• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.141-144
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• 2003

This study proposes ZnO thin film as a piezoelectric material for SAW (surface acoustic wave) filter. The ZnO thin film with thickness $2.6{\mu}m$ was deposited (0001)-oriented sapphire by RF magnetron sputtering technique. IDTs (inter-digital transducers) electrodes were patterned upon SAW filter mask with solid finger structure unapodized using lift-off method on ZnO piezoelectric thin film. SAW propagation velocity was measured with the center frequency by HP 8753C network analyzer. A fabricated ZnO SAW filter exhibited a high propagation velocity of 5433 $^m/s$ and relatively insertion loss of -53.391dB at $\lambda=80{\mu}m$. The side-lobe attenuation of the center frequency was about 17dB. When the wavelength was $80{\mu}m$ $(\lambda/4=20{\mu}m)$, the center frequency was 67.907 MHz. $k^2$ (electromechanical coupling coefficient) was 15.84 %.

• 센서학회지
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• 제8권5호
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• pp.377-387
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• 1999

결합형 유한요소-경계요소 기법을 사용하여 심해저용 유연형 압전체 쏘나 트랜스듀서를 설계하였다. 쏘나 트랜스듀서의 역학적 구동을 3차원적으로 모델링하였고 전기적 외부 부하 조건을 가지고 분석하였다. 쏘나 트랜스듀서의 정상 상태 변위 모드, 지향성, 공진 주파수, TVR과 같은 결과들을 보였다. 본 논문의 술통 형태의 압전체 쏘나 트랜스듀서를 설계하면서, 심해저용으로 사용하기 위해 쏘나 트랜스듀서의 내외부에 동일한 수압이 가해지도록 쏘나 트랜스듀서의 외부 표면 구조를 새롭게 변형시킨 결과 낮은 주파수의 새로운 공진 모드가 발생하였으나 그 크기는 외부 표면 구조 변형의 정도에 따라 조절될 수 있다.

• 센서학회지
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• 제16권2호
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• pp.120-125
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• 2007

The effect of $MnO_{2}$ as a sintering additive on the microstructures and the piezoelectric properties, especially mechanical quality factor, of 0.05 Pb$(Sb_{0.5}Nb_{0.5})O_{3}$-0.95 Pb$(Zr_{0.52}Ti_{0.48})O_{3}$ (PSN-PZT) piezoelectric ceramics was investigated. The samples were sintered at $1250^{\circ}C$ for 2 h. The crystal structure and surface morphology of the sample were examined using XRD and FE-SEM, respectively. A study on the influence of $MnO_{2}$ additives on the dielectric and piezoelectric properties showed that the $MnO_{2}$-added PSN-PZT system exhibited a high mechanical quality factor and well-situated piezoelectric properties. The optimized results of $d_{33}$ (319 pC/N), $k_{p}$ (55 %), and $Q_{m}$ (751.24) were obtained at 0.2 wt% $MnO_{2}$ added PSN-PZT piezoelectrics.

• 비파괴검사학회지
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• 제35권5호
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• pp.349-357
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• 2015

압전 페인트 센서는 압전 세라믹의 주성분인 압전 파우더와 에폭시의 결합으로 이루어진 페인트형 센서이다. 이 센서는 일반 페인트와 같이 구조물에 도포되기 때문에 다른 어느 센서보다 구조물에 부착이 용이하다. 본 연구에서는 압전 페인트센서가 도포된 구조물의 충격 감지 정도를 판단하고자 하였다. 특히, 철도차량을 대상으로 연구를 진행하고자 하였다. 철도차량 운용 중에 발생하는 자갈 비산으로 인해 발생하는 충격손상이 많이 보고되고 있고, 이러한 충격손상을 방지하고자 차량 하부구조물 전체 표면에 발생하는 충격신호를 실시간으로 감지할 필요가 있다. 철도차량이 운행되는 환경을 고려하여 압전 페인트시편을 $-20{\sim}60^{\circ}C$의 열사이클 환경에 노출시켜 센서의 감도 변화를 측정하였다. 알루미늄 시편에 압전 페인트센서를 도포하여 감도 측정을 수행한 결과, 열사이클 환경 전후에 감도 차이가 크지 않음을 확인하였고 이를 통해 환경 노출 후에도 압전 페인트센서로 충격 감지가 가능함을 확인하였다.

• Structural Engineering and Mechanics
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• 제75권6호
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• pp.747-769
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• 2020

This paper provides a semi-analytical approach to investigate the variations of 3D displacement components, electric potential, stresses, electric displacements and transverse vibration frequencies in laminated piezoelectric composite plates based on the scaled boundary finite element method (SBFEM) and the precise integration algorithm (PIA). The proposed approach can analyze the static and dynamic responses of multilayered piezoelectric plates with any number of laminae, various geometrical shapes, boundary conditions, thickness-to-length ratios and stacking sequences. Only a longitudinal surface of the plate is discretized into 2D elements, which helps to improve the computational efficiency. Comparing with plate theories and other numerical methods, only three displacement components and the electric potential are set as the basic unknown variables and can be represented analytically through the transverse direction. The whole derivation is built upon the three dimensional key equations of elasticity for the piezoelectric materials and no assumptions on the plate kinematics have been taken. By virtue of the equilibrium equations, the constitutive relations and the introduced set of scaled boundary coordinates, three-dimensional governing partial differential equations are converted into the second order ordinary differential matrix equation. Furthermore, aided by the introduced internal nodal force, a first order ordinary differential equation is obtained with its general solution in the form of a matrix exponent. To further improve the accuracy of the matrix exponent in the SBFEM, the PIA is employed to make sure any desired accuracy of the mechanical and electric variables. By virtue of the kinetic energy technique, the global mass matrix of the composite plates constituted by piezoelectric laminae is constructed for the first time based on the SBFEM. Finally, comparisons with the exact solutions and available results are made to confirm the accuracy and effectiveness of the developed methodology. What's more, the effect of boundary conditions, thickness-to-length ratios and stacking sequences of laminae on the distributions of natural frequencies, mechanical and electric fields in laminated piezoelectric composite plates is evaluated.

• 한국분말재료학회지
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• 제28권2호
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• pp.127-133
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• 2021

One-dimensional (1D) piezoelectric nanostructures are attractive candidates for energy generation because of their excellent piezoelectric properties attributed to their high aspect ratios and large surface areas. Vertically grown BaTiO₃ nanotube (NT) arrays on conducting substrates are intensively studied because they can be easily synthesized with excellent uniformity and anisotropic orientation. In this study, we demonstrate the synthesis of 1D BaTiO₃ NT arrays on a conductive Ti substrate by electrochemical anodization and sequential hydrothermal reactions. Subsequently, we explore the effect of hydrothermal reaction conditions on the piezoelectric energy conversion efficiency of the BaTiO₃ NT arrays. Vertically aligned TiO₂ NT arrays, which act as the initial template, are converted into BaTiO₃ NT arrays using hydrothermal reaction with various concentrations of the Ba source and reaction times. To validate the electrical output performance of the BaTiO₃ NT arrays, we measure the electricity generated from each NT array packaged with a conductive metal foil and epoxy under mechanical pushings. The generated output voltage signals from the BaTiO₃ NT arrays increase with increasing concentration of the Ba source and reaction time. These results provide a new strategy for fabricating advanced 1D piezoelectric nanostructures by demonstrating the correlation between hydrothermal reaction conditions and piezoelectric output performance.

• 한국산학기술학회논문지
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• 제3권1호
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• pp.49-57
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• 2002

안전감쇠에 의해 전달 소음을 저감시키는 압전지능패널에 대한 실험적 연구를 수행하였다. 압전지능패널은 기본적으로 압전재료를 부착한 평판 구조물에 션트회로를 연결하고 흡음재들을 부가한 구조물이다. 지능패널은 중 주파수영역에서 흡음재의 수동적 특성을 이용하고 저주파수영역의 공진주파수에서는 압전감쇠를 적용하여 소음저감을 이루는 개념이다. 저주파공진에서의 소음저감을 위하여 측정한 전기적임피던스모델을 이용하는 압선감쇠를 적용하였다. 압전감쇠를 위한 공진 션트회로는 직렬로 연결된 저항과 인넉터로 구성되었으며, 저항과 인덕터는 회로에서 소산되는 에너지가 최대가 될 수 있는 값으로 최적설계하였다. 압전지능패널의 전달 소음저감성능은 음향터널을 사용하여 실험을 수행하였다. 음향터널은 사각단면 형태이며 소음 원으로 터널의 한 쪽 끝에 스피커가 설치되었다. 패널들을 터널의 중앙에 설치하여 투과 음압을 측정하였다. 흡음재를 갖는 지능패널과 흡음재와 공기층을 갖는 압전이중지능패널은 수동적 특성에 의해 저주파영역의 공진주파수를 제외한 중 주파수영역에서 뚜렷한 소음저감 효과를 나타내었다. 압전감쇠를 통하여, 첫 번째 공진주파수에서 약 10dB, 8dB의 소음저감 효과를 얻었다. 압전감쇠와 수동특성을 혼용하는 압전지능패널은 넓은 주파수영역에서의 소음저감을 위한 유망한 기술이다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.447-449
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• 2004

The purpose of this study is measured surface acoustic wave(SAW) characteristics to confirm utilization possibility as SAW sensor using new Pb(Mg$_{1}$3/Nb$_{2}$3/) $O_3$-PbTiO$_3$ (PMN-PT) piezoelectric substrate. We have tried to see if the material can be practically available as a new surface acoustic wave (SAW) biosensor to detect protein. The experimental results clarified that the frequency filtering of the central frequency of the PMN-PT substrate is a superior result to that of the LiTaO$_3$ (LT) substrate, but the result was not completely satisfactory. We know there is a problem in the design of inter-digital transducer (IDT) pattern. The waves transferred through the input terminal forms SAW which is sure to be transferred to the direction of the output terminal and the backward direction of the input terminal. This reflected wave is reiterated with SAW, which is transferred to the output direction, and so the frequency filtering gives a not good result. The electromechanical coupling coefficient of the PMN-PT substrate is excellent, and we can use it as a SAW sensor, in the near future, provided that there will be a new IDT design to increase the frequency filtering.

• 한국정밀공학회지
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• 제33권1호
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• pp.17-22
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• 2016

In smart factories, the entire manufacturing process from design to the final product is simulated in a virtual manufacturing environment and optimized before starting production. Suppliers and customers make decisions based on the simulation results. Therefore, effective rendering of the information of the virtual products to suppliers and customers is essential for this manufacturing paradigm. In this study, a method of rendering the surface roughness of the virtual products using a tactile display is presented. A tactile display device comprising a $3{\times}3$ array of individually controlled piezoelectric stack actuators is constructed. The surface topology of the virtual products is rendered directly by controlling the piezoelectric stack actuators. A series of experiments is performed to evaluate the performance of the tactile display device. An electrical discharge machined surface is rendered using the proposed method.

• 센서학회지
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• 제6권3호
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• pp.180-187
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• 1997

We demonstrate the improvement of sensitivity and analysis of operating characteristics of the piezoelectric pressure sensor using ZnO piezoelectric thin film and FET(field effect transistor) for sensing applied pressure and transforming the pressure into electrical signals, respectively. The sensitivity of the PSFET(pressure sensitive field effect transistor) was improved by using highly-oriented ZnO film perpendicular to the substrate surface and the operating characteristics was investigated by monitoring output voltage with time in various static pressure levels.