Electrical and Optical Characteristics of Inductively Coupled Plasma by Ar Gas Pressure and Rf Power (Ar 가스 압력과 RF 전력에 따른 유도결합형 플라즈마의 전기적 및 광학적 특성)
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- Journal of the Korean Institute of Electrical and Electronic Material Engineers
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- v.17 no.5
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- pp.560-566
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- 2004