• 제목/요약/키워드: Polyimide layer

검색결과 244건 처리시간 0.027초

Bottom Gate Microcrystalline Silicon TFT Fabricated on Plasma Treated Silicon Nitride

  • Huang, Jung-Jie;Chen, Yung-Pei;Lin, Hung-Chien;Yao, Hsiao-Chiang;Lee, Cheng-Chung
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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    • pp.218-221
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    • 2008
  • Bottom-gate microcrystalline silicon thin film transistors (${\mu}c$-Si:H TFTs) were fabricated on glass and transparent polyimide substrates by conventional 13.56 MHz RF plasma enhanced chemical vapor deposition at $200^{\circ}C$. The deposition rate of the ${\mu}c$-Si:H film is 24 nm/min and the amorphous incubation layer near the ${\mu}c$-Si:H/silicon nitride interface is unobvious. The threshold voltage of ${\mu}c$-Si:H TFTs can be improved by $H_2$ or $NH_3$ plasma pretreatment silicon nitride film.

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The Dependence of Mechanical Strain on a-Si:H TFTs and Metal Connection Fabricated on Flexible Substrate

  • Lee, M.H.;Ho, K.Y.;Chen, P.C.;Cheng, C.C;Yeh, Y.H.
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.439-442
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    • 2006
  • We evaluated a-Si:H TFTs fabricated on polyimide substrate (PI) at the highest temperature of $160^{\circ}C$ with uniaxial and tensile strain to imitate flexible display. With tensile strain, the threshold voltage of a-Si:H TFTs have positive shift due to extra dangling bond formation in a-Si:H layer. However, no significant degradation of the subthreshold swing and effective mobility with tensile strain of a-Si:H TFTs indicates the similar level of band tail state. The metal wire with the width of $10\;{\mu}m$ for connection on flexible substrate can sustain with curvature radius 2.5 cm.

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Effect of Side Chain Structure of Gate Insulator on Characteristics of Organic Thin Film Transistor

  • Yi, Mi-Hye;Ha, Sun-Young;Pyo, Seung-Moon
    • 한국정보디스플레이학회:학술대회논문집
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    • 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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    • pp.487-490
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    • 2006
  • We propose a new method to achieve well-defined surface properties of the polymeric gate dielectrics without using SAM technique and inserting another organic/inorganic buffer layer. Pentacene thin film transistors(OTFTs) fabricated with the polyimide gate insulators with different side chain structures were demonstrated. Further, a relationship between the surface properties (surface morphology, surface energy, etc) of the films and the performance of OTFTs have investigated, which will be given in more detail in presentation.

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수직배향층에서의 네마틱액정의 프리틸트각 발생 (Pretilt Angle Generation for Nematic Liquid Crystal on a Homeotropic Alignment Layer)

  • 서대식;김형규;이승희
    • 한국전기전자재료학회논문지
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    • 제14권2호
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    • pp.130-132
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    • 2001
  • The mechanisms of pretilt angle generation in nematic liquid crystal (NLC) with negative dielectric anisotropy on a rubbed polyimide (PI) surface for homeotropic alignment were studied. The pretilt angle of negative type NLC was smaller than that of the positive type NLC for all rubbing strength regions on the rubbed PI surface. The pretilt angle generated in NLC does not attributable to steric interaction between the fluorine moiety of NLC and the polymer surface on the rubbed PI surface. Consequently, the mechanism of the pretilt angle generation for homeotropic alignment is different from the one for homogeneous alignment.

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A Fully Integrated Thin-Film Inductor and Its Application to a DC-DC Converter

  • Park, Il-Yong;Kim, Sang-Gi;Koo, Jin-Gun;Roh, Tae-Moon;Lee, Dae-Woo;Yang, Yil-Suk;Kim, Jung-Dae
    • ETRI Journal
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    • 제25권4호
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    • pp.270-273
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    • 2003
  • This paper presents a simple process to integrate thin-film inductors with a bottom NiFe magnetic core. NiFe thin films with a thickness of 2 to 3${\mu}m$ were deposited by sputtering. A polyimide buffer layer and shadow mask were used to relax the stress of the NiFe films. The fabricated double spiral thin-film inductor showed an inductance of 0.49${\mu}H$ and a Q factor of 4.8 at 8 MHz. The DC-DC converter with the monolithically integrated thin-film inductor showed comparable performances to those with sandwiched magnetic layers. We simplified the integration process by eliminating the planarization process for the top magnetic core. The efficiency of the DC-DC converter with the monolithic thin-film inductor was 72% when the input voltage and output voltage were 3.5 V and 6 V, respectively, at an operating frequency of 8 MHz.

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Photoisomerization and Photo-induced Optical Anisotropy of Polymethacrylate Containing Aminonitroazobenzene

  • Park, Dong-Hoon;Cho, Kang-Jin
    • Fibers and Polymers
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    • 제2권1호
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    • pp.123-130
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    • 2001
  • Photoresponsive side chain copolymer and homopolymer containing an aminonitroazobenzene were synthesized for studying photoisomerization behavior and photo-induced anisotropy. Trans-to-cis photoisomerization was observed under the exposure of a circularly polarized visible light with UV-Vis absorption spectroscopy. Reorientation of polar azobenzene molecules induced optical anisotropy under a linearly polarized light at 532nm. Polarized absorption spectroscopy was employed to investigate the anisotropy of the polymer film during irradiationg of the excitation light. Layers of two photosensitive polymers were used for aligning liquid crystal(LC) molecules instead of one of the rubbed polyimide layers in the conventional twisted nematic cell. For producing homogeneous alignment of a nematic LC molecule, a linearly polarized light was exposed to the films of two polymers. The stability of the LC alignment upon the linearly polarized light exposure was also studied.

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폴리이미드를 이용한 홀 어레이 구조의 높은 민감도를 가진 습도센서 (A highly sensitive humidity sensor with a novel hole array structure using a polyimide sensing layer)

  • 유민수;채지성;장성필
    • 대한전기학회:학술대회논문집
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    • 대한전기학회 2015년도 제46회 하계학술대회
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    • pp.1247-1248
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    • 2015
  • 최근 전반적인 산업 분야에서 고도의 기술을 요구하는 작업들이 늘어나고 있다. 이러한 작업들을 진행하기 위해서는 해당 작업에 알맞은 환경을 유지시켜주는 것이 중요한데 특히 작업 환경의 온도를 지속적으로 모니터링하고 조절하는 것은 매우 중요한 사안중 하나이다. 식품, 섬유 등의 제품 생산을 위한 작업 환경을 감시하고 반도체, 기타 전자 부품 등 작은 소자부터 자동차, 로보틱스, 바이오 분야 등의 어플리케이션까지 전 분야에 걸쳐 고 성능의 온도 센서를 필요로 하고 있다.

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파릴렌 게이트 절연층을 사용한 신축성 박박 트랜지스터의 제작 및 특성 (Fabrication and Characterizations of Stretchable Thin-Film Transistor using Parylene Gate Insulating Layer)

  • 정순원;류봉조;구경완
    • 전기학회논문지
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    • 제66권4호
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    • pp.721-726
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    • 2017
  • We fabricated stretchable thin-film transistors(TFTs) on a polydimethylsiloxane substrate with patterned polyimide island structures by using an amorphous InGaZnO semiconductor and parylene gate insulator. The TFTs exhibited a field- effect mobility of $5cm^2V^{-1}s^{-1}$ and a current on/off ratio of $10^5$ at a relatively low operating voltage. Furthermore, the fabricated transistors showed no noticeable changes in their electrical performance for large strains of up to 50 %.

Laser Direct Patterning of Carbon Nanotube Film

  • 윤지욱;조성학;장원석
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2012년도 제42회 동계 정기 학술대회 초록집
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    • pp.203-203
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    • 2012
  • The SWCNTs network are formed on various plastic substrates such as poly(ethylene terephthalate) (PET), polyimide (PI) and soda lime glass using roll-to-roll printing and spray process. Selective patterning of carbon nanotubes film on transparent substrates was performed using a femtosecond laser. This process has many advantages because it is performed without chemicals and is easily applied to large-area patterning. It could also control the transparency and conductivity of CNT film by selective removal of CNTs. Furthermore, selective cutting of carbon nanotube using a femtosecond laser does not cause any phase change in the CNTs, as usually shown in focused ion beam irradiation of the CNTs. The patterned SWCNT films on transparent substrate can be used electrode layer for touch panels of flexible or flat panel display instead indium tin oxide (ITO) film.

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Electro-optical Properties of Twisted Nematic Liquid Crystal Displays Fabricated with TIPS-pentacene Doping

  • Lee, Jin-Woo
    • Transactions on Electrical and Electronic Materials
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    • 제14권2호
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    • pp.82-85
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    • 2013
  • This paper introduces 6,13-bis(triisopropylsilylethynyl) pentacene (TIPS pentacene) doped liquid crystal (LC) alignment properties on a rubbed polyimide (PI) layer as a function of the doping concentration of TIPS pentacene. Pretilt angles, photomicrographs, and electro-optical properties of TIPS pentacene doped LCs were comparable to those of pure LCs. However, TIPS pentacene in a LC medium supported twisted nematic-liquid crystal displays (TN-LCDs) to improve electro-optical properties. The threshold voltages observed in the TN cells decreased as the TIPS pentacene concentration increased. In addition, suitable response times were observed in TN cells.