Study of Temperature Uniformity Improvement of Inductive Heating in MOCVD Systems to Deposit White LED |
Hong, Kwang-Ki
(Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University)
Yang, Won-Kyun (Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University) Joo, Jung-Hoon (Department of Materials Science and Engineering, Plasma Materials Research Center, Kunsan National University) Lee, Seung-Ho (JUSUNG Engineering Co.) Lee, Tae-Wan (JUSUNG Engineering Co.) |
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