• 제목/요약/키워드: Piezoelectric layer

검색결과 352건 처리시간 0.023초

유리기판에 제작한 ZnO 박막의 c축 배향성에 관한 연구 (A study on the c-axis orientation of ZnO thin film deposited on glass substrates)

  • 고상춘;이종덕;송준태
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 1995년도 추계학술대회 논문집
    • /
    • pp.9-13
    • /
    • 1995
  • In this paper, Zinc Oxide films, with a high degree of c-axis orientation, have been grown on glass substrates by a rf magnetron sputtering. The maximum crystal orientation was found to occur with substrate temperature 150$^{\circ}C$, input power 190W, oxygen rate 50%, target-substrate distance 55mm. It is proposed to achieve high-resistivity ZnO films by increasing the annealing temperature. The piezoelectric layers, preferred oriented with (002) perpendicular to the layer with 4.9$^{\circ}$, could be obtained by the annealing temperature 300$^{\circ}C$ in oxygen atmosphere. It is indicated that the relative permittivity is range from 8.9 to 9.8 in the frequency ranging from 10KHz to 5MHz.

  • PDF

Optical Properties of a ZnO-MgZnO Quantum-Well

  • Ahn, Do-Yeol;Park, Seoung-Hwan
    • JSTS:Journal of Semiconductor Technology and Science
    • /
    • 제6권3호
    • /
    • pp.125-130
    • /
    • 2006
  • The optical gain and the luminescence of a ZnO quantum well with MgZnO barriers is studied theoretically. We calculated the non-Markovian optical gain and the luminescence for the strained-layer wurtzite quantum well taking into account of the excitonic effects. It is predicted that both optical gain and luminescence are enhanced for the ZnO quantum well when compared with those of InGaN-AlGaN quantum well structure due to the significant reduction of the piezoelectric effects in the ZnO-MgZnO systems.

미세 압전 캔틸러버를 이용한 마이크로 폰 및 마이크로 스피커

  • 이승섭
    • 한국정밀공학회:학술대회논문집
    • /
    • 한국정밀공학회 1997년도 춘계학술대회 논문집
    • /
    • pp.347-351
    • /
    • 1997
  • A micromachined piezoelectic cantilever transducer,which works both as a microphone and as a microspeaker,has been fabricated and tested. The 2000*2000*3.mu.m .sap2. cantilever has oxide(ZnO)piezoelectric thin film on a supporting layer of low-pressure chemical-vapor-deposited(LPCVD)low-stress siliconnitride. A highlight of the fabrication process which may also be relevant for other micromachined stuctures is the technique for producing a flat,multilayer cantilever. The measured microphone sensitivity is fairly constant at 2 mV/.mu.bar in the low frequency range and rise to 20 mV/.mu.bar at the lowest resonant frequency of 890 Hz. The 2 mV/.mu.bar sensitivity is the highest report to data for a microphone with a micromachined diaphragm. When measured into a 2 cm/sap3 coupler with 4V (zero-park)drive,the microspeaker output sound pressure level(SPL) is 75 dB at 890 Hz. It increases to approximately 100dB SPL at 4.8kHz with 6V(zero-park)drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation.

압전재료와 점탄성 재료를 이용한 지능 적층보의 하이브리드 진동 제어 (Hybrid vibration control of smart laminated composite beams using piezoelectric and viscoelastic material)

  • 강영규;김재환;최승복
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 2001년도 춘계학술대회논문집
    • /
    • pp.133-137
    • /
    • 2001
  • Active control of flexural vibrations of smart laminated composite beams has been carried out using piezoceramic sensor/actuator and viscoelastic material. The beams with passive constrained-layer damping have been analyzed by formulating the equations of motion through the use of extended Hamilton's principle. The dynamic characteristics such as damping ratio and modal damping of the beam are calculated for various fiber orientations by means of iterative complex eigensolution method, This paper addresses a design strategy of laminated composite under flexural vibrations to design structure with maximum possible damping capacity.

  • PDF

금속-압전세라믹 복합 평판의 진동해석 (The Vibration Analysis for the Metal-Piezoceramic Composite Thin Plates)

  • 고영준;남효덕;장호경
    • 한국음향학회:학술대회논문집
    • /
    • 한국음향학회 1999년도 학술발표대회 논문집 제18권 1호
    • /
    • pp.307-310
    • /
    • 1999
  • An analysis of the free vibration for the metal-piezoceramic composite thin plates is described. The purpose of this study is to develop a equivalent method for the free vibration analysis of metal-piezoceramic composite thin plates which are not symmetrically about the adhered layer and the piezoelectric effect. In order to confirm the validity of the vibration analysis, double Fourier sine series is used as a modal displacement function of a metal-piezoceramic composite thin plate and applied to the free vibration analysis of the plate under various boundary conditions.

  • PDF

고성능 컴퓨팅을 이용한 곡면형 작동기의 최적 설계 (Optimal Design of Curved Actuator through High Performance Computing)

  • 정순완;김승조
    • 한국복합재료학회:학술대회논문집
    • /
    • 한국복합재료학회 2003년도 춘계학술발표대회 논문집
    • /
    • pp.87-90
    • /
    • 2003
  • In this paper, the electromechanical displacements of curved actuators such as THUNDER are calculated by finite element method to design the optimal configuration of curved actuators. To predict the pre-stress in the device due to the mismatch in coefficients of thermal expansion, the adhesive as well as metal and PZT ceramic is also numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers causes the numbers of degree of freedom to increase, large-scale structural analyses are performed in a cluster system in this study. The curved shape and pre-stress in the actuator are obtained by the cured curvature analysis. The displacement under the piezoelectric force by an applied voltage is also calculated to compare the performance of curved actuator. The thickness of metal and adhesive, the number of metal layer are chosen as design factors.

  • PDF

등가화 방법을 이용한 금속;압전 세라믹 적층평판의 진동해석 (The Vibration Analysis of Metal-Piezoceramic Laminated Thin Plates by Using a Equivalent Method)

  • 고영준;남효덕;장호경
    • 한국전기전자재료학회논문지
    • /
    • 제13권1호
    • /
    • pp.39-46
    • /
    • 2000
  • An analysis of the free vibration for the metal-piezoceramic laminated thin plates is described. The purpose of this study is to develop a equivalent method for the free vibration analysis of metal-piezoce-ramic laminated thin plate which are not sysmmetric about the adhered layer and the piezoelectric effect. In order to confirm the validity of the vibration analysis, double Fourier sine series is used as a modal displacement function of a metal-piezoceramic laminated thin plate and applied to the free vibration analysis of the plate under various boundary conditions.

  • PDF

적층 액츄에이터용 아크릴릭계 바인더/압전 세라믹계의 열분해 거동 (Pyrolysis Behavior of Acrylic Binder/Piezoelectric Ceramic System for Multilayer Actuator)

  • 박성의;이전국;정형진
    • 분석과학
    • /
    • 제6권2호
    • /
    • pp.231-238
    • /
    • 1993
  • 적층 액츄에이터에서 바인더의 열적 거동이 액츄에이터의 물성을 좌우하므로 압전-전왜 재료로서 우수한 PNN-PZT/Acrylic binder의 혼합물에서 고분자 열분해 메카니즘과 결합제 번아웃 공정에 영향을 끼치는 요소들을 FTIR, DSC, TGA와 같은 분석기기를 통하여 분석하였다. 결합제는 2단계를 거쳐 번아웃이 되며, 산소 분위기일 경우 열분해가 활발해져서 최종 잔유물이 5% 내외로 최소화되므로 물성이 좋은 액츄에이터를 얻을 수 있다.

  • PDF

다종 재료층으로 구성된 적층판의 열변형 거동 연구 (A Study on thermal deformation behavior of laminates composed of different material layers.)

  • 정재한;구남서;박훈철;윤광준
    • 한국복합재료학회:학술대회논문집
    • /
    • 한국복합재료학회 2000년도 추계학술발표대회 논문집
    • /
    • pp.54-57
    • /
    • 2000
  • Thermal deformation behavior has been investigated for unsymmetric laminates composed of various kinds of material layers, such as stainless steel, aluminum, carbon/epoxy or glass/epoxy. The thermal deformations of unsymmetric laminates were predicted using the classical lamination theory and compared with those obtained from experimental measurement. In the case of unsymmetric laminate composed of stainless steel and aluminum layer, the experimental results were agreed well with the values predicted. But in the case of unsymmetric laminate composed of fiber composite layers, there was a considerable difference of thermal deformation between the prediction and experimental measurement, which may be from the change of material properties of fiber composite layers for temperature variation.

  • PDF

수소 혼합에 따른 덤프 연소기내의 연소 특성에 관한 실험적 연구 (An Experimental Study on the Combustion Characteristics with Hydrogen Enrichment in a Dump Combustor)

  • 김대희;홍정구;신현동
    • 대한기계학회:학술대회논문집
    • /
    • 대한기계학회 2008년도 추계학술대회B
    • /
    • pp.2977-2983
    • /
    • 2008
  • The combustion characteristics of a partially premixed flame in a dump combustor were studied to determine the effects of hydrogen enrichment in propane. Bluff-body was used for flame stabilization. Fuel mixtures containing a hydrogen mole fraction ranging from 0.1 to 0.5 were burnt at ambient pressure within a quartz chamber. Tests were carried out keeping the total reactant flow rate by adjusting the fuel and air flow rates. The fluctuations of pressure were measured by piezoelectric pressure sensor. The instantaneous flame structure and OH chemiluminescence images were described by High-speed Intensified Charged Coupled Device (HICCD) camera and Intensified Charged Coupled Device (ICCD) camera. The present results show that hydrogen enrichment in fuel changed the location of primary reaction zone from inner recirculation zone to turbulent shear layer and pressure signal. The reason is that chemical aspects take precedence over flow aspects in the hydrogen-enriched flame.

  • PDF