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http://dx.doi.org/10.4191/KCERS.2009.46.5.441

Microstructure and Properties of Yttria Film Prepared by Aerosol Deposition  

Lee, Byung-Kuk (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
Park, Dong-Soo (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
Yoon, Woon-Ha (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
Ryu, Jung-Ho (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
Hahn, Byung-Dong (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
Choi, Jong-Jin (Functional Ceramic Materials Research Group, Functional Materials Division, Korea Institute of Materials Science)
Publication Information
Journal of the Korean Ceramic Society / v.46, no.5, 2009 , pp. 441-446 More about this Journal
Abstract
Dense crack-free yttria film with 10 $\mu m$ thickness was prepared on aluminum by aerosol deposition. X-ray diffraction pattern on the film showed that it contained the same crystalline phase as the raw powder. Transmission electron microscopy revealed a nanostructured yttria film with grains smaller than 100 nm. Tensile adhesion strength between the film and aluminum substrate was 57.8 $\pm$ 6.3MPa. According to the etching test with $CF_4-O_2$ plasma, the etching rate of the yttria film was 1/100 that of quartz, 1/10 that of sintered alumina and comparable to that of sintered yttria.
Keywords
Microstructure; Corrosion resistance; Thick film; Adhesion;
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