• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Transactions on Electrical and Electronic Materials
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• v.11 no.2
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.91-91
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• 2009

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement To solve these problems, we propose a novle type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model is consisted of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for sealing tightly and disk springs for the pressurization of pump body.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.38 no.5
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• pp.567-573
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• 2014

Since the development of microelectromechanical systems (MEMS) technology for the medical field, various micro-fluid transfer systems have been studied. This paper proposes a micro-piezoelectric pump that imitates a stomach's peristalsis by using two separate piezoelectric elements, in contrast to existing micro-pumps. This piezoelectric pump is operated by using the valve-less traveling wave of peristalsis movement. If the piezoelectric plates at the two separated plates are actuated at the input voltage, a traveling wave occurs between the two plates. Then, the fluid migrates by the pressure difference generated by the traveling wave. Finite element analysis was performed to understand the mechanics of the combined system with piezoelectric elements, elastic structures, and fluids. The effects of design variables such as the chamber height and number of ceramics on the flow rate of the fluid were examined.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2010.06a
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• pp.322-322
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• 2010

In this paper, we propose a novel type valveless micro-pump that uses extensional vibration mode of traveling wave as a volume transporting means for solving some problems about check valves, essential parts of usual pumps. The proposed pump consists of two piezoelectric ceramic rings and a metal body located in the middle of them respectively. Because the drift of bended surface that results from the traveling wave excitation controls the fluid flow, check valves are not needed in this pump model. In accordance with the variation of the pump body dimension, we analyzed the vibration displacement characteristics of pump model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its efficiency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• Journal of the Semiconductor & Display Technology
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• v.17 no.4
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• pp.62-65
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• 2018

We will provides a micro-pump infusion injector with the cloud networking for remote control. The existing infusion injector with controlled manually have an uncomfortable to use it inconveniently. The proposed remote control infusion, infusion system enables the identification and control of injected amount through the IOT function on th WEB. The micro-pump used is a piezo electric pump manufactured by using MEMS technology, and the amount of charge is varied depending on the frequency magnitude through the micro-controller. The micro-pump can adjust the speed of the fluid depending on the frequency and can be from 0.1ml / min to 7ml / min when the frequency is from 3 to 110Hz.

• Transactions on Electrical and Electronic Materials
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• v.9 no.5
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• pp.181-185
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• 2008

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring. The pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving parts. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump is about 580 ${\mu}l/min$ in flow rate with the highest pressure level of 0.85 kPa, when the driving voltage is 150 $V_p$, 57 kHz.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.14 no.12
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• pp.994-1000
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• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.