• 제목/요약/키워드: Planar Substrate

검색결과 280건 처리시간 0.027초

기판온도가 MgO(001) 기판위에서 에피택시성장한 Fe스파터박막의 특성에 미치는 영향 (Effects of Substrate Temperature on the Properties Sputtered Fe Films Epitaxially Grown on Mgo(001))

  • 김동우;장평우;김원태;유성초
    • 한국자기학회지
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    • 제9권4호
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    • pp.184-189
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    • 1999
  • 두께 1000$\AA$ 인 순철박막을 MgO(001)기판위에 rf 스파터링방법으로 에피택시성장시킨 후 기판의 온도가 박막의 결정학적, 자기적 특성에 미치는 영향을 토크마그네토미터, VSM 그리고 pole figure 등으로 주사하였다. X-선 회절 실험에서 기판온도가 증가할수록 (002)회절선의 회절강도가 증가하였다. 그러나 면간거리 d(002)은 25$0^{\circ}C$까지는 감소하였으나 30$0^{\circ}C$에서는 증가하였다. 회절강도의 증가와 면간거리의 감소는 순철박막과 기판과의 격자정합의 향상에 기인하는 것으로 생각되었으며 따라서 기판온도가 높을수록 좋은 에티택시박막을 얻을 수 있었다. 25$0^{\circ}C$에서 성장한 두께 1100$\AA$의 순철박막의 결정이방성상수 K1은 4.6$\times$105erg/cc로 벌크 단결정순철과 유사한 값을 가지고 있었다.

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Fabrication of low power micro-heater for micro-gas sensor II. Characteristics of micro-gas sensor

  • 정완영;이상문;강봉휘;장동근;이덕동;노보루 야마조애
    • 센서학회지
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    • 제6권3호
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    • pp.237-244
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    • 1997
  • A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/$Si_{3}N_{4}$(800nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also.

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대칭 미앤더 급전 선로를 이용한 사다리꼴 평면 UWB 안테나 설계 (Design for Trapezoidal Planar UWB Antenna Using Symmetry Meander Feedline)

  • 김태근;민경식
    • 한국전자파학회논문지
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    • 제20권8호
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    • pp.739-745
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    • 2009
  • 이 논문은 저주파수 영역에서 광대역을 실현하기 위해 대칭형 미앤더 급전 선로를 이용한 사다리꼴 평면 UWB 안테나의 설계를 제안한다. 제안된 설계 안테나의 크기는 $15.5{\times}2.1{\times}1.6mm^3$이며, 설계에 고려된 유전체는 4.4의 복소 비유전율을 가진다. 계산된 대역폭은 9.52 GHz($1.31{\sim}10.83$ GHz)이고, 측정된 대역폭은 반사 손실 -10 dB 이하에서 9.1 GHz($1.5{\sim}10.6$ GHz)이며, 이 대역은 UWB 안테나 대역폭을 만족한다. 또한, 시뮬레이션상 복사 패턴과 측정 패턴이 각각의 주파수에서 서로 잘 일치하는 것을 보여주고 있다.

디지털 TV 수신을 위한 평면 슬리브 모노폴 안테나에 관한 연구 (A Study on the Planar Sleeve Monopole Antenna for Digital TV Reception)

  • 이윤민;이신희;강상원
    • 디지털산업정보학회논문지
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    • 제10권2호
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    • pp.21-27
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    • 2014
  • In this paper, a planar sleeve monopole antenna for indoor digital TV reception is presented. The antenna has broadband property with the planar monopole and ground of sleeve. Sleeve monopole and ground conductors of the antenna are on the same plane, and exited through CPW feeding. Sleeve monopole and ground of proposed antenna exist on coplanar plane, and excite as CPW. It used FR4 epoxy dielectric substrate of ${\varepsilon}r=4.4$, and the size is $20[mm]{\times}170[mm]{\times}1.6[mm]$ dimension. So the internal antenna is suitable. The measurement results of the fabricated antenna, return loss is larger than -10 [dB] in 470~806 [MHz]. Maximum gain is 0.59 [dBi] on E-plane at 810 MHz and 1.70 [dBi] on H-plane at 640 [MHz]. Radiation pattern is about the same that of dipole antenna at all frequency.

Ti 내부확산/양자교환(TIPE)방식에 의한 평면 광도파로 렌즈의 제작 (Fabrication of a Optical Planar Waveguide Lens by Ti-Indiffused Proton-Exchange)

  • 정석문;최성식;윤태훈;김재창
    • 한국통신학회논문지
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    • 제17권4호
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    • pp.371-378
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    • 1992
  • 본 논문에서는 Y-cut $LiNbO_3$ 기판 위에 TIPE 방식을 이용하여 평면 광도파로 렌즈를 제작하고 그 특성을 측정하였다. Ti 내부확산 평면광도파로 및 TIPE 평면 광도파로 제작하고, 프리즘 결합으로 굴절율을 측정하였다. 측정한 기본파 유효굴절율로부터 평면 광도파로 렌즈의 궤적을 구하여, 사진식각법과 lift-off기법을 이용하여 TIPE 평면 광도파로 렌즈를 제작하였다. 도파로를 따라 도파되던 광이 평면 광도파로 렌즈에 의하여 접속되는 현상을 관측하였고 측정한 결과와 컴퓨터 시뮬레이션의 결과가 잘 일치함을 알 수 있었다. 관측한 초점의 위치 및 크기가 설계한 값과 잘 일치하였다.

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기판에 수직으로 진동하는 다공 평판 미소구조물의 공기감쇠 (Squeeze Film Damping of Perforated Planar Microstructures)

  • 김응삼;조영호;김문언
    • 대한전기학회논문지:전기물성ㆍ응용부문C
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    • 제49권1호
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    • pp.64-69
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    • 2000
  • This paper investigates the equeeze film damping of a perforated planar micromechanical structure that oscillates in the normal direction to the substrate. Special focus has been places on the effect of holes and edges of the perforated planar microstructures on the squeeze film damping of oscillatory motions. Theoretical models and test structures of the squeeze film damping have been developed for the transversely oscillating perforated plates. A set of nine different test structures, having three different sized with three different numbers of perforations, has been fabricated and tested. The experimental Q-factors, measured from the fabricated test structures, are compared with the theoretical values, estimated from finite element analysis. It is found that the finite element analysis overestimates the Q-factors up to 150% of the experimental values. Major discrepancy comes from the inaccuracy of the zero pressure condition, placed by the finite element analysis along the perforated edges.

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평탄형 접촉 연소식 가스 센서의 특성 (Characteristics of Catalytic Combustible Gas Sensor Based on Planar Technology)

  • 김영복;노효섭;박진성
    • 한국전기전자재료학회논문지
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    • 제21권9호
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    • pp.812-817
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    • 2008
  • A catalytic combustible sensor for LPG/LNG detection was fabricated on $Al_2O_3$ substrate using planar technology. The catalysts of Pd and Pt were added to ${\alpha}$- and ${\gamma}-Al_2O_3$ powders. The mixture of Pt, Pd and $Al_2O_3$ were homogenized by using a three roll mixer. TCR characteristics of Pt heater were optimized with the heat treatment temperature. Sensing properties were investigated as a function of the microstructure of $Al_2O_3$, the gas concentration and the variation of input voltage. ${\alpha}-Al_2O_3$ sintered at 500 $^{\circ}C$ is more suitable as LPG/LNG sensor due to good grain shape and size distribution of about 300 nm than that of ${\gamma}-Al_2O_3$ which is in irregular shape and with a particle size of 5-30 ${\mu}m$. The sensor has shown maximum output voltage of 14 mV for 1000 ppm $C_4H_{10}$ and 3.8 mV for 1000 ppm $CH_4$ at 5.0 V input voltage.

에지를 가진 평면 모노폴 안테나의 무선랜 대역 저지에 관한 연구 (A Study on Notched Wi-Fi Bandwidth of Planar Monopole Antenna with Edge)

  • 이윤민;이재춘
    • 디지털산업정보학회논문지
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    • 제9권4호
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    • pp.43-49
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    • 2013
  • In this paper, it is designed inverted triangle structural planar monopole antenna with edge and rectangle slot for UWB(Ultra Wide Band) communication (3.1~10.6 GHz) and researched in about 5.8 GHz notch structure to prevent interference between UWB systems and existing wireless systems for using Wi-Fi service. The antenna have broadband property structurally through inverted triangle structural planar monopole which have edge. and rectangle form addition planned notch slot of 1 mm and height 0.1 mm. Monopole and ground of proposed antenna exist on coplanar plane, and excite as CPW. It used FR4 epoxy dielectric substrate of ${\varepsilon}r$=4.4, and the size is $20{\times}20{\times}1.6$ mm dimension. The measured results that are obtained return loss under -10 dB through 3.1~10.6 GHz(7.5 GHz) without Wi-Fi bandwidth and maximum gain of 8.44 dBi at E-plane. Radiation pattern is about the same that of dipole antenna at all frequency. And using notch slot and it will be able to confirm the quality which becomes notch from 5.8 GHz which are a radio LAN frequency range.

소형 UWB 안테나 설계 및 제작 (Design and Fabrication of Small UWB Antenna)

  • 배진우;고지환;조영기
    • 한국전자파학회:학술대회논문집
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    • 한국전자파학회 2005년도 종합학술발표회 논문집 Vol.15 No.1
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    • pp.221-224
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    • 2005
  • In this paper, We have designed, fabricated and measured a stacked planar antenna for Ultra-Wideband communication. Radiation parts of the antenna have exponential curve and fed by strip feeding network. We have used the HFSS of Ansoft to simulate the antenna. It was designed to work on a substrate Teflon of thickness 1.575mm and relative permittivity 3.2. The proposed antenna covered the entire UWB band( 3.1GHz $\sim$ 10.6GHz ) for S11$\leq$l0dB. Also the proposed antenna show a good characteristics, linear phase, omni -directional pattern lot UWB applications. Besides the measured results have a reasonable agreement with the simulated results.

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A SIW Fed Antipodal Linear Tapered Slot Planar Multi-Beam Antenna for Millimeter-Wave Application

  • Zhang, Yingsong;Hong, Wei;Kuai, Zhenqi
    • Journal of electromagnetic engineering and science
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    • 제10권3호
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    • pp.175-178
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    • 2010
  • In this paper, a millimeter-wave multi-beam antenna is studied by rotating the antipodal linear tapered slot antenna(ALTSA) with respect to a center is successfully designed. In order to lowering the SLL and enhancing the isolation between the ALTSA elements, a row of metallic via is inserted between the ALTSAs. A 9 beams antenna is designed and experimented at Ka band. The measured and simulated results agree well with each other. The antenna can provide horizontal wide angle coverage up to ${\pm}62^{\circ}$. The gain of each beam can achieve about 12.5 dB. The mutual coupling between ports is all below 20 dB.