Browse > Article
http://dx.doi.org/10.5695/JKISE.2010.43.6.304

Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED  

Hong, Kwang-Ki (Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University)
Yang, Won-Kyun (Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University)
Joo, Jung-Hoon (Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University)
Lee, Seung-Ho (JUSUNG Engineering Co.)
Lee, Tae-Wan (JUSUNG Engineering Co.)
Publication Information
Journal of the Korean institute of surface engineering / v.43, no.6, 2010 , pp. 304-308 More about this Journal
Abstract
Deposition temperature uniformity of GaN based MQW (multiple quantum well) layers is an important key which affects the wavelength uniformity of white LEDs. Temperature uniformity was assessed by infrared images for both cases of a static and a rotating susceptor. Rotating the susceptor at 2.5 rpm over the induction heater gave 4.3% of temperature non-uniformity. Temperature distribution of the graphite susceptor over the induction heater was numerically modelled and agreed with experimental results.
Keywords
Induction heating; Substrate temperature uniformity; Substrate rotating; CFD-ACE+; Numerical modeling;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 H. Y. Shin, S. H. Jung, J. B. Yoo, S. J. Suh, C. W. Yang, J. Kor. Inst. Surf. Eng., 36(2) (2003) 135.   과학기술학회마을
2 B. P. Keller, S. Keller, D. Kapolnek, W.-N. Jiang, Y.-F. Wu, H. Masui, X. Wu, B. Heying, J. S. Speck, U. K. Mishra, S. P. Denbaars, J. Electrnon. Mat., 24(11) (1995) 1707.   DOI
3 E. Woelk, H. Beneking, J. Crystal Growth, 93 (1988) 216.   DOI
4 B. P. Keller, S. Keller, D. Kapolnek, W.-N. Jiang, Y.-F. Wu, H. Masui, X. Wu, B. Heying, J. S. Speck, U. K. Mishra, S. P. Denbaars, J. Electrnon. Mat., 24(11) (1995) 1707.   DOI
5 경원테크 user conference (2009) 202.
6 I. G. Kwak, J. K. Byun, K. Choi, S. Y Hahn, Trans. KIEE, 49B(5) (2000) 327.
7 Y. S. Yang, K. Y. Bae, H. Y. Shin, J. of KWJS, 26(4) (2008) 367.
8 유승희, 박병욱, 대한전기학회 하계학술대회 논문집 (2002) 1037.
9 W. K. Yang, J. H. Joo, Y. W. Kim, B. J. Lee, J. Korean Vac. Soc., 19(1) (2010) 46.
10 백재상, 부진효, 한전건, 김윤제, 춘계학술대회 논문집 (2007) 76.
11 K. Chang, M. S. Kwon, S. I. Cho, J. Korean Vac. Soc., 12(4) (2005) 222.