• Title/Summary/Keyword: Planar Substrate

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Effects of Substrate Temperature on the Properties Sputtered Fe Films Epitaxially Grown on Mgo(001) (기판온도가 MgO(001) 기판위에서 에피택시성장한 Fe스파터박막의 특성에 미치는 영향)

  • 김동우;장평우;김원태;유성초
    • Journal of the Korean Magnetics Society
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    • v.9 no.4
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    • pp.184-189
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    • 1999
  • 1000 $\AA$ thick Fe films were epitaxially grown on MgO(001) by an rf sputtering and effects of substrate temperature on the structural and magnetic properties were investigated. X-ray diffraction intensity increased with increasing substrate temperature and inter-planar spacing $d_{(002)}$ decrease with increasing the temperature up to 25$0^{\circ}C$. The increased intensity and decreased inter-planar spacing were thought to be attributed to the enhancement of lattice match between Fe films and MgO, thus yielding good epitaxial growth. By using torque magnetometer, VSM and pole figure, very nice epitaxial growth of sputtered Fe films on MgO could be confirmed and $K_1$ value of Fe films grown at 25$0^{\circ}C$ was $4.6{\times}10^5\;erg/cc$, which was very similar to that of bulk single Fe crystal.

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Fabrication of low power micro-heater for micro-gas sensor II. Characteristics of micro-gas sensor

  • Chung, Wan-Young;Lee, Sang-Moon;Kang, Bong-Hwi;Jang, Dong-Kun;Lee, Duk-Dong;Yamazoe, Noboru
    • Journal of Sensor Science and Technology
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    • v.6 no.3
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    • pp.237-244
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    • 1997
  • A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/$Si_{3}N_{4}$(800nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also.

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Design for Trapezoidal Planar UWB Antenna Using Symmetry Meander Feedline (대칭 미앤더 급전 선로를 이용한 사다리꼴 평면 UWB 안테나 설계)

  • Kim, Tae-Geun;Min, Kyeong-Sik
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.20 no.8
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    • pp.739-745
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    • 2009
  • This paper presents a design for trapezoidal planar UWB(Ultra Wide-band) antenna using symmetry meander line to realize broad bandwidth at low frequency region. The size of proposed design antenna is $15.5{\times}21{\times}1.6mm^3$ and dielectric substrate considered in design has 4.4 of relative permittivity. The calculated bandwidth is from 1.31 GHz to 10.83 GHz and the measured return loss is 1.5 GHz to 10.6 GHz at -10 dB below, and satisfies with the UWB antenna's bandwidth. The simulated and measured radiation patterns show fine agreement with each other at each frequency.

A Study on the Planar Sleeve Monopole Antenna for Digital TV Reception (디지털 TV 수신을 위한 평면 슬리브 모노폴 안테나에 관한 연구)

  • Lee, Yun Min;Lee, Sin Hee;Kang, Sang Won
    • Journal of Korea Society of Digital Industry and Information Management
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    • v.10 no.2
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    • pp.21-27
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    • 2014
  • In this paper, a planar sleeve monopole antenna for indoor digital TV reception is presented. The antenna has broadband property with the planar monopole and ground of sleeve. Sleeve monopole and ground conductors of the antenna are on the same plane, and exited through CPW feeding. Sleeve monopole and ground of proposed antenna exist on coplanar plane, and excite as CPW. It used FR4 epoxy dielectric substrate of ${\varepsilon}r=4.4$, and the size is $20[mm]{\times}170[mm]{\times}1.6[mm]$ dimension. So the internal antenna is suitable. The measurement results of the fabricated antenna, return loss is larger than -10 [dB] in 470~806 [MHz]. Maximum gain is 0.59 [dBi] on E-plane at 810 MHz and 1.70 [dBi] on H-plane at 640 [MHz]. Radiation pattern is about the same that of dipole antenna at all frequency.

Fabrication of a Optical Planar Waveguide Lens by Ti-Indiffused Proton-Exchange (Ti 내부확산/양자교환(TIPE)방식에 의한 평면 광도파로 렌즈의 제작)

  • 정석문;최성식;윤태훈;김재창
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.17 no.4
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    • pp.371-378
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    • 1992
  • In this paper we report the fabrication of a planar optical wavehuide lens on a Y-cut LiNbO3 substrate by Ti_indiffusion and Ti-indiffused proton-exchange(TIPE). LiNbo3 planar waveguides are fabricated and refractive indices of the waveguides are fabricated and refractive indices of the waveguides are measured. Based on the measured indices, palanr waveguide lenses are designed and fabricated. The measured focal point and spot size of the fabricated lens are in good agreement with those of the designed lens.

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Squeeze Film Damping of Perforated Planar Microstructures (기판에 수직으로 진동하는 다공 평판 미소구조물의 공기감쇠)

  • Kim, Eung-Sam;Jo, Yeong-Ho;Kim, Mun-Eon
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.49 no.1
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    • pp.64-69
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    • 2000
  • This paper investigates the equeeze film damping of a perforated planar micromechanical structure that oscillates in the normal direction to the substrate. Special focus has been places on the effect of holes and edges of the perforated planar microstructures on the squeeze film damping of oscillatory motions. Theoretical models and test structures of the squeeze film damping have been developed for the transversely oscillating perforated plates. A set of nine different test structures, having three different sized with three different numbers of perforations, has been fabricated and tested. The experimental Q-factors, measured from the fabricated test structures, are compared with the theoretical values, estimated from finite element analysis. It is found that the finite element analysis overestimates the Q-factors up to 150% of the experimental values. Major discrepancy comes from the inaccuracy of the zero pressure condition, placed by the finite element analysis along the perforated edges.

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Characteristics of Catalytic Combustible Gas Sensor Based on Planar Technology (평탄형 접촉 연소식 가스 센서의 특성)

  • Kim, Yeong-Bok;Noh, Hyo-Sub;Park, Jin-Seong
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.21 no.9
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    • pp.812-817
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    • 2008
  • A catalytic combustible sensor for LPG/LNG detection was fabricated on $Al_2O_3$ substrate using planar technology. The catalysts of Pd and Pt were added to ${\alpha}$- and ${\gamma}-Al_2O_3$ powders. The mixture of Pt, Pd and $Al_2O_3$ were homogenized by using a three roll mixer. TCR characteristics of Pt heater were optimized with the heat treatment temperature. Sensing properties were investigated as a function of the microstructure of $Al_2O_3$, the gas concentration and the variation of input voltage. ${\alpha}-Al_2O_3$ sintered at 500 $^{\circ}C$ is more suitable as LPG/LNG sensor due to good grain shape and size distribution of about 300 nm than that of ${\gamma}-Al_2O_3$ which is in irregular shape and with a particle size of 5-30 ${\mu}m$. The sensor has shown maximum output voltage of 14 mV for 1000 ppm $C_4H_{10}$ and 3.8 mV for 1000 ppm $CH_4$ at 5.0 V input voltage.

A Study on Notched Wi-Fi Bandwidth of Planar Monopole Antenna with Edge (에지를 가진 평면 모노폴 안테나의 무선랜 대역 저지에 관한 연구)

  • Lee, Yun Min;Lee, Jae Choon
    • Journal of Korea Society of Digital Industry and Information Management
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    • v.9 no.4
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    • pp.43-49
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    • 2013
  • In this paper, it is designed inverted triangle structural planar monopole antenna with edge and rectangle slot for UWB(Ultra Wide Band) communication (3.1~10.6 GHz) and researched in about 5.8 GHz notch structure to prevent interference between UWB systems and existing wireless systems for using Wi-Fi service. The antenna have broadband property structurally through inverted triangle structural planar monopole which have edge. and rectangle form addition planned notch slot of 1 mm and height 0.1 mm. Monopole and ground of proposed antenna exist on coplanar plane, and excite as CPW. It used FR4 epoxy dielectric substrate of ${\varepsilon}r$=4.4, and the size is $20{\times}20{\times}1.6$ mm dimension. The measured results that are obtained return loss under -10 dB through 3.1~10.6 GHz(7.5 GHz) without Wi-Fi bandwidth and maximum gain of 8.44 dBi at E-plane. Radiation pattern is about the same that of dipole antenna at all frequency. And using notch slot and it will be able to confirm the quality which becomes notch from 5.8 GHz which are a radio LAN frequency range.

Design and Fabrication of Small UWB Antenna (소형 UWB 안테나 설계 및 제작)

  • Bae, Jin-Woo;Ko, Ji-Hwan;Cho, Young-Ki
    • Proceedings of the Korea Electromagnetic Engineering Society Conference
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    • 2005.11a
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    • pp.221-224
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    • 2005
  • In this paper, We have designed, fabricated and measured a stacked planar antenna for Ultra-Wideband communication. Radiation parts of the antenna have exponential curve and fed by strip feeding network. We have used the HFSS of Ansoft to simulate the antenna. It was designed to work on a substrate Teflon of thickness 1.575mm and relative permittivity 3.2. The proposed antenna covered the entire UWB band( 3.1GHz $\sim$ 10.6GHz ) for S11$\leq$l0dB. Also the proposed antenna show a good characteristics, linear phase, omni -directional pattern lot UWB applications. Besides the measured results have a reasonable agreement with the simulated results.

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A SIW Fed Antipodal Linear Tapered Slot Planar Multi-Beam Antenna for Millimeter-Wave Application

  • Zhang, Yingsong;Hong, Wei;Kuai, Zhenqi
    • Journal of electromagnetic engineering and science
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    • v.10 no.3
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    • pp.175-178
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    • 2010
  • In this paper, a millimeter-wave multi-beam antenna is studied by rotating the antipodal linear tapered slot antenna(ALTSA) with respect to a center is successfully designed. In order to lowering the SLL and enhancing the isolation between the ALTSA elements, a row of metallic via is inserted between the ALTSAs. A 9 beams antenna is designed and experimented at Ka band. The measured and simulated results agree well with each other. The antenna can provide horizontal wide angle coverage up to ${\pm}62^{\circ}$. The gain of each beam can achieve about 12.5 dB. The mutual coupling between ports is all below 20 dB.