• Journal of the Korean Vacuum Society
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• v.20 no.4
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• pp.258-265
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• 2011

A zero-dimensional global model simulator for atmospheric pressure oxygen plasmas has been developed. The simulation model considers the configurations similar to that of plasma needle device. The simulation results show that those species of O, $O_3$, $O_2*$ and ${O_2}^+$ have the highest density in sequence. Electrons dissipate most of their energy through the collisions with oxygen molecules. If the input power increases, the density of most species also increases as much as three-boy collision for the creation of ozone is weakened and hence the density of ozone decreases. The body to volume ratio also affects the plasma density.

• Explosives and Blasting
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• v.17 no.2
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• pp.19-35
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• 1999

Rock fragmentation with plasma blasting technique has advantageous properties in contrast to the conventional blasting method controlling of flying rocks and ground vibrations, when residents are complaining or surrounding structures stay in protection from blasting operations. The experiences show in urban construction works that the plasma blasting is the most possible method to prevent damages and minimize adverse environmental impacts. The fragmentation energy level is evaluated by numerical simulation using PFC for various drill hole patterns and tested accordingly to get the feasibility. The energy output of plasma blasting system has been improved to a level of 1 MJ, which can break a 2-3 ㎥ granite boulder or 1.5m height bench face. Measurements are carried out to get the ground vibration level and propagation equation, so that control of the blasting operations can be performed more precisely and safely.

• Tunnel and Underground Space
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• v.7 no.4
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• pp.267-273
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• 1997

Rock fragmentation with plasma blasting technique has advantageous properties in contrast to the conventional blasting method in controlling of flying rocks and ground vibrations, when residents are complaining or surrounding structures stay in protection from blasting operations. The experiences show in urban construction works that the plasma blasting is the most possible method to prevent damages and minimize adverse environmnetal impacts. The fragmentation energy level is evaluated by numerical simulation using PFC-2D for various drill hole pattern and tested accordingly to get the feasibility. The energy output of plasma blasting system has been improved to a level of 1 MJ, which can break a 2~3 ㎥ granite boulder or 1.5 m height bench face. Measurements are carried out to get the ground vibration level and propagation equation, so that the control of the blasting operations can be performed more precisely and safely.

• Explosives and Blasting
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• v.17 no.1
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• pp.19-26
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• 1999

Rock fragmentation with plasma blasting technique has advantageous properties in contrast to the conventional blasting method in controlling of flying rocks and ground vibrations when residents are complaining or surrounding structures stay in protection from blasting operations. The experiences show in urban construction works that the plasma blasting is the most possible method to prevent damages and minimize adverse environmental impacts. The fragmentation energy level is evaluated by numerical simulation using PFC for various drill hole pattern and tested accordingly to get the feasibility. The energy output of plasma blasting system has been improved to a level of 1 MJ, which can break a $2-3m^3$ granite boulder or 1.5m height bench face. Measurements are carried out to get the ground vibration level and propagation equation. So that the control of the blasting operations can be performed more precisely and safely.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.2
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• pp.39-43
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• 2008

Atmospheric pressure plasma polishing (APPP) is a noncontact precision machining technology that uses low temperature plasma chemical reactions to perform atom-scale material removal. APPP is a complicated process, which is affected by many factors. Through a preliminary theoretical analysis and simulation, we confirmed that some of the key factors are the radio frequency (RF) power, the working distance, and the gas ratio. We studied the influence of the RF power and gas ratio on the removal rate using atomic emission spectroscopy, and determined the removal profiles in actual operation using a commercial form talysurf. The experimental results agreed closely with the theoretical simulations and confirmed the effect of the working distance. Finally, we determined the element compositions of the machined surfaces under different gas ratios using X-ray photoelectron spectroscopy to study the influence of the gas ratio in more detail. We achieved a surface roughness of Ra 0.6 nm on silicon wafers with a peak removal rate of approximately 32 $mm^{3}$/min.

• Current Optics and Photonics
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• v.1 no.5
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• pp.544-550
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• 2017

This simulation based study reports a novel tunable, compact, room temperature terahertz (THz) transistor source, operated on the concept of charge plasma oscillation with the capability of radiating within a terahertz gap. A vertical cavity with a quasi-periodic distributed-Bragg-reflector has been attached to a THz plasma wave transistor to achieve a monochromatic coherent surface emission for single as well as multi-color operation. The resonance frequency has been tuned from 0.5 to 1.5 THz with the variable quality factor of the optical cavity from 5 to 290 and slope efficiency maximized to 11. The proposed surface emitting terahertz transistor is able to satisfy the demand for compact solid state terahertz sources in the field of teratronics. The proposed device can be integrated with Si CMOS technology and has opened the way towards the development of silicon photonics.

• The Transactions of the Korean Institute of Electrical Engineers P
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• v.61 no.3
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• pp.116-121
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• 2012

Recently, in the field of renewable energy such as solar cells including the semiconductor and display industries, thin film deposition process is being diversified. Furthermore, to deal with trend of making high-quality and fast, the high-capacity and output plasma power supply which can control high density plasma is required. The biggest problem is arc discharge caused by using high voltage power supply. Thus, the key function of plasma power supply is to prevent arc discharge and there is a need to maintain the possible minimum arc energy. In DC sputtering power supply, on a periodic basis (-)voltage powering up is able to significantly reduce arcing, as well as arc discharge prevention, and maintaining uniform charge density. This conventional method for powering up (-)voltage requires heavy mutual inductance of the transformer to avoid distortion problem of the output voltage. This study is about energy recovery circuit for arc discharge prevention in sputtering plasma power supply. By using energy recovery circuit, it is possible to reduce the mutual inductance and size of the transformer dramatically, prevent distortion of the output voltage and has a stable output waveform. This work was proved through simulation and experimental study.

• 한국전산유체공학회:학술대회논문집
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• 2005.10a
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• pp.311-317
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• 2005

It has been the most progressive interruption technique to use the ablation gas from the surface of PTFE nozzle driven by arc plasma during switching process in $SF_6$ gas circuit breakers. This advanced interruption technique can reduce the required mechanical energy to compress and blow the gas for extinguishing the arc plasma between the electrodes due to using the ablation effect instead. In order to consider the phenomena during calculation of switching process, it is required to confirm the principles of ablation from PTFE nozzle as well as of arc plasma during switching process. In this study, we have calculated the switching process considered the ablation of PTFE nozzle driven by arc plasma using multidisciplinary simulation technique and compared the results with the data without the ablation effect. More $50\%$ difference of pressure rise inside expansion chamber has been found from the results and it should be indispensable for this type of computational work to consider and include the ablation effect of PTFE nozzle. Further study on turbulence and radiation will be followed.

• KIEE International Transactions on Electrophysics and Applications
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• v.2C no.5
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• pp.246-252
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• 2002

Two-dimensional steady state simulations of planar type radio frequency inductively coupled plasma (RFICP) have been performed. The characteristics of RFICP were investigated in terms of power transfer efficiency, equivalent circuit analysis, spatial distribution of plasma density and electron temperature. Plasma density and electron temperature were determined from the equations of ambipolar diffusion and energy conservation. Joule heating, ionization, excitation and elastic collision loss were included as the source terms of the electron energy equation. The electromagnetic field was calculated from the vector potential formulation of ampere's law. The peak electron temperature decreases from about 4eV to 2eV as pressure increases from 5 mTorr to 100 mTorr. The peak density increases with increasing pressure. Electron temperatures at the center of the chamber are almost independent of input power and electron densities linearly increase with power level. The results agree well with theoretical analysis and experimental results. A single turn, edge feeding antenna configuration shows better density uniformity than a four-turn antenna system at relatively low pressure conditions. The thickness of the dielectric window should be minimized to reduce power loss. The equivalent resistance of the system increases with both power and pressure, which reflects the improvement of power transfer efficiency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.1147-1150
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• 2003

The RF inductive discharge or inductively coupled plasma (ICP) continues to attract growing attention as an effective plasma source in many industrial applications, the best known of which are plasma processing and lighting technology Although most practical ICPs operate at 13.56 (MHz) and 2.65 (MHz), the trend to reduce the operating frequency is clearly recognizable from recent ICP developments. In an electrodeless fluorescent lamp, the use of a lower operating frequency simplifies and reduces cost of rf matching systems and rf generators and can eliminate capacitive coupling between the inductor coil and plasma, which could be a strong factor in wall erosion and plasma contamination. In this study, the configuration of ferrite and fixture which operates at the frequency of 2.65 (MHz) will be discussed, by using the electromagnetic simulation (Maxwell 2D).