A study on the design of boron diffusion simulator applicable for shallow $p^+-n$ junction formation
(박막 $p^+-n$ 접합 형성을 위한 보론 확산 시뮬레이터의 제작에 관한 연구)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2004.04b
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- pp.30-33
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- 2004