• Title/Summary/Keyword: Porous Cu layer

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Fabrication of Porous Cu Layers on Cu Pillars through Formation of Brass Layers and Selective Zn Etching, and Cu-to-Cu Flip-chip Bonding (황동층의 형성과 선택적 아연 에칭을 통한 구리 필라 상 다공성 구리층의 제조와 구리-구리 플립칩 접합)

  • Wan-Geun Lee;Kwang-Seong Choi;Yong-Sung Eom;Jong-Hyun Lee
    • Journal of the Microelectronics and Packaging Society
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    • v.30 no.4
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    • pp.98-104
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    • 2023
  • The feasibility of an efficient process proposed for Cu-Cu flip-chip bonding was evaluated by forming a porous Cu layer on Cu pillar and conducting thermo-compression sinter-bonding after the infiltration of a reducing agent. The porous Cu layers on Cu pillars were manufactured through a three-step process of Zn plating-heat treatment-Zn selective etching. The average thickness of the formed porous Cu layer was approximately 2.3 ㎛. The flip-chip bonding was accomplished after infiltrating reducing solvent into porous Cu layer and pre-heating, and the layers were finally conducted into sintered joints through thermo-compression. With reduction behavior of Cu oxides and suppression of additional oxidation by the solvent, the porous Cu layer densified to thickness of approximately 1.1 ㎛ during the thermo-compression, and the Cu-Cu flip-chip bonding was eventually completed. As a result, a shear strength of approximately 11.2 MPa could be achieved after the bonding for 5 min under a pressure of 10 MPa at 300 ℃ in air. Because that was a result of partial bonding by only about 50% of the pillars, it was anticipated that a shear strength of 20 MPa or more could easily be obtained if all the pillars were induced to bond through process optimization.

Infiltration of the Cu-Ti Alloys to Porous $Al_2O_3$ Ceramic Coating (Cu-Ti합금의 침투에 의한 $Al_2O_3$ 세라믹 용사층의 복합화)

  • 이형근;김대훈;황선효
    • Journal of Welding and Joining
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    • v.10 no.4
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    • pp.213-221
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    • 1992
  • Al$_{2}$O$_{3}$ ceramic coating layer by gas flame spraying was very porous, therefore it could not have wear and corrosion resistance at all. To get a dense and strong coating layer, a method to infiltrate an alloy into the pores of $Al_{2}$O$_{3}$ ceramic coating was investigated. Cu-Ti alloys, which had good wettability and reactivity with $Al_{2}$O$_{3}$ ceramic, were examined for infiltration. Infiltration of the alloys was performed in vacuum at 1100.deg.C. The melt of Cu-50 at % Ti alloy was well penetrated through the porous $Al_{2}$O$_{3}$ coating and tightly sealed the pores, unbounded area and microcracks in the coating. The alloy melt in the pores reacted with $Al_{2}$O$_{3}$ ceramic to produce a suboxide phase, Cu$_{2}$Ti$_{4}$O. This composite layer which was composed of $Al_{2}$O$_{3}$ and Cu$_{2}$Ti$_{4}$O phase had good microstructure and wear and corrosion resistance. Additionally, microstructures at interfaces between coating layers were greatly improved owing to the effect of vacuum heat treating.

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Fabrication of Porous Cu by Freeze-drying Process of Camphene Slurry with CuO-coated Cu Powders (CuO가 코팅된 Cu 분말을 혼합한 Camphene 슬러리의 동결건조에 의한 Cu 다공체 제조)

  • Bang, Su-Ryong;Oh, Sung-Tag
    • Journal of Powder Materials
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    • v.21 no.3
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    • pp.191-195
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    • 2014
  • This study reports a simple way of fabricating the porous Cu with unidirectional pore channels by freeze drying camphene slurry with Cu oxide coated Cu powders. The coated powders were prepared by calcination of ball-milled powder mixture of Cu and Cu-nitrate. Improved dispersion stability of camphene slurry could be achieved using the Cu oxide coated Cu powders instead of pure Cu powders. Pores in the frozen specimen at $-25^{\circ}C$ were generated by sublimation of the camphene during drying in air, and the green bodies were sintered at $750^{\circ}C$ for 1 h in $H_2$ atmosphere. XRD analysis revealed that the coated layer of Cu oxide was completely converted to Cu phase without any reaction phases by hydrogen heat treatment. The porous Cu specimen prepared from pure Cu powders showed partly large pores with unidirectional pore channels, but most of pores were randomly distributed. In contrast, large and aligned parallel pores to the camphene growth direction were clearly observed in the sample using Cu oxide coated Cu powders. Pore formation behavior depending on the initial powders was discussed based on the degree of powder rearrangement and dispersion stability in slurry.

De-NOx Characteristics for Cu-ZSM5/Alumina Beads Catalyst Filter in Urea-SCR System (Urea-SCR 시스템에서의 Cu-ZSM5/알루미나 비드 촉매필터의 De-NOx 특성)

  • Jang, Young-Sang;Shin, Young-Seop;Lee, Byoung-Jun;Park, Jai-Koo
    • Transactions of the Korean Society of Automotive Engineers
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    • v.16 no.5
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    • pp.60-67
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    • 2008
  • The catalytic filter of Cu-ZSM5/alumina beads was considered to reduce NOx in the urea SCR system. Catalytic support of porous alumina beads with mean pore size $130{\mu}m$ and porosity $75{\sim}83%$ were prepared using foaming and gel-casting method. The Cu-ZSM5 catalysts were coated on the supporting alumina beads using $Cu(NO_3)_2$ by ion exchange method. After a washcoating process was applied to coat 10w% Cu-ZSM5 on porous alumina bead, coating layer was estimated $20{\mu}m$ in thickness. The characterization and the feasibility as a catalytic supports were investigated. And the NOx conversion test in Cu-ZSM5/Alumina Beads filter system was conducted by using Urea as reductants under laboratory test. The NOx conversion was increased as size and porosity of beads and observed more than 95% excellent NOx conversion above $300^{\circ}C$.

Fabrication of Nano-Channeled Tin Oxide Film Electrode and Evaluation of Its Electrochemical Properties (나노 채널 구조를 가진 산화 주석 박막 전극 제조 및 전기화학적 특성 평가)

  • Park, Su-Jin;Shin, Heon-Cheol
    • Korean Journal of Materials Research
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    • v.22 no.1
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    • pp.1-7
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    • 2012
  • Thin film electrode consisting purely of porous anodic tin oxide with well-defined nano-channeled structure was fabricated for the first time and its electrochemical properties were investigated for application to an anode in a rechargeable lithium battery. To prepare the thin film electrode, first, a bi-layer of porous anodic tin oxides with well-defined nano-channels and discrete nano-channels with lots of lateral micro-cracks was prepared by pulsed and continuous anodization processes, respectively. Subsequent to the Cu coating on the layer, well-defined nano-channeled tin oxide was mechanically separated from the specimen, leading to an electrode comprised of porous tin oxide and a Cu current collector. The porous tin oxide nearly maintained its initial nano-structured character in spite of there being a series of fabrication steps. The resulting tin oxide film electrode reacted reversibly with lithium as an anode in a rechargeable lithium battery. Moreover, the tin oxide showed far more enhanced cycling stability than that of powders obtained from anodic tin oxides, strongly indicating that this thin film electrode is mechanically more stable against cycling-induced internal stress. In spite of the enhanced cycling stability, however, the reduction in the initial irreversible capacity and additional improvement of cycling stability are still needed to allow for practical use.

Nanowire-Like Copper Oxide Grown on Porous Copper, a Promising Anode Material for Lithium-Ion Battery

  • Park, Hyeji;Lee, Sukyung;Jo, Minsang;Park, Sanghyuk;Kwon, Kyungjung;Shobana, M.K.;Choe, Heeman
    • Journal of the Korean Ceramic Society
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    • v.54 no.5
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    • pp.438-442
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    • 2017
  • This paper reports the facile synthesis of microlamella-structured porous copper (Cu)-oxide-based electrode and its potential application as an advanced anode material for lithium-ion batteries (LIBs). Nanowire-like Cu oxide, which is created by a simple thermal oxidation process, is radially and uniformly formed on the entire surface of Cu foam that has been fabricated using a combination of water-based slurry freezing and sintering (freeze casting). Compared to the Cu foil with a Cu oxide layer grown under the same processing conditions, the Cu foam anode with 63% porosity exhibits over twice as much capacity as the Cu foil (264.2 vs. 131.1 mAh/g at 0.2 C), confirming its potential for use as an anode electrode for LIBs.

Fabrication of a Porous Copper Current Collector Using a Facile Chemical Etching to Alleviate Degradation of a Silicon-Dominant Li-ion Battery Anode

  • Choi, Hongsuk;Kim, Subin;Song, Hayong;Suh, Seokho;Kim, Hyeong-Jin;Eom, KwangSup
    • Corrosion Science and Technology
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    • v.20 no.5
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    • pp.249-255
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    • 2021
  • In this work, we proposed a facile method to fabricate the three-dimensional porous copper current collector (3D Cu CC) for a Si-dominant anode in a Li-ion battery (LiB). The 3D Cu CC was prepared by combining chemical etching and thermal reduction from a planar copper foil. It had a porous layer employing micro-sized Cu balls with a large surface area. In particular, it had strengthened attachment of Si-dominant active material on the CC compared to a planar 2D copper foil. Moreover, the increased contact area between a Si-dominant active material and the 3D Cu could minimize contact loss of active materials from a CC. As a result of a battery test, Si-dominant active materials on 3D Cu showed higher cyclic performance and rate-capability than those on a conventional planar copper foil. Specifically, the Si electrode employing 3D Cu exhibited an areal capacity of 0.9 mAh cm-2 at the 300th cycles (@ 1.0 mA cm-2), which was 5.6 times higher than that on the 2D copper foil (0.16 mAh cm-2).

The properties of copper films deposited by RF magnetron sputtering (RF 마그네트론 스퍼터링법에 의해 증착된 구리막의 특성)

  • 송재성;오영우
    • Electrical & Electronic Materials
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    • v.9 no.7
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    • pp.727-732
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    • 1996
  • In the present paper, the Cu films 4.mu.m thick were deposited by RF magnetron sputtering method on Si wafer. The Cu films deposited at a condition of 100W, 10mtorr exhibited a low electrical resistivity of 2.3.mu..ohm..cm and densed microstructure, poor adhesion. The Cu films grown by 200W, 20mtorr showed a good adhesion property and higher electrical resistivity of 7.mu..ohm..cm because of porous columnar microstructure. Therefore, The Cu films were deposited by double layer deposition method using RF magnetron sputtering on Si wafer. The dependence of the electrical resistivity, adhesion, and reflectance in the CU films [C $U_{4-d}$(low resistivity) / C $U_{d}$(high adhesion) / Si-wafer] on the thickness of d has been investigated. The films formed with this deposition methods had the low electrical resistivity of about 2.6.mu..ohm..cm and high adhesion of about 700g/cm.m.m.

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Effect of Hydrogen on Dezincification of Cu-Zn Brass (Cu-Zn 황동에서 수소가 탈아연 부식에 미치는 영향)

  • Choe, Byung Hak;Lee, Bum Gyu;Jang, Hyeon Su;Jeon, Woo Il;Park, Yong Sung;Lim, Jae Kyun;Lee, Jin Hee;Park, Chan Sung;Kim, Jin Pyo
    • Korean Journal of Materials Research
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    • v.27 no.3
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    • pp.172-178
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    • 2017
  • The aim of this study is to consider the effect hydrogen on dezincification behavior of Cu-Zn alloys. The investigations include microstructural observations with scanning electron microscope and chemical composition analysis with energy dispersive spectrometer. The dezincification layer was found to occur in high pressure hydrogen atmosphere, not in air atmosphere. In addition, the layers penetrated into the inner side along the grain boundaries in the case of hydrogen condition. The shape of the dezincification layers was porous because of Zn dissolution from the ${\alpha}$ or ${\beta}$ phase. In the case of stress corrosion cracks formed in the Cu-Zn microstructure, the dezincification phenomenon with porous voids was also accompanied by grain boundary cracking.

Fabrication of Porous Reticular Metal by Electrodeposition of Fe/Ni Alloy for Heat Dissipation Materials (Fe/Ni 합금전착에 의한 다공성 그물군조 방열재료의 제조 연구)

  • Lee, Hwa-Young;Lee, Kwan-Hyi;Jeung, Won-Young
    • Journal of the Korean Electrochemical Society
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    • v.5 no.3
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    • pp.125-130
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    • 2002
  • An attempt was made for the application of porous reticular metal to a heat dissipation material in semiconductor process. For this aim, the electrodeposition of Fe/Ni alloy on the porous reticular Cu has been performed to minimize the thermal expansion mismatch between Cu skeleton and electronic chip. Preliminary tests for the electrodeposition of Fe/Ni alloy layer were conducted by using standard Hull Cell to examine the effect of current density on the composition of alloy layer. It seemed that mass transfer affected significantly the composition of Fe/Ni layer due to anomalous codeposition in the electrodeposition of Fe/Ni alloy. A paddle type stirring bath, which was employed to control the mass transfer of electrolyte in the work, was found to allow the electrodeposition Fe/Ni with a precise composition. result showed that the thermal expansion of Fe/Ni alloy layer was much lower than that of pure copper. From the tests of heat dissipation by using the apparatus designed in the work the heat dissipation material fabricated in the work showed the excellent heat dissipation capacity, namely, more than two times as compared to that of pure copper plate.