films were characterized by FT-IR spectroscopy and scanning electron microscopy (SEM). Two-dimensional crosslinking to form a polymer network was achieved by amide formation through heat treatment under vacuum with concurrent removal of perfluoroalkyl tails. SEM observation of this film on a porous membrane filter showed that the four layer film was sufficiently stable to cover the filter pore size of 0.1 ${\mu}$m. The $C_2F_8MA-VE_3$ revealed better covering capability than the $C_2F_8MA-VE_2$. Immersion of this film in water or in benzene did not cause any change in its appearance and in Fl-IR spectra.

Out-of-phase and in-phase vibrations and energy absorption of coupled nanoplates on the basis of surface-higher order-viscoelastic-couple stress theories

  • Guangli Fan;Maryam Shokravi;Rasool Javani;Suxa Hou
    • Steel and Composite Structures
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    • 제50권4호
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    • pp.403-418
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    • 2024
  • In this paper, vibration and energy absorption characteristics of a nanostructure which is composed of two embedded porous annular/circular nanoplates coupled by a viscoelastic substrate are investigated. The modified couple stress theory (MCST) and the Gurtin-Murdoch theory are applied to take into account the size and the surface effects, respectively. Furthermore, the structural damping effect is probed by the Kelvin-Voigt model and the mathematical model of the problem is developed by a new hyperbolic higher order shear deformation theory. The differential quadrature method (DQM) is employed to obtain the out-of-phase and in-phase frequencies of the structure in order to predict the dynamic response of it. The acquired results reveal that the vibration and energy absorption of the system depends on some factors such as porosity, surface stress effects, material length scale parameter, damping and spring constants of the viscoelastic foundation as well as geometrical parameters of annular/circular nanoplates. A bird's-eye view of the findings in the research paper offers a comprehensive understanding of the vibrational behavior and energy absorption capabilities of annular/circular porous nanoplates. The multidisciplinary approach and the inclusion of porosity make this study valuable for the development of innovative materials and applications in the field of nanoscience and engineering.

전자빔 물리증착을 이용한 고체 산화물 연료전지의 제조 : I. YSZ 박막 전해질의 제조 (Fabrication of Solid Oxide Fuel Cells with Electron Beam Physical Vapor Deposition: I. Preparation of Thin Electrolyte Film of YSZ)

  • 김형철;구명서;박종구;정화영;김주선;이해원;이종호
    • 한국세라믹학회지
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    • 제43권2호
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    • pp.85-91
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    • 2006
  • Electron Beam Physical Vapor Deposition (EB-PVD) was applied to fabricate a thin film YSZ electrolyte with large area on the porous NiO-YSZ anode substrate. Microstructural and thermal stability of the as-deposited electrolyte film was investigated via SEM and XRD analysis. In order to obtain an optimized YSZ film with high stability, both temperature and surface roughness of substrate were varied. A structurally homogeneous YSZ film with large area of $12\times12\;cm^2$ and high thermal stability up to $900^{\circ}C$ was fabricated at the substrate temperature of $T_s/T_m$ higher than 0.4. The smoother surface was proved to give the better film quality. Precise control of heating and cooling rate of the anode substrate was necessary to obtain a very dense YSZ electrolyte with high thermal stability, which affords to survive after post heat treatment for fabrication a cathode layer on it as well as after long time operation of solid oxide fuel cell at high temperature.

2차원 기공층을 포함하는 초박형 단열기판의 미세구조 및 단열 특성 (Microstructure and Thermal Insulation Properties of Ultra-Thin Thermal Insulating Substrate Containing 2-D Porous Layer)

  • 유창민;이창현;신효순;여동훈;김성훈
    • 한국전기전자재료학회논문지
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    • 제30권11호
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    • pp.683-687
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    • 2017
  • We investigated the structure of an ultra-thin insulating board with low thermal conductivity along z-axis, which was based on the idea of void layers created during the glass infiltration process for the zero-shrinkage low-temperature co-fired ceramic (LTCC) technology. An alumina and four glass powders were chosen and prepared as green sheets by the tape casting method. After comparison of the four glass powders, bismuth glass was selected for the experiment. Since there is no notable reactivity between alumina and bismuth glass, alumina was selected as the supporting additive in glass layers. With 2.5 vol% of alumina powder, glass green sheets were prepared and stacked alternately with alumina green sheet to form the 'alumina/glass (including alumina additive)/alumina' structure. The stacked green sheets were sintered into an insulating substrate. Scanning electron microscopy revealed that the additive alumina formed supporting bridges in void layers. The depth and number of the stacking layers were varied to examine the insulating property. The lowest thermal conductivity obtained was 0.23 W/mK with a $500-{\mu}m-thick$ substrate.

다공질 SiC 반도체와 Ag계 합금의 접합 (Junction of Porous SiC Semiconductor and Ag Alloy)

  • 배철훈
    • 한국산학기술학회논문지
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    • 제19권3호
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    • pp.576-583
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    • 2018
  • 탄화규소는 실리콘과 비교시 큰 에너지 밴드 갭을 갖고, 불순물 도핑에 의해 p형 및 n형 전도의 제어가 용이해서 고온용 전자부품 소재로 활용이 가능한 재료이다. 특히 ${\beta}$-SiC 분말로부터 제조한 다공질 n형 SiC 세라믹스의 경우, $800{\sim}1000^{\circ}C$에서 높은 열전 변환 효율을 나타내었다. SiC 열전 변환 반도체를 응용하기 위해서는 변환 성능지수도 중요하지만 $800^{\circ}C$ 이상에서 사용할 수 있는 고온용 금속전극 또한 필수적이다. 일반적으로 세라믹스는 대부분의 보편적인 용접용 금속과는 우수한 젖음을 갖지 못 하지만, 활성 첨가물을 고용시킨 합금의 경우, 계면 화학종들의 변화가 가능해서 젖음과 결합의 정도를 증진시킬 수 있다. 액체가 고체 표면을 적시면 액체-고체간 접합면의 에너지는 고체의 표면에너지 보다 작아지고 그 결과 액체가 고체 표면에서 넓게 퍼지면서 모세 틈새로 침투할 수 있는 구동력을 갖게 된다. 따라서 본 연구에서는 비교적 낮은 융점을 갖는 Ag를 이용해서 다공질 SiC 반도체 / Ag 및 Ag 합금 / SiC 및 알루미나 기판간의 접합에 대해 연구하였고, Ag-20Ti-20Cu 필러 메탈의 경우 SiC 반도체의 고온용 전극으로 적용 가능할 것으로 나타났다.

Y-doped BaZrO3을 이용한 저온형 박막 연료전지 연구 (Study on Low-Temperature Solid Oxide Fuel Cells Using Y-Doped BaZrO3)

  • 장익황;지상훈;백준열;이윤호;박태현;차석원
    • 대한기계학회논문집B
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    • 제36권9호
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    • pp.931-935
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    • 2012
  • 본 연구에서는 저온형 연료전지와 고온형 연료전지의 작동 및 구성 요소 측면 단점들을 보완하기 위해 중온 영역에서 작동하는 박막 연료전지를 제작하였다. 박막 연료전지는 이트륨이 도핑된 바륨 지르코네이트(BYZ) 전해질과 백금 수소극/공기극으로 이루어져 있으며, 성능은 $350^{\circ}C$에서 측정하였다. 350nm의 두께를 가지는 백금 수소극은 다공성 기판 위에 스퍼터링 기법을 이용하여 증착하였다. BYZ전해질은 펄스레이저 기법을 이용하여 $1{\mu}m$ 증착하였고, 상부에 스퍼터링 기법을 이용하여 200nm의 두께를 가지는 백금 공기극을 증착하였다. 개회로 전압은 약 0.81V이었고, 최대 출력 성능은 11.9mW/$cm^2$이었다.

복합 산화법과 MEMS 기술을 이용한 RF용 두꺼운 산화막 에어 브리지 및 공면 전송선의 제조 (Fabrication of Thick Silicon Dioxide Air-Bridge and Coplanar Waveguide for RF Application Using Complex Oxidation Process and MEMS Technology)

  • 김국진;박정용;이동인;이봉희;배영호;이종현;박세일
    • 센서학회지
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    • 제11권3호
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    • pp.163-170
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    • 2002
  • 본 논문에서는 양극반응과 복합 산화법($H_2O/O_2$ 분위기에서 $500^{\circ}C$, 1시간 열산화와 $1050^{\circ}C$, 2분간 RTO(Rapid Thermal Oxidation) 공정)을 이용한 두꺼운 OPSL(Oxidized Porous Silicon Layer)을 형성하여 이를 마이크로머시닝 기술을 이용함으로써 $10\;{\mu}m$ 두께의 OPS(Oxidized Porous Silicon) 에어 브리지를 제조하고, 그 위에 전송선로를 형성하여 그 RF 특성을 조사하였다. OPS 에어 브리지 위에 형성된 CPW(Coplanar Waveguide)의 손실이 OPSL 위에 형성된 전송선의 삽입손실보다 약 2dB 정도 적은 것을 보여주었으며, 반사손실은 OPSL 위에 형성된 전송선의 반사손실보다 적으며 약 -20 dB를 넘지 않고 있다. 본 연구에서 개발한 산화된 다공질 실리콘 멤브레인 및 에어 브리지 구조는 CMOS 공정 후에 사용 가능하며, 초고주파 회로 설계시 편리성과 유용성을 제시하고 있다.