• Journal of the Korean Vacuum Society
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• v.20 no.4
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• pp.258-265
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• 2011

A zero-dimensional global model simulator for atmospheric pressure oxygen plasmas has been developed. The simulation model considers the configurations similar to that of plasma needle device. The simulation results show that those species of O, $O_3$, $O_2*$ and ${O_2}^+$ have the highest density in sequence. Electrons dissipate most of their energy through the collisions with oxygen molecules. If the input power increases, the density of most species also increases as much as three-boy collision for the creation of ozone is weakened and hence the density of ozone decreases. The body to volume ratio also affects the plasma density.

• Journal of Astronomy and Space Sciences
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• v.39 no.1
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• pp.11-22
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• 2022

It is suggested that magnetosonic waves (also known as equatorial noise) can scatter radiation belt electrons in the Earth's magnetosphere. Therefore, it is important to understand the global distribution of these waves between the proton cyclotron frequency and the lower hybrid resonance frequency. In this study, we developed an empirical model for estimating the global distribution of magnetosonic wave amplitudes and wave normal angles. The model is based on the entire mission period (approximately 2012-2019) of observations of Van Allen Probes A and B as a function of the distance from the Earth (denoted by L^*), magnetic local time (MLT), magnetic latitude (λ), and geomagnetic activity (denoted by the Kp index). In previous studies the wave distribution inside and outside the plasmasphere were separately investigated and modeled. Our model, on the other hand, identifies the wave distribution along with the ambient plasma environment-defined by the ratio of the plasma frequency (f_pe) to the electron cyclotron frequency (f_ce)-without separately determining the wave distribution according to the plasmapause location. The model results show that, as Kp increases, the dayside wave amplitude in the equatorial region intensifies. It thereby propagates the intense region towards the wider MLT and inward to L^* < 4. In contrast, the f_pe/f_ce ratio decreases with increasing Kp for all regions. Nevertheless, the decreasing aspect differs between regions above and below L^* = 4. This finding implies that the particle energy and pitch angle that magnetosonic waves can effectively scatter vary depending on the locations and geomagnetic activity. Our model agrees with the statistically observed wave distribution and ambient plasma environment with a coefficient of determination of > 0.9. The model is valid in all MLTs, 2 ≤ L^* < 6, |λ| < 20°, and Kp ≤ 6.

• Journal of the Korean institute of surface engineering
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• v.43 no.6
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• pp.304-308
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• 2010

Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.184-184
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• 2012

We proposed a new measurement method of cutoff probe using the reactance spectrum of the plasma in cutoff probe system instead of transmission spectrum. The high accurate reactance spectrum of the plasma which is expected in previous circuit simulation of cutoff probe [1] was measured by using the automatic port extension method of the network analyzer. The measured reactance spectrum is good agreement with E/M wave simulation result (CST Microwave Studio). From the analysis of the measured reactance spectrum based on the circuit modeling, not only the electron density but also electron-neutral collision frequency can be simply obtained. The obtained results of electron density and e-n collision frequency were presented and discussed in wide range of experimental conditions, together with comparison result with previous methods (a previous cutoff probe using transmission spectrum and a single langmuir probe).

• Journal of Powder Materials
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• v.27 no.5
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• pp.365-372
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• 2020

Predicting the quality of materials after they are subjected to plasma sintering is a challenging task because of the non-linear relationships between the process variables and mechanical properties. Furthermore, the variables governing the sintering process affect the microstructure and the mechanical properties of the final product. Therefore, an artificial neural network modeling was carried out to correlate the parameters of the spark plasma sintering process with the densification and hardness values of Ti-6Al-4V alloys dispersed with nano-sized TiN particles. The relative density (%), effective density (g/㎤), and hardness (HV) were estimated as functions of sintering temperature (℃), time (min), and composition (change in % TiN). A total of 20 datasets were collected from the open literature to develop the model. The high-level accuracy in model predictions (>80%) discloses the complex relationships among the sintering process variables, product quality, and mechanical performance. Further, the effect of sintering temperature, time, and TiN percentage on the density and hardness values were quantitatively estimated with the help of the developed model.

• Transactions on Electrical and Electronic Materials
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• v.6 no.6
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• pp.262-271
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• 2005

In order to achieve timely and accurate fault detection of plasma etching process, neural network based time series modeling has been applied to reactive ion etching (RIE) using two different in-situ plasma-monitoring sensors called optical emission spectroscopy (OES) and residual gas analyzer (RGA). Four different subsystems of RIE (such as RF power, chamber pressure, and two gas flows) were considered as potential sources of fault, and multiple degrees of faults were tested. OES and RGA data were simultaneously collected while the etching of benzocyclobutene (BCB) in a $SF_6/O_2$ plasma was taking place. To simulate established TSNNs as incipient fault detectors, each TSNN was trained to learn the parameters at t, t+T, ... , and t+4T. This prediction scheme could effectively compensate run-time-delay (RTD) caused by data preprocessing and computation. Satisfying results are presented in this paper, and it turned out that OES is more sensitive to RF power and RGA is to chamber pressure and gas flows. Therefore, the combination of these two sensors is recommended for better fault detection, and they show a potential to the applications of not only incipient fault detection but also incipient real-time diagnosis.

• Bulletin of the Korean Space Science Society
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• 2010.04a
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• pp.25.1-25.1
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• 2010

This talk outlines the current understanding of solar flares, mainly focusing on magnetohydrodynamic (MHD) processes. A flare causes plasma heating, mass ejection, and particle acceleration that generates high-energy particles. The key physical processes related to a flare are: the emergence of magnetic field from the solar interior to the solar atmosphere (flux emergence), formation of current-concentrated areas (current sheets) in the corona, and magnetic reconnection proceeding in current sheets that causes shock heating, mass ejection, and particle acceleration. A flare starts with the dissipation of electric currents in the corona, followed by various dynamic processes which affect lower atmospheres such as the chromosphere and photosphere. In order to understand the physical mechanism for producing a flare, theoretical modeling has been developed, in which numerical simulation is a strong tool reproducing the time-dependent, nonlinear evolution of plasma before and after the onset of a flare. In this talk we review various models of a flare proposed so far, explaining key features of these models. We show observed properties of flares, and then discuss the processes of energy build-up, release, and transport, all of which are responsible for producing a flare. We come to a concluding view that flares are the manifestation of recovering and ejecting processes of a global magnetic flux tube in the solar atmosphere, which was disrupted via interaction with convective plasma while it was rising through the convection zone.

• Journal of the Korean institute of surface engineering
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• v.41 no.5
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• pp.205-213
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• 2008

A 3D particle code is developed to analyze electron behavior in a planar magnetron sputtering cathode either in balanced or unbalanced configuration. Three types of collisions are included; electron - neutral elastic, excitation to a metastable state and ionization. Flight path is calculated by a 4-th order Runge-Kutta method with a time step of 10 ps. Effects of electron starting position, magnetic field intensity and configuration were analyzed. For a more efficient and accurate modeling, multithreading technique is considered for multicore CPU computers. Under an assumption of cold ion approach, target erosion profiles are predicted for a flat target surface.

• Proceedings of the Korean Vacuum Society Conference
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• 2015.08a
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• pp.131.2-131.2
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• 2015

마이크로웨이브를 이용한 플라즈마는 효율적인 전자가열이 가능하며, 낮은 이온에너지를 가지는 고밀도 플라즈마를 생성시킬 수 있다는 장점이 있다. 최근 산화물 반도체 및 대화면 디스플레이 장치내 소자의 보호막 증착용으로 저온 PECVD (Plasma Enhanced Chemical Vapor Deposition) 공정 및 장치의 필요성에 따라 마이크로웨이브를 이용한 PECVD 장치가 주목 받고 있다. 본 연구에서는 실리콘 나이트라이드 공정 장치 개발을 위한 2차원 시뮬레이션 모델을 완성하였다. Global modeling을 이용하여 확보한 Chemical reaction data에 대한 검증을 하였다. Maxwell's equation, continuity equation, electromagnetic wave equation 등을 이용하여 Microwave의 파워 및 압력에 따른 전자 밀도, 전자 온도등의 플라즈마 변수의 변화를 관찰하였다. 또한 Navier Stokes equation을 추가하여 챔버 내의 Gas flow의 흐름을 고려한 시뮬레이션을 진행하여 분석하였다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2013.05a
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• pp.60-60
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• 2013

공정용 플라즈마는 반도체 웨이퍼 가공, 평판형 디스플레이, 자동차 및 산업용 부품 코팅, 장식용 코팅에 널리 사용되고 있다. 이를 위한 장비 개발은 플라즈마에 대한 깊은 이해가 없이는 불가능하여 주로 선진 장비 회사의 모델을 참고하여 유사하게 만드는 수준에서 진행되어 왔는데 2D, 3D modeling이 가능한 전산 유체 모델은 일부 상용화 패키지 S/W까지 등장하였으나 플라즈마와 수치 해석에 대한 기본적인 지식이 없이는 사용이 매우 어렵다는 단점이 있어 국내의 일부소자회사의 장비 관련 연구팀 정도에서만 사용이 가능했다. 이를 중견 장비 업체들에 까지 확대하기 위한 작업의 일환으로 2D-ICP, 2D-CCP model의 기본적인 기능을 갖추고 기하적 크기는 파라미터 방식으로 사용자가 조절할 수 있도록 만든 framework을 개발하려는 시도에 대해서 논의 하고자 한다.