• 제목/요약/키워드: Piezoelectric layer

검색결과 353건 처리시간 0.024초

Pb(Z$n_{1/3}$N$b_{2/3}$)$O_3$-Pb(N$i_{1/3}$N$b_{2/3}$)$O_3$-PZT와 PLZT를 경사조성으로 하는 경사기능 압전엑튜에이터의 제조와 물성 (Processing and Properties of FGM Piezoelectric Actuator with Gradient Composition of Pb(Z$n_{1/3}$N$b_{2/3}$)$O_3$-Pb(N$i_{1/3}$N$b_{2/3}$)$O_3$-PZT and PLZT)

  • 김한수;최승철;최진호
    • 한국재료학회지
    • /
    • 제3권3호
    • /
    • pp.261-271
    • /
    • 1993
  • 4.5 Pb($Zn_{1/3}Nb_{2/3})O_3-40.5Pb(Ni_{1/3}Nb_{2/3})O_3$-55PZT와 PLZT(10/70/30, 11/60/40)를 경사조성으로 하여 경사기능 재료를 제조하였으며, 그 유전 특성과 압전 변형율 특성을 조사하였다. 경사기능재료는 A/B/A의 세층으로 성형하고 소결한 후 한 층을 연마해내어 제작하였다. 닥터블레이드용 슬립에는 acrylic계 유기 결합제가 34-36wt% 혼합되었으며, 건조 후 균열이 없는 양호한 thick film을 제조하였다. $1250^{\circ}C$, 2시간의 소성에 의해 경사기능화된 시편은 Nb와 La등의 조성 차이에 의한 구배를 이루었으며, 구배영역은 약 30${\mu}$m 정도였다. 경사기능재료에서 유전상수나 큐리온도롸 같은 유전특성은 조합한 조성층의 특성들사이의 값을 나타내었다. 인가 전압에 따른 변형율 특성은 단일 조성의 시편보다 현저하게 증가하였다. 실제로 경사기능 압전엑튜에이터를 제조한 결과 약 3${\mu}$m/100V 정도의 변위향을 나타내었다.

  • PDF

IDT 전극 패턴 임베디드 압전 에너지 하베스터의 특성 (Energy Harvesting Characteristics of Interdigitated (IDT) Electrode Pattern Embedded Piezoelectric Energy Harvester)

  • 이민선;김창일;윤지선;박운익;홍연우;백종후;조정호;박용호;장용호;최범진;정영훈
    • 한국전기전자재료학회논문지
    • /
    • 제29권9호
    • /
    • pp.581-588
    • /
    • 2016
  • Piezoelectric thick films of a soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material were produced by a conventional tape casting method. Thereafter, the interdigitated (IDT) Ag-Pd electrode pattern was printed on the $25{\mu}m$ thick piezoelectric film at room temperature. Co-firing of the 10-layer laminated piezoelectric thick films was conducted at $1,100^{\circ}C$ and $1,150^{\circ}C$ for 1 h, respectively. Piezoelectric cantilever energy harvesters were successfully fabricated using the IDT electrode pattern embedded piezoelectric laminates for 3-3 operation mode. Their energy harvesting characteristics were investigated with an excitation of 120 Hz and 1 g under various resistive loads (ranging from $10k{\Omega}$ to $200k{\Omega}$). A parabolic increase of voltage and a linear decrease of current were shown with an increase of resistive load for all the energy harvesters. In particular, a high output power of 3.64 mW at $100k{\Omega}$ was obtained from the energy harvester (sintered at $1,150^{\circ}C$).

스펙트럼 요소법을 이용한 판 구조물의 램파 전달 해석 (Analysis of Lamb wave propagation on a plate using the spectral element method)

  • 임기룡;김은진;최광규;박현우
    • 한국소음진동공학회:학술대회논문집
    • /
    • 한국소음진동공학회 2008년도 추계학술대회논문집
    • /
    • pp.71-81
    • /
    • 2008
  • This paper proposes a spectral element which can represent dynamic responses in high frequency domain such as Lamb waves on a thin plate. A two layer beam model under 2-D plane strain condition is introduced to simulate high-frequency dynamic responses induced by piezoelectric layer (PZT layer) bonded on a base plate. In the two layer beam model, a PZT layer is assumed to be rigidly bonded on a base beam. Mindlin-Herrmann and Timoshenko beam theories are employed to represent the first symmetric and anti-symmetric Lamb wave modes on a base plate, respectively. The Bernoulli beam theory and 1-D linear piezoelectricity are used to model the electro-mechanical behavior of a PZT layer. The equations of motions of a two layer beam model are derived through Hamilton's principle. The necessary boundary conditions associated with electro mechanical properties of a PZT layer are formulated in the context of dual functions of a PZT layer as an actuator and a sensor. General spectral shape functions of response field and the associated boundary conditions are formulated through equations of motions converted into frequency domain. A detailed spectrum element formulation for composing the dynamic stiffness matrix of a two layer beam model is presented as well. The validity of the proposed spectral element is demonstrated through comparison results with the conventional 2-D FEM and the previously developed spectral elements.

  • PDF

압전형 초음파 변환자의 성능 해석 시뮬레이션 및 실험 (Peformance Analysis of Piezoelectric Ultrasonic Transducers ; Simulation and Experiments)

  • 이종현;성굉모;이병호
    • 한국음향학회지
    • /
    • 제4권3호
    • /
    • pp.16-20
    • /
    • 1985
  • 압전형 초음파 변환자의 특성을 압전체, matching layer, backing, 매질, tuning 및 구동 회로를 고려하여 해석하였다. 압전체는 KLM 모델을 이용하였고, 모델변수를 실험적으로 추정하여 시뮬레이션 에 대입하였다. 실험적인 RTIL은 면반사에 대한 pulse-echo를 측정하여 계산하였으며, 이론치와 비교할 때 20 dB 주파수 대역내에서 3 dB 이하의 오차가 관찰되었다.

  • PDF

3C-SiC 버퍼층이 Si 기판위에 스퍼터링된 AlN 막의 특성에 미치는 영향 (Effect of 3C-SiC buffer layer on the characteristics of AlN films supttered on Si Substrates)

  • 류경일;정귀상
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2009년도 춘계학술대회 논문집
    • /
    • pp.3-6
    • /
    • 2009
  • Aluminum nitride (AIN) thin films were deposited on a polycrystalline 3C-SiC intermediate layer by a pulsed reactive magnetron sputtering system. Characteristics of the AIN/SiC heterostructures were investigated by field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM), X-ray diffraction (XRD), and Fourier transform infrared spectroscopy (FT-IR). The columnar structure of AIN thin films was observed by FE-SEM. The surface roughness of AlN films on the 3C-SiC buffer layer was measured using AFM. The XRD pattern of AlN films on SiC buffer layers was highly oriented at (002). Full width at half maximum (FWHM) of the rocking curve near (002) reflections was $1.3^{\circ}$. The infrared absorbance spectrum indicated that the residual stress of AIN thin films grown on SiC buffer layers was nearly negligible. The 3C-SiC intermediate layers are promising for the realization of nitride based electronic and mechanical devices.

  • PDF

적층형 세라믹 액츄에이터의 유전 및 압전특성 (Dielectric and Piezoelectric Properties in Multilayer Ceramic Actuator)

  • 최형봉;정순종;하문수;고중혁;이대수;송재성
    • 한국전기전자재료학회:학술대회논문집
    • /
    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.2
    • /
    • pp.615-618
    • /
    • 2004
  • The piezoelectricity and polarization of multilayer ceramic actuators, being designed to stack ceramic layer and electrode layer alternately, were investigated under a consideration of geometry, the thickness ratio of the ceramic layer to electrode layer The actuators were fabricated by tape-casting of $0.42PbTiO_3-0.38PbZrO_3-0.2Pb(Mn_{1/3}Nb_{2/3})O_3$ followed by laminating, burn-out and co-firing process. The actuators of $5\times5mm^2$ in area were formed in a way that $60{\sim}200{\mu}m$ thick ceramics were stacked 10 times alternately with $5{\mu}m$ thick electrode. Increase in polarization and electric field-displacement with increasing thickness ratio of the ceramic/electrode layer and thickness/cross section ratio were attributed to the change of $non-180^{\circ}/180^{\circ}$ domain ratio which was affected by the interlayer internal stress and Poisson ratio of ceramic layer. The piezoelectricity and actuation behaviors were found to be dependent upon the volume ratio (or thickness ratio) of ceramic layer relative to ceramic layer. Concerning with the existence of internal stress, the field-induced polarization and deformation were described in the multilayer actuator.

  • PDF

Fabrication and Characterization of InGaN/GaN LED structures grown on selectively wet-etched porous GaN template layer

  • Beck, Seol;Cho, Yong-Hoon
    • 한국진공학회:학술대회논문집
    • /
    • 한국진공학회 2009년도 제38회 동계학술대회 초록집
    • /
    • pp.124-124
    • /
    • 2010
  • Much interest has been focused on InGaN-based materials and their quantum structures due to their optoelectronics applications such as light emitting diode (LED) and photovoltaic devices, because of its high thermal conductivity, high optical efficiency, and direct wide band gap, in spite of their high density of threading dislocations. Build-in internal field-induced quantum-confined Stark effect in InGaN/GaN quantum well LED structures results in a spatial separation of electrons and holes, which leads to a reduction of radiative recombination rate. Therefore, many growth techniques have been developed by utilizing lateral over-growth mode or by inserting additional layers such as patterned layer and superlattices for reducing threading dislocations and internal fields. In this work, we investigated various characteristics of InGaN multiple quantum wells (MQWs) LED structures grown on selectively wet-etched porous (SWEP) GaN template layer and compared with those grown on non-porous GaN template layer over c-plane sapphire substrates. From the surface morphology measured by atomic force microscope, high resolution X-ray diffraction analysis, low temperature photoluminescence (PL) and PL excitation measurements, good structural and optical properties were observed on both LED structures. However, InGaN MQWs LED structures grown on SWEP GaN template layer show relatively low In composition, thin well width, and blue shift of PL spectra on MQW emission. These results were explained by rough surface of template layer, reduction of residual compressive stress, and less piezoelectric field on MQWs by utilizing SWEP GaN template layer. Better electrical properties were also observed for InGaN MQWs on SWEP GaN template layer, specially at reverse operating condition for I-V measurements.

  • PDF

표면 부착형 PZT소자에 의해 유발된 판 구조물의 램파 전달 해석을 위한 스펙트럼 요소 정식화 (Spectral Element Formulation for Analysis of Lamb Wave Propagation on a Plate Induced by Surface Bonded PZT Transducers)

  • 임기룡;김은진;강주성;박현우
    • 한국소음진동공학회논문집
    • /
    • 제18권11호
    • /
    • pp.1157-1169
    • /
    • 2008
  • This paper presents spectral element formulation which approximates Lamb wave propagation by PZT transducers bonded on a thin plate. A two layer beam model under 2-D plane strain condition is introduced to simulate high-frequency dynamic responses induced by a piezoelectric (PZT) layer rigidly bonded on a base plate. Mindlin-Herrmann and Timoshenko beam theories are employed to represent the first symmetric and anti-symmetric Lamb wave modes on a base plate, respectively. The Euler-Bernoulli beam theory and 1-D linear piezoelectricity are used to model the electro-mechanical behavior of a PZT layer. The equations of motions of a two layer beam model are derived through Hamilton's principle. The necessary boundary conditions associated with the electro-mechanical properties of a PZT layer are formulated in the context of dual functions of a PZT layer as an actuator and a sensor. General spectral shape functions of response field and the associated boundary conditions are obtained through equations of motions converted into frequency domain. Detailed spectrum element formulation for composing the dynamic stiffness matrix of a two layer beam model is presented as well. The validity of the proposed spectral element is demonstrated through numerical examples.

상류 분사 공동 화염 지지부를 가지는 스크램제트 엔진에 관한 실험적 연구 (Experimental Study on Upstream Fueled Cavity Flame-Holder Scramjet Engine)

  • 정은주;정인석
    • 한국연소학회지
    • /
    • 제11권4호
    • /
    • pp.1-8
    • /
    • 2006
  • The model cavity scramjet engine experiments are carried out using T3 free-piston shock tunnel. Upstream hydrogen fuel is injected before the cavity with different injection pressure. OH planar laser-induced fluorescence is used to investigate the combustion zone and piezoelectric pressure transducers are used to define the pressure rise due to the combustion. Main combustion region is a mixing layer which is between air and fuel. Also high OH fluorescence signal is appeared in the shear layer above the cavity in high equivalence ratio. From the OH signal in the cavity, this fuel injection system can be a role as a flame-holder.

  • PDF