• Composites Research
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• 제22권6호
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• pp.1-6
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• 2009

탄소나노튜브 고분자 복합체는, 외력에 의한 변형에 따라 전기적 저항이 변화하는 피에조저항(piezoresistivity) 거동을 나타낸다. 피에조저항은 고분자 모재 내에서 탄소나노튜브가 형성하는 전기전도망(conductive network)의 변화에 의해서 발현된다. 피에조저항 낮은 탄소나노튜브 함유량에서 더 현저하게 나타난다. 탄소섬유, 카본블랙 등 타 탄소기반 소재에 비해 전기전도도와 길이 대 직경비(aspect ratio)가 월등히 우수하기 때문에, 낮은 탄소나노튜브의 함유량에서도 스트레인 센싱시스템을 구현할 수 있다. 본 연구에서는, 구조물에 부착 또는 임베드 시켜서 구조물의 건전성을 실시간을 진단할 수 있는 탄소나노튜브 고분자 복합체 기반 센싱시스템을 개발하였다. 센서는 열가소성 수지와 다중벽 탄소나노튜브를 사용하여 필름 형태로 제조되었으며, 센싱 성능은 나노복합체를 구조물에 부착한 후 인장, 굽힘, 압축 등의 다양한 형태의 하중을 가하면서 평가하였다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2004년도 하계학술대회 논문집 C
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• pp.1591-1593
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• 2004

압력센서는 몇 가지 센싱 메카니즘을 가지고 있으므로 종류가 다양하고 크기 변에서도 여러 가지가 이용되고 있다. 최근에는 센싱 부분이 작으며 제어부분도 포함되는 ASIC화된 센서 시스템이 개발되고 있다. 여기에 이용되는 대부분의 탄성물질은 힘을 받았을 때 물질 내부의 벌크에서 저항 값이 변화하는 특성을 갖고 있다. 이러한 특성은 피에조 저항률(piezoresistivity)로 언급되며 스트레인 게이지의 감도에 영향을 주는 중요한 요소로 작용한다. 다이어프램으로 금속대선 세라믹을 사용하면 안정성이 우수한 특정을 가칠 수 있으며, 부식성 가스 류 및 화학성분에 대해서 내성이 강하고 환경변화에 따른 변형과 공정의 단순화 등 우수한 특성을 갖고 있는 것이 큰 장점이다. 센싱부는 산화 루세니움($RuO_2$)을 주 성분으로 하는 분말을 Paste화 하여 다이어프램 위에 스크린 프린팅을 하여 기본성능을 나타내었으며 특히, 상품화에서 중요한 일반성능에서는 온도 특성에 대한 Span 과 Offset 그리고 공정의 단순화에 대해서 고찰을 하였다.

• Geomechanics and Engineering
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• 제5권2호
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• pp.87-97
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• 2013

In this paper, a novel fibrous material known as axially reinforced braided composite rods (BCRs) have been developed for reinforcement of soils. These innovative materials consist of an axial reinforcement system, comprised of longitudinally oriented core fibres, which is responsible for mechanical performance and, a braided cover, which gives a ribbed surface texture for better interfacial interactions with soils. BCRs were produced using both thermosetting (unsaturated polyester) and thermoplastic (polypropylene) matrices and synthetic (carbon, glass, HT polyethylene), as well as natural (sisal) core fibres. BCRs were characterized for tensile properties and the influence of core fibres was studied. Moreover, BCRs containing carbon fibre in the core composition were characterized for piezoresistivity and strain sensing properties under flexural deformation. According to the experimental results, the developed braided composites showed tailorable and wide range of mechanical properties, depending on the core fibres and exhibited very good strain sensing behavior.

• 동력기계공학회지
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• 제13권1호
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• pp.65-71
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• 2009

To address the need for new intelligent sensing, this paper introduces nano sensors made of carbon nanotube (CNT) composites and presents their preliminary experiments. Having smart material properties such as piezoresistivity, chemical and bio selectivity, the nano composite can be used as smart electrodes of the nano sensors. The nano composite sensor can detect structural deterioration, chemical contamination and bio signal by means of its impedance measurement (resistance and capacitance). For a structural application, the change of impedance shows specific patterns depending on the structural deterioration and this characteristic is available for an in-situ multi-functional sensor, which can simultaneously detect multi symptoms of the structure. This study is anticipated to develop a new nano sensor detecting multiple symptoms in structural, chemical and bio applications with simple electric circuits.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2006년도 춘계학술대회논문집
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• pp.930-935
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• 2006

To address the need for new intelligent sensing of systems, this study presents a novel strain sensor based on peizoresistivity of carbon nanotube (CNT) and its nanocomposites. Fabrication and characterization of the carbon nanocomposite material are discussed and an electrical model of the CNT strain sensor was derived based on electrochemical impedance spectroscopy analysis and strain testing. The dynamic response of the sensor on a vibrating beam was simulated using numerical analysis and it was compared with experimental test. The simulation showed good agreement with the strain response of the actual sensor.

• 한국마이크로전자및패키징학회:학술대회논문집
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• 한국마이크로전자및패키징학회 2002년도 춘계 기술심포지움 논문집
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• pp.74-78
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• 2002

MEMS공정을 이용하여 폴리실리콘의 piezoresistivity를 이용한 스트레인 센서어레이를 제작하였고, 이 센서 어레이를 flexible substrate에 패키징하는 공정을 개발하였다. 실리콘 웨이퍼에 표면 가공(surface micromachining)된 센서는 폴리이미드 코팅, release-etch 방법을 통해 웨이퍼로부터 분리되어 폴리이미드를 기판으로 하는 flexible sensor array module을 완성할 수 있었다. 공정은 희생층과 절연층을 증착하고 폴리실리콘 0.5 $\mu\textrm{m}$을 증착, 도핑 및 패터닝하여 센서 어레이를 구성하였다. 이 센서어레이를 flexible substrate에 패키징 하기 위해서 폴리이미드를 코팅하여 15 $\mu\textrm{m}$의 막을 구성하였고, 100% $O_2$RIE를 이용한 선택적 식각 방법으로 via hole을 구성하였다. 이후 전기도금을 통해 회로를 구성하여 1단계 패키징(die to chip carrier)과 2단계 패키징(chip to substrate)을 웨이퍼 레벨에서 완성하였다. 희생층을 제거함으로서 웨이퍼로부터 센서어레이 모듈을 분리하였다. 제작되어진 센서 모듈은 임의의 곡면에 실장이 가능하도록 충분한 flexibility를 얻을 수 있었다.

• Smart Structures and Systems
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• 제3권2호
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• pp.133-146
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• 2007

This paper addresses a new type of broad and stage-based hybrid carbon fiber reinforced polymer (HCFRP) sensor that is suitable for the sensing of infrastructures. The HCFRP sensors, a type of composite sensor, are fabricated with three types of carbon tows of different strength and moduli. For all of the specimens, the active materials are carbon tows by virtue of their electrical conductivity and piezoresistivity. The measurement principles are based on the micro- and macro-fractures of different types of carbon tows. A series of experiments are carried out to investigate the sensing performances of the HCFRP sensors. The main variables include the stack order and volume fractions of different types of carbon tows. It is shown that the change in electrical resistance is in direct proportion to the strain/load in low strain ranges. However, the fractional change in electrical resistance (${\Delta}R/R_0$) is smaller than 2% prior to the macrofractures of carbon tows. In order to improve the resistance changes, measures are taken that can enhance the values of ${\Delta}R/R_0$ by more than 2 times during low strain ranges. In high strain ranges, the electrical resistance changes markedly with strain/load in a step-wise manner due to the gradual ruptures of different types of carbon tows at different strain amplitudes. The values of ${\Delta}R/R_0$ due to the fracture of high modulus carbon tows are larger than 36%. Thus, it is demonstrated that the HCFRP sensors have a broad and stage-based sensing capability.

• 한국의류산업학회지
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• 제18권6호
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• pp.733-745
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• 2016

This paper provides a review of wearable textile strain sensors that can measure the deformation of the body surface according to the movements of the wearer. In previous studies, the requirements of textile strain sensors, materials and fabrication methods, as well as the principle of the strain sensing according to sensor structures were understood; furthermore, the factors that affect the sensing performance were critically reviewed and application studies were examined. Textile strain sensors should be able to show piezoresistive effects with consistent resistance-extension in response to the extensional deformations that are repeated when they are worn. Textile strain sensors with piezoresistivity are typically made using conductive yarn knit structures or carbon-based fillers or conducting polymer filler composite materials. For the accuracy and reliability of textile strain sensors, fabrication technologies that would minimize deformation hysteresis should be developed and processes to complement and analyze sensing results based on accurate understanding of the sensors' resistance-strain behavior are necessary. Since light-weighted, flexible, and highly elastic textile strain sensors can be worn by users without any inconvenience so that to enable the users to continuously collect data related to body movements, textile strain sensors are expected to become the core of human interface technologies with a wide range of applications in diverse areas.

• 대한기계학회논문집A
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• 제41권3호
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• pp.187-192
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• 2017

본 논문에서는 탄소나노튜브 전왜성 복합소재(Nano-Carbon Piezoresistive Composite, NCPC)를 기반으로 하며, 3D 프린팅 공정을 활용하여 제작된 압력센서의 개발 진행 연구를 소개하였다. 압력센서의 성능을 향상시키기 위하여 센서전극을 외팔보 형태로 설계하였고 3D 프린팅 공정을 활용하여 소형전극을 제작하였다. 압력을 전기적 저항의 변화로 바꾸는 전왜성 센서의 전극은 2wt%의 다중벽 탄소나노튜브/에폭시 전왜성 복합소재로 제작하였다. 센서는 압력시스템에 용이하게 적용하기 위하여 파이프 플러그 캡에 삽입하여 제작을 하였으며, 실험실 환경에서 압력교정기를 활용하여 실험을 하였다. 외팔보 전극의 압력센서는 16,500kPa까지 선형적인 출력전압 특성을 보였으며, 이는 벌크형 전극의 압력센서 대비 약 200% 압력측정 성능 향상을 보였다.

• 센서학회지
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• 제30권6호
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• pp.388-394
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• 2021

The conventional microelectromechanical system (MEMS) process has been used to fabricate sensors with high costs and high-volume productions. Emerging 3D printing can utilize various materials and quickly fabricate a product using low-cost equipment rather than traditional manufacturing processes. 3D printing also can produce the sensor using various materials and design its sensing structure with freely optimized shapes. Hence, 3D printing is expected to be a new technology that can produce sensors on-site and respond to on-demand demand by combining it with open platform technology. Therefore, this paper reviews three standard 3D printing technologies, such as Fused Deposition Modeling (FDM), Direct Ink Writing (DIW), and Digital Light Processing (DLP), which can apply to the sensor fabrication process. The review focuses on strain/load sensors having both sensing material features and structural features as well. NCPC (Nano Carbon Piezoresistive Composite) is also introduced as a promising 3D material due to its favorable sensing characteristics.