• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.62-67
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• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• Journal of Information Display
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• v.12 no.3
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• pp.115-119
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• 2011

Optically isotropic liquid crystal (LC) mixture such as blue-phase LC and nanostructured LC composites exhibit the advantages of fast response time, high contrast ratio and wide-viewing angle due to the induced birefringence along the horizontal electric field. Utilizing this mixture, a novel single cell gap in-plane switching-type polymer-stabilized blue-phase transflective liquid crystal display by embedding the nanowire grid polarizer as a polarization-dependent reflective polarizer in the R region is proposed. This device can be used as a normal black mode without any quarter-wave plate or patterned in-cell phase retarder. Moreover, the transmittance is identical to the reflectance so that it will be suitable for single gamma driving. Detailed electro-optic performances, such as voltage-dependent light efficiency and viewing angle of the proposed device configuration, are investigated.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.16 no.12 s.117
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• pp.1272-1278
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• 2006

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin(Au/Sn) eutectic solder bonding. The membrane chip has $2.5mm{\times}2.5mm$, 0.5${\mu}m$ thick low stress silicon nitride membrane, $2mm{\times}2mm$ Au/Ni/Cr membrane electrode, and 3${\mu}m$ thick Au/Sn layer. The backplate chip has $2mm{\times}2mm$, 150${\mu}m$ thick single crystal silicon rigid backplate, $1.8mm{\times}1.8mm$ backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50{\sim}60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is 39.8 ${\mu}V/Pa$(-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.48 no.2
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• pp.69-75
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• 1999

The characteristics of $H_2$ gas detection have been investigated using the Pt-MIS capacitor composed of the LPCVD nitride on the oxide. The flat band voltage shift is measured as 0.1 V in 1,000 ppm $H_2$ gas ambient and to be independent of Pt catalyst thickness. It is found that the flatband voltage shift is proportional to the hydrogen concentrations. The response and recovery time of Pt-MIS capacitor are 5 mins and 25 mins respectively. The samples of 30nm thick Pt revealed much higher sensitivity than that of 150nm samples. The samples of 150nm Pt showed that the flatband voltage shift of the device is due to the formation of the dipole layer of the adsorbed hydrogen atoms at the Pt-insulator interface.

• Korean Journal of Optics and Photonics
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• v.10 no.5
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• pp.419-423
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• 1999

Optical filters utilizing the evanescent filed coupling between the side polished fiber and polymer planar waveguide were fabricated and optical properties of the devices were measured. A scheme for reducing polarization dependent properties of the device was proposed and demonstrated experimentally. Our measurement results showed that resonance wavelengths and filtering depth of the optical filters can be determined by adjusting thickness of planar waveguide and polishing depth of the fiber. The device fabrication procedure including fiber polishing steps and formation of polymer planar waveguide were described. The optical characteristics of fabricated optical filers were that 3 dB bandwidth was 15 nm, the resonance wavelength difference between the TE and TM polarized response was less then 2 nm, and insertion loss was less then 0.2 dB. The measured resonance wavelength drift dut to the variation of ambient temperature was -0.35 nm/$^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.320-320
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• 2010

In the case of existing ultrasonic motors, they have characteristics such as outstanding response speed, speed and high efficiency. However, it's very hard to use practically them as small motors due to complicated structure and expensive cost. This paper proposed v-type ultrasonic linear motor. Stator of the motor is composed of thin elastic body and four ceramics attached to upper and bottom areas of the body. The ceramics have each direction of polarization. When two harmonic voltages which had $90^{\circ}$ phase difference were applied to the ceramics, the symmetric and anti-symmetric displacements were generated at the tip to make the elliptical motion. To find out a model that generates maximum displacement at contact tip, FEM program was used with change of leg-angle. In addition, optimal model was chosen by considering magnitude and shape of displacement according to change of frequency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.23-23
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• 2010

The $Bi_2Mg_{2/3}Nb_{4/3}O_7$ (BMNO)-Bi composite films sandwiched by an $Al_2O_3$ protection layer exhibited a linear increase of a dielectric constant with increasing thickness and the 1000nm-thick BMNO-Bi composite films showed a dielectric constant (~220) higher than that of its bulk material (~210), keeping a low leakage current density of about $0.1{\mu}A/cm^2$. An enhancement of the dielectric constant in the BMNO-Bi composite films was attributed to the hybrid model combined by a space charge polarization, dipolar response, and nano-capacitors. On the other hand, 1000nm-thick BMNO-Bi composite films sandwiched by 40nm-thick BMNO layer exhibited a dielectric constant of about 450 at 100 kHz and a leakage current density of $0.1{\mu}A/cm^2$ at 6V.

• Journal of Electrical Engineering and Technology
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• v.10 no.3
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• pp.1107-1113
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• 2015

Test temperature is an important factor affecting the measurement results of dielectric response of field power transformers. In order to better apply the polarization and depolarization current (PDC) to the condition monitoring of oil-paper insulation system in power transformers, the influences and elimination method of test temperature on PDC characteristic spectroscopy (PDC-CS) were investigated. Firstly, the experimental winding sample was measured by PDC method at different test temperatures, then the PDC-CS was obtained from the measurement results and its changing rules were discussed, which show that the PDC-CS appears a horizontal mobility with the rise of temperature. Based on the rules, the “time temperature shift technique” was introduced to eliminate the influence of test temperature. It is shown that the PDC-CS at different test temperatures can be converted to the same reference temperature coincident with each other.

• Journal of Advanced Marine Engineering and Technology
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• v.30 no.8
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• pp.894-900
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• 2006

The electrical characteristics associated with crystal structure changes as a function of La content for $(Pb_{1-x}La_x)(Zr_{0.5}Ti_{0.5})O_3$ thin films were investigated for applications in memory capacitors. Tetragonality of PLZT films decreased with increasing La content. Thin films with La $\geq$ 20 mol% were found to be cubic. Films with La $\geq$ 12 mol% exhibited broader dielectric peaks compared to those of bulk ceramics and behaved as relaxer ferroelectrics. Tetragonal PLZT film with 12 mol% La had a dielectric constant maximum of 1330 at room temperature and a charge storage density of ${\sim}18{\mu}C/cm^2$ at 5 V. Decrease in coercive field and remnant polarization with increase in La content were resulting from less dipolar response caused by the decreased crystal anisotropy. The leakage current densities $<10^{-8}A/cm^2$ up to 5 V bias voltage were observed for the films with La $\geq$ 14 mol%.

• Journal of the Korean Ceramic Society
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• v.42 no.12 s.283
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• pp.793-799
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• 2005

A composite cathode of LSCF$(La_{0.6}Sr_{0.4}Co_{0.2}Fe_{0.8}O_3)\;and\;GDC\; (Gd_2O_3-doped\;CeO_2:Ce_{0.9}Gd_{0.1}O_{1.95_})$ was characterized in terms of an electrode response, using a point contact in an Yttria-Stabilized Zirconia (YSZ) electrolyte incorporated into AC two-point impedance spectroscopy. The point-contacted configuration amplifies the responses occurring near the YSZ/cathode interface through the aligned point contact on the planar LSCF/GDC electrode. The point contact interface increases the bulk resistance allowing the estimation of the point contact geometry and resolving the electrode-related responses. The resultant impedance spectra are analyzed through an equivalent circuit model constructed by resistors and constant phase elements. The bulk responses can be resolved from the electrode-related portions in terms of spreading resistance. The electrode-related polarizations are measured in terms of temperature and oxygen partial pressure. The modified impedance spectroscopy is discussed in terms of methodology and analytical aspects, toward resolving the electrode-polarization issues in solid oxide fuel cells.