• Title/Summary/Keyword: Plasma corrosion

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Effects of Process Parameters on Corrosion Properties of PEO Coatings Formed on Al Alloy (공정변수에 따라 Al 합금 상에 형성된 PEO 코팅층의 내식성 평가)

  • Lee, Jeong-Hyeong;Kim, Seong-Jong
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2018.06a
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    • pp.139-139
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    • 2018
  • 최근 자동차 산업을 중심으로 한 수송용 기기의 경량화 추세에 따라 대표적인 경량금속 소재인 알루미늄 합금에 대한 수요가 증가하고 있으며 이에 따라 알루미늄 합금 표면에 다양한 특성을 부여할 수 있는 표면개질 기술에 대한 필요성이 부각되고 있다. 알루미늄 합금의 대표적인 표면처리기술인 아노다이징과 유사한 원리로 표면에 세라믹 코팅층을 형성할 수 있는 기술인 플라즈마 전해 산화(Plasma electrolytic oxidation, PEO)가 주목을 받고 있다. PEO 코팅법은 전해액 내에 소재를 침지시키고 400 ~ 600V에 이르는 고전압을 인가시켜 마이크로 방전을 유도하여 표면에 치밀한 세라믹 층을 형성시키는 기술이다. 본 연구에서는 PEO법으로 표면 개질된 Al 합금 표면의 표면 조직 특성과 전기화학 특성을 평가하고, 코팅층 특성에 미치는 공정 변수의 영향을 분석하고자 하였다. PEO 처리를 위해 사용된 소재는 상용 Al 합금 판재(Al 5083-O)로서 $2cm{\times}2cm$로 절단하여, 에머리페이퍼로 1000번까지 연마하여 사용하였다. 시험을 위한 PEO 처리 시스템은 전해액 수조, 일정 온도 유지를 위한 열교환기와 칠러, 전원 발생을 위한 전원공급기(power supply)로 구성되었다. 전해액은 약 알칼리 수용액을 이용하였으며, 전원 공급기를 통해 시험편에 펄스 전류를 인가하였다. PEO 처리 후 시편에 대하여 SEM, EDS, XRD 등을 이용한 표면 특성 평가를 실시하였다. 또한 코팅층의 전기화학적 부식 특성 평가를 위해 해수용액에서 동전위분극실험을 실시하였다. 시험 결과, Al 합금의 PEO 처리 시 내식성은 개선되는 것으로 확인되었으며, 공정변수는 표면의 미세조직 및 전기화학적 특성에 큰 영향을 미치는 것으로 나타났다.

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Study on the Adhesion of Diamond Like Carbon Films Using the Linear Ion Source with Nitriding Layers (Linear Ion Source에 의해 증착된 Diamond-Like Carbon(DLC) 박막의 질화층 형성에 따른 밀착력 특성 연구)

  • Shin, Chang-Seouk;Park, Min-Seok;Kwon, Ah-Ram;Kim, Seung-Jin;Chung, Won-Sub
    • Journal of the Korean institute of surface engineering
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    • v.44 no.5
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    • pp.190-195
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    • 2011
  • Diamond-like carbon (DLC) has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion on the metal substrates because of weak bonding between DLC film and the metal substrate. The purpose of this study is to enhance an adhesion of DLC film. For improving adhesion, the substrate was treated by active screen plasma nitriding before DLC film deposing. Nitrided substrates were investigated by Glow Discharge Spectrometer (GDS), Micro-Vickers Hardness. DLC films were deposited on several metals by linear ion source, and characteristics of the films were investigated using nano-indentation, Field Emission Scanning Electron Microscope (FESEM). The adhesion was measured by scratch tester. The adhesion of DLC films was increased when nitriding layer was formed before DLC deposition. Therefore, the adhesion of DLC film can be enhanced as increasing the hardness of materials.

Technical trend of Plasma Nitriding Process and Its main applications (플라즈마 질화 기술의 현황 및 주요응용분야)

  • Park, Hyeon-Jun;Mun, Gyeong-Il
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2014.11a
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    • pp.29-29
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    • 2014
  • 최근 화석에너지 고갈 및 에너지 수요의 폭발적 팽창을 해결하기 위하여 경량화와 내마모 측면에서 고효율 시스템을 적용한 자동차 및 각종 성형 기기들이 개발되고 있다. 특히 장치의 고성능화라는 요구조건을 충족시키기 위해서는 금속가공산업에서 표면개질의 중요성이 부각되고 있다. 이러한 표면개질에는 일반적으로 표면의 성질을 개선하여 마모(abrasion) 및 국부 압력(local stress) 또는 피로(fatigue), 마식(wear and corrosion)에 견디게 하여 부품의 수명증대와 제품의 소형화에 기여하고 있다. 이러한 표면개질법에는 경질의 물질을 표면에 코팅시켜 재료표면의 특성을 향상시키는 방법과 금속의 표면에 다른 원소를 침투 및 확산시키는 방법으로 나눌 수 있다. 확산방법으로 침탄, 질화, 보로나이징, 크마이징 처리 방법 등이 있다. 상업적으로 가장 많이 사용되는 표면 개질법은 침탄기술로서, 고온에서 짧은 시간내에 물성 향상이 가능하지만, 강의 변태점 이상의 온도에서 진행됨으로서, 변형에 따른 문제가 발생되어 후처리를 필요로 하는 문제점을 가지고 있다. 반면, 질화법은 변태점 이하의 저온에서 철강 표면에 N을 침투시켜 강을 경화시키는 특징을 가진다. 변형이 적고 질소원자가 강내에 침투함으로 인해 내마모성, 내피로성, 내식성 등의 물리적 성질을 향상시키는 점에서 유리하여 각종 정밀 부품 및 자동차 부품, 금형 등에 많이 사용된다. 또한, 경도 향상 및 결정구조의 영향으로 코팅처리시 모재와 코팅 층의 밀착력 향상을 가져오면 이러한 이유로 코팅 층의 하지 층으로써 각광 받고 있다. 본 발표에서는 플라즈마 질화의 이해를 높이기 위해 관련 기술에 대한 전반적인 소개와 향후 플라즈마 질화 기술의 적용이 기대되는 침탄대체 적용 가능 부품, 침류질화 기술, PECVD 공정과의 접목 등 산업적은 응용 측면에서 응용 분야에 대한 소개를 진행하고자 한다.

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Changing PEO coating formation on Mg alloys by particle additions to the treatment electrolyte

  • Blawert, Carsten;Srinivasan, Bala;Liang, Jun;Huang, Yuanding;Hoche, Daniel;Scharnagl, Nico;Heitmann, Volker;Burmester, Ulrich
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 2012.11a
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    • pp.7-11
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    • 2012
  • Plasma electrolytic oxidation of magnesium alloys is a well known technique to produce corrosion and wear resistant coatings. The addition of particles to the electrolyte provides a possibility to produce coatings with an increasing range of composition by in-situ incorporation of those particles into the coating. An extensive literature review has revealed that the mode of incorporation depends mainly on the melting point of the used particles and the energy provided by the discharges of the PEO process. The spectrum ranges from inert to partly reactive incorporation, but a complete reactive incorporation and a formation of a new single phase coating was not observed so far. Thus a new approach in PEO processing is introduced using specific particles as a kind of sintering additive, changing not only the composition but lowering the melting temperature and increase the liquid phase fraction during the discharges, resulting in a new amorphous coating.

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Microstructure and Properties of Yttria Film Prepared by Aerosol Deposition (에어로졸 데포지션에 의한 이트리아 필름의 미세구조와 특성)

  • Lee, Byung-Kuk;Park, Dong-Soo;Yoon, Woon-Ha;Ryu, Jung-Ho;Hahn, Byung-Dong;Choi, Jong-Jin
    • Journal of the Korean Ceramic Society
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    • v.46 no.5
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    • pp.441-446
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    • 2009
  • Dense crack-free yttria film with 10 $\mu m$ thickness was prepared on aluminum by aerosol deposition. X-ray diffraction pattern on the film showed that it contained the same crystalline phase as the raw powder. Transmission electron microscopy revealed a nanostructured yttria film with grains smaller than 100 nm. Tensile adhesion strength between the film and aluminum substrate was 57.8 $\pm$ 6.3MPa. According to the etching test with $CF_4-O_2$ plasma, the etching rate of the yttria film was 1/100 that of quartz, 1/10 that of sintered alumina and comparable to that of sintered yttria.

Application of Computational Fluid Dynamic Simulation to SiC CVD Reactor for Mass Production (대량 생산용 SiC CVD 리엑터에의 전산유체역학 시뮬레이션의 적용)

  • Seo, Jin-Won;Choi, Kyoon
    • Journal of the Korean Ceramic Society
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    • v.50 no.6
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    • pp.533-538
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    • 2013
  • Silicon carbide (SiC) materials are typical ceramic materials with a wide range of uses due to their high hardness and strength and oxidation resistance. In particular, due to the corrosion resistance of the material against acids and bases including the chemical resistance against ionic gases such as plasma, the application of SiC has been expanded to extreme environments. In the SiC deposition process, where chemical vapor deposition (CVD) technology is used, the reactions between the raw gases containing Si and C sources occur from gas phase to solid phases; thus, the merit of the CVD technology is that it can provide high purity SiC in relatively low temperatures in comparison with other fabrication methods. However, the product yield rarely reaches 50% due to the difficulty in performing uniform and dense deposition. In this study, using a computational fluid dynamics (CFD) simulation, the gas velocity inside the reactor and the concentration change in the gas phase during the SiC CVD manufacturing process are calculated with respect to the gas velocity and rotational speed of the stage where the deposition articles are located.

A study on the high temperature properties of CoNiCrAlY coating fabricated by HVOF and LPPS process (LPPS용사법과 HVOF 용사법으로 제조된 CoNiCrAlY 코팅의 고온물성에 관한 연구)

  • 강현욱;권현옥;송요승
    • Journal of the Korean institute of surface engineering
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    • v.34 no.2
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    • pp.161-168
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    • 2001
  • A Thermal Barrier Coating (TBC) can play an important role in protecting parts from harmful environments at high temperatures such as oxidation, corrosion, and wear in order to improve the efficiency of aircraft engines by lowering the surface temperature of the turbine blade. The TBC can increase the life span of the product and improve the operating properties. Therefore, in this study the mechanical and thermal properties of the TBC such as oxidation, fatigue and shock at high temperatures were evaluated. A samples of a bond coat (CoNiCrAlY) produced by the High Velocity Oxygen Fuel (HVOF) and Low Pressure Plasma Spray (LPPS) method were used. The thickness of the HVOF coating layer was approximately $450\mu\textrm{m}$ to 500$\mu\textrm{m}$ and the hardness number of the coating layer was between 350Hv and 400Hv. The thickness of the LPPS coating was about 350$\mu\textrm{m}$ to 400$\mu\textrm{m}$ and the hardness number of the coating was about 370Hv to 420Hv. The X-ray diffraction analysis showed that CoNiCrAlY coating layer of the HVOF and LPPS was composed of the $\beta$and ${\gamma}$phase. After the high temperature oxidation test, the oxide scale with about l0$\mu\textrm{m}$ to 20$\mu\textrm{m}$ thickness appeared at the coating surface on the Al-depleted zone was observed under the oxide scale layer.

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Fabrication and Evaluation of the Al-STS-Cu Functionally Graded Materials (알루미늄-스테인레스스틸-구리 경사기능재료의 제조 및 특성평가)

  • Kwangjae Park;Dasom Kim;Hansang Kwon
    • Composites Research
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    • v.36 no.4
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    • pp.241-245
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    • 2023
  • Aluminum (Al) and copper(Cu) are non-ferrous alloys with excellent electrical and thermal conductivity but have relatively lower mechanical properties than iron alloys. Stainless steel(STS), an iron alloy, is a high-strength industrial material due to its excellent mechanical properties and corrosion resistance compared to non-ferrous Al and Cu. In this research combined Al, Cu, and STS to fabricate as a functionally graded material (FGM) through a powder metallurgical process. The produced FGM exhibited lightweight and excellent surface hardness compared to copper and iron alloys and also showed higher thermal conductivity than single Al and STS materials.

A Study on Corrosion according to Distance between Amalgam and Dissimilar Metals (아말감과 이종(異種)금속의 거리에 따른 부식에 대한 고찰)

  • Kim, Ju-won;Jeong, Eun-gyeong
    • Journal of dental hygiene science
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    • v.4 no.3
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    • pp.103-109
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    • 2004
  • The present study prepared 72 test samples - 24 made of amalgam alloy, 24 of Verabond (Ni-Cr alloy) for crown and 24 of Talladium $^{TM}alloy$ for denture - according to the manufacturers' manuals and general method in consideration of the width of the mesial-distal dental crown of the lower $1^{st}$ molar and MOD cavity in clinics, put them in a 200 ml beaker containing 80 ml of artificial saliva, and measured their galvanic corrosion at distances of 0 mm, 7 mm and 40 mm after 7 days. Isolated metals in the electrolyte such as Cu, Ag, Ni, Cr, Sn, Zn and Hg were quantitatively analyzed with Inductively Coupled Plasma - Atomic Emission Spectrometer (ICP-AES, JY-50P, VG Elemental Co. France), and from the results were drawn conclusions as follows. First, Cu, Sn, Ag, Hg and Zn were highly advantageous when amalgam contacted gold alloy compared to Ni-Cr alloy for crown and Talladium alloy for denture. In addition, although gold alloy was finest in terms of oral tissue and biocompatibility, it was most disadvantageous when it was with amalgam. Second, when amalgam contacted gold alloy, heavy metals such as Ni and Cr were not isolated at all because gold alloy did not contain such elements but Sn was isolated as much as $227.1{\pm}18.0035{\mu}g/cm^2$ although it was not included in the composition either. Hg was also isolated. These elements are assumed to have been isolated from amalgam itself. Third, when amalgam alloy was apart from gold alloy 0 mm, 7 mm and 40 mm, Cu and Ag showed significance but Hg did not. This suggests that gold alloy must not be used together with amalgam, and must not be used between dissimilar prostheses regardless of distance. Fourth, when amalgam alloy contacted Ni-Cr alloy for crown, Ag was not isolated from the amalgam, but Zn, Ni, Sn, Hg and Cu were isolated in order of quantity. Significance was observed according to distance - 0 mm, 7 mm and 40 mm. Hg was not isolated but heavy metals Ni and Cr were isolated. If amalgam alloy was in the opposite arch or it was apart from Ni-Cr alloy for crown, the isolation Hg was less than that when amalgam alloy contacted Ni-Cr alloy for crown. Fifth, when amalgam alloy contacted Talladium alloy for denture, significance was observed at distances of 0mm, 7 mm and 40 mm. Hg was not isolated but heavy metals Ni and Cr were isolated. If amalgam alloy was in the opposite arch or it was apart from Talladium alloy for denture, the isolation Hg was less than that when amalgam alloy contacted Talladium alloy for denture. Sixth, according to the result of ICPES test on Cu, Sn, Ag, Hg, Zn, Ni and Cr of amalgam alloy, gold ally, Verabond and Talladium alloy when these alloys contacted artificial saliva, significance was observed in Cu and Hg. Seventh, when amalgam alloy contracted two non-precious metals Ni-Cr alloy for crown and Talladium alloy for denture in artificial saliva, significance was observed in the isolated by-products of Hg, Ni and Cr according to distance.

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Electrochemical Characterization of Anti-Corrosion Film Coated Metal Conditioner Surfaces for Tungsten CMP Applications (텅스텐 화학적-기계적 연마 공정에서 부식방지막이 증착된 금속 컨디셔너 표면의 전기화학적 특성평가)

  • Cho, Byoung-Jun;Kwon, Tae-Young;Kim, Hyuk-Min;Venkatesh, Prasanna;Park, Moon-Seok;Park, Jin-Goo
    • Journal of the Microelectronics and Packaging Society
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    • v.19 no.1
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    • pp.61-66
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    • 2012
  • Chemical Mechanical Planarization (CMP) is a polishing process used in the microelectronic fabrication industries to achieve a globally planar wafer surface for the manufacturing of integrated circuits. Pad conditioning plays an important role in the CMP process to maintain a material removal rate (MRR) and its uniformity. For metal CMP process, highly acidic slurry containing strong oxidizer is being used. It would affect the conditioner surface which normally made of metal such as Nickel and its alloy. If conditioner surface is corroded, diamonds on the conditioner surface would be fallen out from the surface. Because of this phenomenon, not only life time of conditioners is decreased, but also more scratches are generated. To protect the conditioners from corrosion, thin organic film deposition on the metal surface is suggested without requiring current conditioner manufacturing process. To prepare the anti-corrosion film on metal conditioner surface, vapor SAM (self-assembled monolayer) and FC (Fluorocarbon) -CVD (SRN-504, Sorona, Korea) films were prepared on both nickel and nickel alloy surfaces. Vapor SAM method was used for SAM deposition using both Dodecanethiol (DT) and Perfluoroctyltrichloro silane (FOTS). FC films were prepared in different thickness of 10 nm, 50 nm and 100 nm on conditioner surfaces. Electrochemical analysis such as potentiodynamic polarization and impedance, and contact angle measurements were carried out to evaluate the coating characteristics. Impedance data was analyzed by an electrical equivalent circuit model. The observed contact angle is higher than 90o after thin film deposition, which confirms that the coatings deposited on the surfaces are densely packed. The results of potentiodynamic polarization and the impedance show that modified surfaces have better performance than bare metal surfaces which could be applied to increase the life time and reliability of conditioner during W CMP.