• 한국재료학회:학술대회논문집
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• 한국재료학회 2009년도 춘계학술발표대회
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• pp.39.1-39.1
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• 2009

본 실험은 연성과 광 투명도가 뛰어난 아크릴 (PMMA) 과 폴리카보네이트 (Polycabonate) 기판의 축전 결합형 플라즈마 (CCP) 건식 식각 연구에 관한 것이다. 특히 식각 반응기 내부의 압력 변화에 따른 두 기판의 건식 식각 특성 분석에 초점을 맞추었다. 실험에 사용된 기판은 두께 1mm의 아크릴 (PMMA) 과 폴리카보네이트 (Polycabonate)를 $1.5\times1.5\;cm^2$로 절단하여 Photo-lithography 공정을 통하여 감광제 (Photo-resist)로 패턴하였다. 식각 반응기 내부에 패턴 된 아크릴(PMMA) 과 폴리카보네이트 (Polycabonate)를 넣은 후 반응기 내부 진공 상태로 만들었다. 그 후 5 sccm $O_2$ 가스를 유량조절기 (Mass flow controller)를 통하여 식각 반응기 내부로 유입하여 실험을 하였다. 이때 식각 공정 변수는 식각 반응기 내부 압력과 샘플 척 파워이다. 특성평가 항목은 식각 후 기판 (Substrate)의 식각율 (Etch rate), 식각 선택비 (Selectivity) 그리고 기판 표면 거칠기 (RMS roughness)이다. 실험 결과는 표면 단차 분석기(Surface profiler)를 이용하여 기판 (Substrate)의 표면을 분석 하였다. 또한 OES (Optical Emission Spectroscopy) 를 이용하여 식각 중 내부 플라즈마의 상태를 분석하였다. 본 실험 결과에 따르면 5 sccm $O_2$ 가스와 100 W 척 파워를 고정한 후 반응기 내부의 압력을 25 mTorr에서 180 mTorr까지 변화시켜 실험한 결과 40 mTorr의 반응기 내부 압력에서 실험 자료 중 가장 높은 식각율로 아크릴 (PMMA)은 $0.46\;{\mu}m/min$, 폴리카보네이트 (Polycabonate)는 $0.28\;{\mu}m/min$의 결과를 얻었다. 또한 이 자료를 바탕으로 5 sccm $O_2$ 가스와 반응기 내부 압력을 40 mTorr로 고정시키고 RIE 척 파워를 25 W에서 150 W로 증가시켰을 때 아크릴 (PMMA)의 식각율은 $0.15\;{\mu}m/min$에서 $0.72\;{\mu}m/min$까지 증가하였고, 폴리카보네이트 (Polycabonate) 의 식각율은 $0.1\;{\mu}m/min$에서 $0.36\;{\mu}m/min$까지 증가하였다.

• 한국진공학회지
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• 제6권2호
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• pp.103-108
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• 1997

본 연구에서는 2단계 실리콘 건식식각 공정과 게이트 절연막으로 열산화막과 tetraethylorthosilicate(TEOS) 산화막의 이중막을 사용하고, 스핀-온-그래스 (Spin-on-glass:SOG) 에치백(etch-back) 공정에 의하여 게이트를 제작하는 새로운 방법을 통하여 실리콘 전계방출소자를 제작하고 그 특성을 분석하였다. 게이트 절연막의 누설전류 를 감소시키면서 팁과 게이트의 간격을 줄이는 구조인 이중 게이트 절연막을 형성하기 위하 여 팁 첨예화 산화 공정후 낮은 점도의 감광막(photo resist)을 시료에 도포한 후, $O_2$ 플라 즈마 에싱(ashing)하는 공정을 채택하였다. 이러한 공정으로 제작된 에미터 팁의 높이와 팁 반경은 각각 1.1$\mu\textrm{m}$와 100$\AA$정도이었으며, 256개 팁 어레이에서 전계방출의 문턱전압은 40V 이하이었다. 60V의 게이트전압에서 23$\mu\textrm{A}$(즉, 90nA/팁)의 높은 아노드 전류를 얻을 수 있었 다. 이때, 게이트 전류는 아노드전류의 약0.1%이하였다. 개발된 공정기술로 게이트 개구도 크게 감소시켰을 뿐 아니라, 게이트 누설전류를 현저히 감소시켰다.

• 대한치과기공학회지
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• 제34권3호
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• pp.237-245
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• 2012

Purpose: This study was conducted to evaluate the corrosion resistance of metal ions of alloys and use the results as the dental health data. These were performed by examining the corrosion levels of Co-Cr alloys for the full and removable partial denture metal frameworks and porcelain-fused-to-metal crown, among the dental casting nonprecious alloys. Methods: The alloy specimens (N = 10) were manufactured in $15mm{\times}10mm{\times}1.2mm$ and stored in two types of corrosive solutions at $37^{\circ}C$ for seven days. The metal ions were quantitatively analyzed using the Inductively Coupled Plasma-Atomic Emission Spectrometer. Results: Of the three Co-Cr alloys, the Co ion concentration of the porcelain-fused-to-metal alloy was 1.512 ${\mu}g/cm^2$, which indicated the highest metal ion dissolution. The metal corrosion was higher in the more acidic pH 2.2 solution compared with the pH 4.4 solution. In all three Co-Cr alloys, Co ion dissolution was predominant in the two corrosive solutions. Conclusion: The corrosion resistance of the three Co-Cr alloys was high, indicating a good biocompatibility.

• Journal of Electrochemical Science and Technology
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• 제9권1호
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• pp.60-68
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• 2018

In aqueous rechargeable lithium ion batteries, $LiV_3O_8$ exhibits obviously enhanced electrochemical performance after $AlF_3$ surface modification owing to improved surface stability to fragile aqueous electrolyte. The cycle life of $LiV_3O_8$ is significantly enhanced by the presence of an $AlF_3$ coating at an optimal content of 1 wt.%. The results of powder X-ray diffraction, energy dispersive X-ray spectroscopy, X-ray photoelectron spectroscopy, inductively coupled plasma-optical emission spectrometry, and galvanostatic charge-discharge measurements confirm that the electrochemical improvement can be attributed mainly to the presence of $AlF_3$ on the surface of $LiV_3O_8$. Furthermore, the $AlF_3$ coating significantly reduces vanadium ion dissolution and surface failure by stabilizing the surface of the $LiV_3O_8$ in an aqueous electrolyte solution. The results suggest that the $AlF_3$ coating can prevent the formation of unfavorable side reaction components and facilitate lithium ion diffusion, leading to reduced surface resistance and improved surface stability compared to bare $LiV_3O_8$ and affording enhanced electrochemical performance in aqueous electrolyte solutions.

• Preventive Nutrition and Food Science
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• 제18권3호
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• pp.214-217
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• 2013

Twenty-nine Korean wheat cultivars were analyzed for 8 important minerals (Cu, Fe, Mn, Zn, Ca, K, Mg and P) using Inductively Coupled Plasma Atomic Emission Spectrometry (ICP-AES). A hierarchical cluster analysis (HCA) was applied to classify wheat cultivars, which has a similarity in mineral compositions. The concentration ranges of the micro-minerals Cu, Fe, Mn, and Zn: 0.12~0.71 mg/100 g, 2.89~5.89 mg/100 g, 1.65~4.48 mg/100 g, and 2.58~6.68 mg/100 g, respectively. The content ranges of the macro-minerals Ca, K, Mg and P: 31.3~46.3 mg/100 g, 288.2~383.3 mg/100 g, 113.6~168.6 mg/100 g, and 286.2~416.5 mg/100 g, respectively. The HCA grouped 6 clusters from all wheat samples and a significant variance was observed in the mineral composition of each group. Among the 6 clusters, the second group was high in Fe and Ca, whereas the fourth group had high Cu, Mn and K concentrations; the fifth cluster was high in Zn, Mg and P. The variation in mineral compositions in Korean wheat cultivars can be used in the wheat breeding program to develop a new wheat cultivar with high mineral content, thus to improve the nutritional profile of wheat grains.

• Carbon letters
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• 제18권
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• pp.49-55
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• 2016

Refuse-derived fuel (RDF) produced using municipal solid waste was pyrolyzed to produce RDF char. For the first time, the RDF char was used to remove aqueous copper, a representative heavy metal water pollutant. Activation of the RDF char using steam and KOH treatments was performed to change the specific surface area, pore volume, and the metal cation quantity of the char. N₂ sorption, Inductively Coupled Plasma-Atomic Emission Spectrometer (ICP-AES), and Fourier transform infrared spectroscopy were used to characterize the char. The optimum pH for copper removal was shown to be 5.5, and the steam-treated char displayed the best copper removal capability. Ion exchange between copper ions and alkali/alkaline metal cations was the most important mechanism of copper removal by RDF char, followed by adsorption on functional groups existing on the char surface. The copper adsorption behavior was represented well by a pseudo-second-order kinetics model and the Langmuir isotherm. The maximum copper removal capacity was determined to be 38.17 mg/g, which is larger than those of other low-cost char adsorbents reported previously.

• 전기학회논문지
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• 제60권2호
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• pp.357-361
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• 2011

The terminal current in voltage driven systems is an essential role for characterizing the pattern of electric discharge such as corona, breakdown, etc. Until now, to evaluate this terminal current, Sato's equation has been widely used in areas of high voltage and plasma discharge. Basically Sato's equation was derived by using the energy balance equation and its final form described physical meaning explicitly. To give more general abilities in Sato's equation, we present a generalized approach by directly using the Poynting's theorem incorporating the finite element method. When the magnetic field effect or the time-dependent voltage source is considered, this generalized energy method can be easily applicable to those problems with any dielectric media such as gas, fluid, and solid. As an alternative approach, the integral Ohm's law resulting in small numerical errors has an ability to be applied to multi-port systems. To test the generalized energy method and integral Ohm's law, first, the results from two prosed methods were compared to those from Sato's approach and an analytic solution in parallel plane electrodes. After verification, the generalized method was applied to the tip-sphere electrodes for evaluating the terminal current with three carriers and the Fowler-Nordheim field emission condition. From these results, we concluded that the generalized energy method can be a consistent technique for evaluating the discharge current with various dielectric materials or large magnetic field.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1574-1576
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• 2003

Carbon nanotubes (CNTs) were grown on the TiN-coated silicon substrate with different thickness of Ni and Co catalysts layer at $600^{\circ}C$ using inductively coupled plasma-chemical vapor deposition (ICP-CVD). The Ni and Co catalysts were formed using the RF magnetron sputtering system with various deposition times. It was found that the growth of CNTs was strongly influenced by the surface morphology of Ni and Co catalysts. With increasing deposition time, the thickness of catalysts increased and the grain boundary size of catalysts increased. The surface morphology of catalysts and CNTs were elucidated by SEM. The Raman spectrum further confirmed the graphitic structure of the CNTs. The turn-on field of CNTs grown on Ni and Co catalysts was about 2.7V/pm and 1.9V/pm respectively. Field emission current density of CNTs grown on Ni and Co catalysts was measured as $11.67mA/cm^2$ at $5.5V/{\mu}m$ and $1.5mA/cm^2$ at $5.5V/{\mu}m$ respectively.

• 분석과학
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• 제10권1호
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• pp.35-42
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• 1997

Barium titanate 및 PZT와 같은 세라믹 축전물질의 분석을 위해 고압 산분해법을 이용한 시료 전처리 기술을 연구하였다. 질산이나 증류수를 첨가하고 염산의 농도를 변화시키면서, 이들 시료의 정량분석을 유도결합 플라즈마 방출분광법에 의해 수행하였다. 분석 결과를 보면 Ba, Mn, Zn, Si 등 대부분의 원소들은 염산의 농도에 영향을 받지 않으나, Nb와 Zr은 이에 민감한 것으로 밝혀졌다. 그러나 분해시간은 상대적으로 분석 결과에 거의 영향을 미치지 않았다. Nb의 경우에는 가장 좋은 분석 결과를 얻기 위해 염산과 증류수의 비가 3:1(v / v) 보다는 더 진해야 함을 알았다. 또한 Pb의 분석에 있어서 염산과 질산의 혼산을 사용하는 경우보다 붉은 염산만을 사용하였을 경우에 더 좋은 분석 결과를 나타내었다.

• Nutrition Research and Practice
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• 제11권1호
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• pp.64-69
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• 2017

BACKGROUND/OBJECTIVES: This study was performed to measure fat-soluble vitamins and minerals in breast milk of Korean lactating mothers who exclusively breastfed their babies. SUBJECTS/METHODS: Breast milk samples were collected from 334 mothers. Concentrations of retinol and ${\alpha}$-tocopherol were analyzed by high performance liquid chromatography ultraviolet spectrometry while concentrations of minerals were measured by inductively coupled plasma optical emission spectrometry. RESULTS: Retinol and ${\alpha}$-tocopherol contents of breast milk were $39.58{\pm}19.64{\mu}g/dL$ and $0.23{\pm}0.13mg/dL$, respectively. Average sodium, potassium, calcium, phosphorus, and magnesium levels in breast milk were $11.11{\pm}5.16$, $38.56{\pm}9.01$, $27.87{\pm}6.10$, $13.56{\pm}3.30$, and $3.05{\pm}0.65mg/dL$, respectively. Contents of trace elements such as iron, zinc, copper, and manganese were $40.26{\pm}46.21$, $98.40{\pm}62.47$, $24.09{\pm}9.03$, and $0.90{\pm}1.63{\mu}g/dL$, respectively. Fat-soluble vitamin concentration was positively correlated with total fat in milk samples, but no significant differences were observed in levels of retinol, ${\alpha}$-tocopherol, or minerals based on whether or not lactating women were taking dietary supplements. CONCLUSIONS: Micronutrient contents of breast milk samples from Korean lactating women were comparable to those of other nations. Retinol and ${\alpha}$-tocopherol levels were correlated and also with total fat in breast milk.