미세 압전 캔틸러버를 이용한 마이크로 폰 및 마이크로 스피커

A micromachined piezoelectic cantilever transducer,which works both as a microphone and as a microspeaker,has been fabricated and tested. The 2000*2000*3.mu.m .sap2. cantilever has oxide(ZnO)piezoelectric thin film on a supporting layer of low-pressure chemical-vapor-deposited(LPCVD)low-stress siliconnitride. A highlight of the fabrication process which may also be relevant for other micromachined stuctures is the technique for producing a flat,multilayer cantilever. The measured microphone sensitivity is fairly constant at 2 mV/.mu.bar in the low frequency range and rise to 20 mV/.mu.bar at the lowest resonant frequency of 890 Hz. The 2 mV/.mu.bar sensitivity is the highest report to data for a microphone with a micromachined diaphragm. When measured into a 2 cm/sap3 coupler with 4V (zero-park)drive,the microspeaker output sound pressure level(SPL) is 75 dB at 890 Hz. It increases to approximately 100dB SPL at 4.8kHz with 6V(zero-park)drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation.