• 열처리공학회지
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• 제12권2호
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• pp.166-173
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• 1999

Commercial carbon steels containing 0.2~0.55 wt.----C were plasma-nitrided or plasma nitrocarburized at $550^{\circ}C$ for 21.6Ks using $H_2-N_2$ or $H_2-N_2$-CO mixed gas respectively. The characteristics of hardening and wear-resistance of each treatment were studied and compared. And also microstructure of nitrided layer and nitrides formed in compound layer near surface were studied. All plasma-nitrided steels investigated showed remarkable increase of surface hardness with the increase of carbon content. But nitrocarburized steels resulted in higher surface-hardness than plasma-nitrided steels, which means that nitrocarburized has higher surface-hardening effect. Plasma-nitrided steels showed hardness increase in through-thickness direction near surface. And also nitrocarburized steels showed similar hardness distribution in through-thickness direction to that of plasma-nitrided steel. However, nitrocarburized steels had higher cross-sectional maximum-hardness than plasma-nitrided steels as much as 100Hv. Wear test showed that the amount of specific wear was reduced by both plasma-nitriding and nitrocarburized, showing that the amount of specific wear was not related to the hardness. But non-treated specimen showed that the amount of specific wear was related to the hardness.

• 반도체디스플레이기술학회지
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• 제22권3호
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• pp.130-135
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• 2023

Plasma-resistant ceramic (PRC) is a material used to prevent internal damage in plasma processing equipment for semiconductors and displays. The challenge is to suppress particles falling off from damaged surfaces and increase retention time in order to improve productivity and introduce the latest miniaturization process. Here, we confirmed the effect of suppressing plasma deterioration and reducing the etch rate through surface treatment of existing PRC with an initial illumination level of 200 nm. In particular, quartz glass showed a decrease in etch rate of up to 10%. Furthermore, it is believed that micro-scale secondary particles formed on the microstructure of each material grow as crystals during the fluoridation process. This is a factor that can act as a killer defect when dropped, and is an essential consideration when analyzing plasma resistance. The plasma etching suppression effect of the initial illumination is thought to be due to partial over etching at the dihedral angle of the material due to the sputtering of re-emission of Ar+-based cations. This means that plasma damage due to densification can also be interpreted in existing PRC studies. The research results are significant in that they present surface treatment conditions that can be directly applied to existing PRC for mass production and a new perspective to analyze plasma resistance in addition to simple etching rates.

• 한국표면공학회지
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• 제52권2호
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• pp.96-102
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• 2019

Magnesium and its alloys are prone to be corroded, thus surface treatments improving corrosion resistance are always required for practical applications. As a surface treatment of magnesium alloys, plasma electrolytic oxidation (PEO), creating porous stable oxide layer by a high voltage discharge in electrolyte, enhances the corrosion resistance. However, due to superhydrophilicity of the porous oxide layer, which easily allow the penetration of corrosive media toward magnesium alloys substrate, post-treatments inhibiting the transfer of corrosive media in porous oxide layer are required. In this work, we employed a hydrophobizing method to enhance the corrosion resistance of PEO treated Mg alloy. Three types of hydrophobizing techniques were used for PEO layer. Thin Teflon coating with solvent evaporation, self-assembled monolayer (SAM) coating of octadecyltrichlorosilane (OTS) based on solution method and SAM coating of perfluorodecyltrichlorosilane (FDTS) based on vacuum method significantly enhances corrosion resistance of PEO treated Mg alloy with reducing the contact of water on the surface. In particular, the vacuum based FDTS coating on PEO layer shows the most effective hydrophobicity with the highest corrosion resistance.

• 한국해양공학회지
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• 제25권1호
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• pp.56-60
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• 2011

A low temperature plasma carburizing process was performed to AISI 304L austenitic stainless steel to achieve the enhancement of surface hardness without a compromise in their corrosion resistance. Attempts were made to investigate the influence of the processing temperatures on the surface-hardened layer during low temperature plasma carburizng in order to obtain the optimum processing conditions. The expanded austenite (${\gamma}C$) was formed on all the treated surfaces. Precipitates of chromium carbides were detected in the hardened layer (C-enriched layer) only for the specimen treated at $500^{\circ}C$. The hardened layer thickness of ${\gamma}C$ increased up to about $35\;{\mu}m$, with increasing treatment temperature. The surface hardness reached about 1000 $HK_{0.05}$, which is about 4 times higher than that of the untreated sample (250 $HK_{0.05}$). Minor loss in corrosion resistance was observed for the specimens treated at temperatures of $310^{\circ}C-450^{\circ}C$ compared with untreated austenitic stainless steel. Particularly, the precipitation of chromium carbides at $500^{\circ}C$ led to a significant decrease in the corrosion resistance.

• Journal of Welding and Joining
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• 제32권5호
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• pp.65-71
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• 2014

Atmospheric plasma spraying (APS) is world-widely used process in the automotive industry as a method to provide wear resistance coatings for engine cylinder bore, using various materials. The weight of engine blocks can be considerably decreased by removing cast iron liners, which can finally result in the improvement of fuel efficiency. In this study, five kinds of powder materials, 1.2C steel powder and 1.2C steel powder mixed with 5, 10, 15, 20 wt.%. molybdenum powder, were deposited by atmospheric plasma spraying in order to investigate the effect of molybdenum on the wear resistance of coatings. Microstructural analysis showed that molybdenum splats were well distributed in 1.2C steel matrix with intimate bonding. The molybdenum added coatings showed better tribological properties than 1.2C steel coating. However, above the 15 wt.%. blending fraction, wear resistance was somewhat degraded with poor roughness of worn surface due to the brittle fracture occurred in molybdenum splats. Consequently, compared to conventional liner material, gray cast iron, 10 wt. pct. molybdenum blended 1.2C steel coating showed much better tribological properties and therefore it looks very feasible to replace gray cast iron liner.

• 한국주조공학회지
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• 제28권1호
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• pp.20-24
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• 2008

The characteristics, such as roughness, thickness, microhardness and corrosion resistance, of plasma electrolytic oxide coatings on AZ91D alloy were investigated under the processing condition of various coating times. The coatings on AZ91D alloy consisted of MgO, $MgAl_{2}O_{4}$ and $Mg_{2}SiO_{4}$ oxides. The surface roughness and thickness of coatings became larger with increasing the coating time. The microhardness in cross section of coatings was much higher than not only that in surface but that in the conventional anodic oxide coatings, which increased progressively as the coating time increased. After being immersed in 3.5%NaCl solution and methyl alcohol, the corrosion resistance of AZ91D alloy was markedly improved by plasma electrolytic oxidation coating treatment, and the AZ91D alloy coated for 50min revealed excellent corrosion resistance.

• 한국수정란이식학회지
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• 제24권3호
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• pp.131-137
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• 2009

In dogs, correct diagnosis of estrus is important and the exact time of ovulation can be determined by variouse methods. Vaginal cytology has commonly used in conjunction with the physical examination, clinical history, vaginoscopy, and hormonal assays to determine the stage of the reproductive cycle. This study was therefore investigated the effectiveness of direct ovulation detector designed by changes of electrical resistance in vaginal mucus following different estrus cycles with several methods; vaginal cytology, concentration of plasma estrogen and progesterone, and direct examination by laparotomy. A total of 12 bitches was selected for the study and observed estrus signs. The bitches were evaluated clinical sign (vulvar swelling and bleeding), cytological examination (keratocyte and RBC), electrical resistance, plasma estrogen and progesterone concentration for estrus assessment. Accuracy of ovulation detection by vaginal cytology was significantly (p<0.05) lower than those by electrical resistance and plasma progesterone concentration, based on the confirmation by laparotomy. Vaginal smear is not confidential method compared to detection of electrical resistance and plasma progesterone concentration at ovulation. Although the value of electrical resistance was varied at the same points of estrus in individuals, ovulation was occurred at the first day which shown the peak of electrical resistance and mating time was third day after peak. In conclusion, ovulation detector designed by changes of electrical resistance is an effective and economic instrument for predicting estrus and ovulation in bitches.

• Composites Research
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• 제33권4호
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• pp.205-212
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• 2020

본 연구에서는 기상화학반응공정을 이용하여 실리콘카바이드가 코팅된 2종형상의 탄소/탄소복합재 위에 진공플라즈마용사를이용하여 하프늄카바이드를 코팅하였다. 코팅 전/후 시편을 5.06 MW/㎡의 열유속에서 120초 동안 산화 및 삭마 실험을 진행하였다. 시험 전/후의 질량 변화량을 통해 질량삭마율을 계산하였고 캘리퍼스와 고속카메라를 이용하여 길이변화를 측정하여 길이삭마량을 계산하였다. 시편 단면의 FE-SEM 및 EDS 분석을 통해 산화 및 삭마거동을 관찰하였다. 플라즈마 풍동 시험결과 코팅된 시편이 무게감소 및 길이변화가 적어 내산화 및 내삭마성이 높은 것으로 판단되었다. 그러나 동일조건에서 시험한 반구형과 원통형의 산화 및 삭마정도는 상이하였고 원통형에서 더 높은 내산화 및 내삭마성을 가지는 것으로 평가되었다.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제49권8호
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• pp.438-444
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• 2000

We report the effects of etch process parameters on the ohmic contact formation in the plasma etching of GaN. Planar inductively coupled plasma system with $CH_4/H_2/Ar$gas chemistry has been used as etch reactor. The contact resistance and the specific contact resistance have been investigated using transfer length method as a function of RF bias power and %Ar gas concentration in total flow rate. AES(Auger electron spectroscopy) analysis revealed that the etched GaN has nonstoichiometric Ga rich surface and was contaminated by carbon and oxygen. Especially large amount of carbon was detected at the sample etched for high bias power (or voltage) condition, where severe degradation of contact resistance was occurred. We achieved the low ohmic contact of $2.4{\times}10^{-3} {\Omega}cm^2$ specific contact resistance at the input power 400 W, RF bias power 150 W, and working pressure 10mTorr with 10 sccm $CH_4$, 15 sccm H2, 5 sccm Ar gas composition.

• 한국자동차공학회논문집
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• 제14권3호
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• pp.157-163
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• 2006

This paper described the process of improving durability performance of the exhaust decoupler by the plasma nitriding. The properties of plasma nitriding treatment of AIS1304 stainless steel were tested using specimens before applying plasma nitriding to a mesh ring. In order to analyses the effect of plasma nitriding treatment on the mechanical properties, SEM(Scanning Electron Microscopes), roughness and hardness tester were used. Based on specimen plasma nitriding, we could find appropriate condition for application to the mesh ring of decoupler. To confirm the improved durability performance, we compared the number of cycles, which reaches to fracture, of the nitrided decoupler and that of the unnitrided decoupler by the bending cyclic test. In this test, the durability and wear resistance of the mesh ring are significantly improved by plasma nitriding treatment.