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http://dx.doi.org/10.5695/JKISE.2011.44.5.190

Study on the Adhesion of Diamond Like Carbon Films Using the Linear Ion Source with Nitriding Layers  

Shin, Chang-Seouk (Pusan National University)
Park, Min-Seok (Korea Institute of Industrial Technology)
Kwon, Ah-Ram (Korea Institute of Industrial Technology)
Kim, Seung-Jin (Korea Institute of Industrial Technology)
Chung, Won-Sub (Pusan National University)
Publication Information
Journal of the Korean institute of surface engineering / v.44, no.5, 2011 , pp. 190-195 More about this Journal
Abstract
Diamond-like carbon (DLC) has many outstanding properties such as low friction, high wear resistance and corrosion resistance. However, it is difficult to achieve enough adhesion on the metal substrates because of weak bonding between DLC film and the metal substrate. The purpose of this study is to enhance an adhesion of DLC film. For improving adhesion, the substrate was treated by active screen plasma nitriding before DLC film deposing. Nitrided substrates were investigated by Glow Discharge Spectrometer (GDS), Micro-Vickers Hardness. DLC films were deposited on several metals by linear ion source, and characteristics of the films were investigated using nano-indentation, Field Emission Scanning Electron Microscope (FESEM). The adhesion was measured by scratch tester. The adhesion of DLC films was increased when nitriding layer was formed before DLC deposition. Therefore, the adhesion of DLC film can be enhanced as increasing the hardness of materials.
Keywords
Adhesion; DLC film; Nitriding; Hardness; Linear ion source;
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