• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.

• Transactions on Electrical and Electronic Materials
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• 제11권2호
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• pp.65-68
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• 2010

The operation principle of a traveling wave rotary type ultrasonic motor can be successfully applied to the fluidic transfer mechanism of the micro-pump. This paper proposes an innovative valveless micro-pump type that uses an extensional vibration mode of a traveling wave as a volume transportation means. The proposed pump consists of coaxial cylindrical shells that join the piezoelectric ceramic ring and metal body, respectively. In order to confirm the actuation mechanism of the proposed pump model, a numerical simulation analysis was implemented. In accordance with the variations in the exciting wave mode and pump body dimension, we analyzed the vibration displacement characteristics of the proposed model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its performance. The maximum flow rate was approximately $595\;{\mu}L/min$ and the highest back pressure was 0.88 kPa at an input voltage of $130\;V_{rms}$. We confirmed that the peristaltic motion of the piezoelectric actuator was effectively applied to the fluid transfer mechanism of the valveless type micro pump throughout this research.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 추계학술대회 논문집
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• pp.91-91
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• 2009

Piezoelectric micro-pump should contain the physical running parts like check valves for acquiring the unilateral motion of fluid from the alternating motion of actuators. But the check valves raise many problems such as abrasion or exhaustive destruction by the recursive mechanical displacement To solve these problems, we propose a novle type piezoelectric valveless micro-pump using peristaltic motion due to the traveling wave excitation. Proposed pump model is consisted of two piezoelectric ceramic plates, elastic metal body, caps for covering flow path, rubber rings for sealing tightly and disk springs for the pressurization of pump body.

• 대한기계학회논문집A
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• 제38권5호
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• pp.567-573
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• 2014

최근에, 의학 분야의 MEMS 기술이 발전하면서 다양한 미세 유체 이송 시스템이 연구되고 있다. 본 논문에서는 기존의 펌프와는 다른, 두 개의 분리된 압전 판을 이용해 위장의 연동 운동을 모방한 마이크로 압전 펌프를 제안한다. 본 펌프는 진행파를 이용해 연동 운동을 일으켜 작동된다. 특히, 압전판에서 인가된 입력 전압에 의해 발생된 변위에 의해 동작된다. 이에 두 판 사이에서 진행파가 일어나며 유체는 진행파에 의해 생성된 압력차에 의해 이동된다. 압전 소자, 탄성체, 유체가 복합된 시스템을 이해하기 위해서 유한 요소 해석을 사용하였다. 챔버의 높이, 세라믹 개수 등의 설계 변수들을 변화시켜 유체의 유량을 확인하였다.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2010년도 하계학술대회 논문집
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• pp.322-322
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• 2010

In this paper, we propose a novel type valveless micro-pump that uses extensional vibration mode of traveling wave as a volume transporting means for solving some problems about check valves, essential parts of usual pumps. The proposed pump consists of two piezoelectric ceramic rings and a metal body located in the middle of them respectively. Because the drift of bended surface that results from the traveling wave excitation controls the fluid flow, check valves are not needed in this pump model. In accordance with the variation of the pump body dimension, we analyzed the vibration displacement characteristics of pump model, determined the optimal design condition, fabricated the prototype pump from the analysis results and evaluated its efficiency.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.185-185
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• 2009

Micropump is very useful component in micro/nano fluidics and bioMEMS applications. Using the flexural vibration mode of PZT bar, a piezopump is successfully made. The PZT bar is polarized with thickness direction. The proposed structure for the piezo-pump consists of an input and an output port, piezoelectric ceramic actuator, actuator support, diaphragm. The traveling flexural wave along the bar is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. Fluid is drawn into a forming chamber, eventually the forming chamber closes trapping the fluid therein. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump the highest pressure level of 83.4kHz.

• 반도체디스플레이기술학회지
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• 제17권4호
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• pp.62-65
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• 2018

We will provides a micro-pump infusion injector with the cloud networking for remote control. The existing infusion injector with controlled manually have an uncomfortable to use it inconveniently. The proposed remote control infusion, infusion system enables the identification and control of injected amount through the IOT function on th WEB. The micro-pump used is a piezo electric pump manufactured by using MEMS technology, and the amount of charge is varied depending on the frequency magnitude through the micro-controller. The micro-pump can adjust the speed of the fluid depending on the frequency and can be from 0.1ml / min to 7ml / min when the frequency is from 3 to 110Hz.

• Transactions on Electrical and Electronic Materials
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• 제9권5호
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• pp.181-185
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• 2008

Using the extensional vibration mode of PZT ring, a piezopump is successfully made. The PZT ring is polarized with thickness direction. The traveling extensional wave along the circumference of the ring is obtained by dividing two standing waves which are temporally and spatially phase shifted by 90 degrees from each other. The proposed piezopump is consisted of coaxial cylindrical shells that are bonded piezoelectric ceramic ring. The pump takes an unobtrusive operation into the simple displacing mechanism using peristaltic traveling waves without the physical moving parts. The finite elements analysis on the proposed pump model is carried out to verify its operation principle and design by the commercial FEM software. Components of piezopump were made, assembled, and tested to validate the concepts of the proposed pump and confirm the simulation results. The performance of the proposed piezopump is about 580 ${\mu}l/min$ in flow rate with the highest pressure level of 0.85 kPa, when the driving voltage is 150 $V_p$, 57 kHz.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 춘계학술대회 논문집
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• pp.229-232
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• 2005

This paper presents the design and fabrication of backflow prevented Micropump using the metal membrane. The Micropump is consisted of the lower plate, metal membrane, upper plate and the piezoelectric-element. The lower plate includes the micro channel and the inlet, outlet of the Micropump. The upper plate includes the micro channel and connects the piezoelectric-element. These plate are fabricated on the Pyrex glass wafer by sandblasting process. The metal membrane does roll of check valve that is prevented backflow of the Micropump. The metal membrane is fabricated on the stainless steel by laser machining. Piezoelectric-element is actuated the Micropump and controlled flowing of fluid. The Micropump is fabricated by bonding process of these multi-layer.

• 한국전기전자재료학회논문지
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• 제14권12호
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• pp.994-1000
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• 2001

In this paper, using micro-stereolithography technology, I fabricated a liquid analyzer to measure ion concentration of a solution. Micro-stereolithography is a technology to fabricate 3-dimensional structure by applying laser beam on liquid photo-polymer. This technology makes it possible to do preassemble fabrication without any extra assembling step after the process. So, the liquid analyzer could be fabricated at very low cost with very simple process by micro-stereolithography technology. The liquid analyzer consists of a chamber for containing the solution, a pump using piezoelectric effect of PZT disk, a static mixer and a sensor for measuring ion concentration using Pt electrodes.