• Electrical & Electronic Materials
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• v.10 no.2
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• pp.126-133
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• 1997

In order to apply for the gas sensing layer and the piezoelectric thin film devices, we studied the effects of magnetron sputtering conditions and annealing temperature on the electrical and structual characteristics of the ZnO thin film. The optimal deposition conditions, in order to obtain a c axis of the ZnO (002) phase thin film which is perpendicular to SiO$_{2}$/Si substrate, were like these ; substrate temperature 150.deg. C, chamber pressure 2 mtorr, R.F. power 300 watts, gas flow ratio 0.4[O$_{2}$(Ar + $O_{2}$)]. When the ZnO thin film was annealed in 600.deg. C, $O_{2}$ gas ambient for 1 hr, the resistivity was 2.6 x 10$^{2}$.ohm.cm and the grain size of ZnO thin film was less than 1 .mu.m. So the ZnO thin film acquired from above conditions can apply for the gas sensing layer which require a c axis perpendicular to the substrate surface.

• Advances in nano research
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• v.13 no.1
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• pp.29-45
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• 2022

The optimization for dynamic response associated with a cylindrical shell which is made of laminated composites embedded in a piezoelectric layer which is subjected to temperature rises and is resting on an elastic foundation is investigated for the first time. The first shear order theory (FSDT) is utilized in order to obtain the strain relations of the shell. Then, using the energy method, the equations of motions as well as boundary condition of the problem are attained. The formulation of this study together with the solution procedure which is a numerical solution method, differential quadrature method (DQM) is validated using other researches. This paper presents a thorough study on the parameters which impacts the vibration frequency of the laminated shell. The results of this paper shows that any type of laminated composite shell can reduce the vibration frequency providing that the angle related to layer are higher than 85 degrees. Also, in order to reduce the effect of temperature rises, the laminated composites instead of orthotropic one can be used.

• ETRI Journal
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• v.24 no.4
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• pp.270-279
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• 2002

We present a self-consistent numerical method for calculating the conduction-band profile and subband structure of AlGaN/GaN single heterojunctions. The subband calculations take into account the piezoelectric and spontaneous polarization effect and the Hartree and exchange-correlation interaction. We calculate the dependence of electron sheet concentration and subband energies on various structural parameters, such as the width and Al mole fraction of AlGaN, the density of donor impurities in AlGaN, and the density of acceptor impurities in GaN, as well as the electron temperature. The electron sheet concentration was sensitively dependent on the Al mole fraction and width of the AlGaN layer and the doping density of donor impurities in the AlGaN. The calculated results of electron sheet concentration as a function of the Al mole fraction are in excellent agreement with some experimental data available in the literature.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2001.05a
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• pp.114-117
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• 2001

A higher order zig-zag plate theory is developed to refine accurately predict fully coupled of the mechanical, thermal, and electric behaviors. Both the displacement and temperature fields through the thickness are constructed by superimposing linear zig-zag field to the smooth globally cubic varying field. Smooth parabolic distribution through the thickness is assumed in the transverse deflection in order to consider transverse normal deformation. Linear zig-zag form is adopted in the electric field. The layer-dependent degrees of freedom of displacement and temperature fields are expressed in terms of reference primary degrees of freedom by applying interface continuity conditions as well as bounding surface conditions of transverse shear stresses and transverse heat flux The numerical examples of coupled and uncoupled analysis are demonstrated the accuracy and efficiency of the present theory. The present theory is suitable for the predictions of fully coupled behaviors of thick smart composite plate under mechanical, thermal, and electric loadings.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1995.11a
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• pp.9-13
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• 1995

In this paper, Zinc Oxide films, with a high degree of c-axis orientation, have been grown on glass substrates by a rf magnetron sputtering. The maximum crystal orientation was found to occur with substrate temperature 150$^{\circ}C$, input power 190W, oxygen rate 50%, target-substrate distance 55mm. It is proposed to achieve high-resistivity ZnO films by increasing the annealing temperature. The piezoelectric layers, preferred oriented with (002) perpendicular to the layer with 4.9$^{\circ}$, could be obtained by the annealing temperature 300$^{\circ}C$ in oxygen atmosphere. It is indicated that the relative permittivity is range from 8.9 to 9.8 in the frequency ranging from 10KHz to 5MHz.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.3
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• pp.125-130
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• 2006

The optical gain and the luminescence of a ZnO quantum well with MgZnO barriers is studied theoretically. We calculated the non-Markovian optical gain and the luminescence for the strained-layer wurtzite quantum well taking into account of the excitonic effects. It is predicted that both optical gain and luminescence are enhanced for the ZnO quantum well when compared with those of InGaN-AlGaN quantum well structure due to the significant reduction of the piezoelectric effects in the ZnO-MgZnO systems.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.04a
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• pp.347-351
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• 1997

A micromachined piezoelectic cantilever transducer,which works both as a microphone and as a microspeaker,has been fabricated and tested. The 2000*2000*3.mu.m .sap2. cantilever has oxide(ZnO)piezoelectric thin film on a supporting layer of low-pressure chemical-vapor-deposited(LPCVD)low-stress siliconnitride. A highlight of the fabrication process which may also be relevant for other micromachined stuctures is the technique for producing a flat,multilayer cantilever. The measured microphone sensitivity is fairly constant at 2 mV/.mu.bar in the low frequency range and rise to 20 mV/.mu.bar at the lowest resonant frequency of 890 Hz. The 2 mV/.mu.bar sensitivity is the highest report to data for a microphone with a micromachined diaphragm. When measured into a 2 cm/sap3 coupler with 4V (zero-park)drive,the microspeaker output sound pressure level(SPL) is 75 dB at 890 Hz. It increases to approximately 100dB SPL at 4.8kHz with 6V(zero-park)drive. The measured microphone frequency response agrees well with the results of an ABAQUS simulation.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2001.05a
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• pp.133-137
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• 2001

Active control of flexural vibrations of smart laminated composite beams has been carried out using piezoceramic sensor/actuator and viscoelastic material. The beams with passive constrained-layer damping have been analyzed by formulating the equations of motion through the use of extended Hamilton's principle. The dynamic characteristics such as damping ratio and modal damping of the beam are calculated for various fiber orientations by means of iterative complex eigensolution method, This paper addresses a design strategy of laminated composite under flexural vibrations to design structure with maximum possible damping capacity.

• Proceedings of the Acoustical Society of Korea Conference
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• spring
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• pp.307-310
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• 1999

An analysis of the free vibration for the metal-piezoceramic composite thin plates is described. The purpose of this study is to develop a equivalent method for the free vibration analysis of metal-piezoceramic composite thin plates which are not symmetrically about the adhered layer and the piezoelectric effect. In order to confirm the validity of the vibration analysis, double Fourier sine series is used as a modal displacement function of a metal-piezoceramic composite thin plate and applied to the free vibration analysis of the plate under various boundary conditions.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2003.04a
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• pp.87-90
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• 2003

In this paper, the electromechanical displacements of curved actuators such as THUNDER are calculated by finite element method to design the optimal configuration of curved actuators. To predict the pre-stress in the device due to the mismatch in coefficients of thermal expansion, the adhesive as well as metal and PZT ceramic is also numerically modeled by using hexahedral solid elements. Because the modeling of these thin layers causes the numbers of degree of freedom to increase, large-scale structural analyses are performed in a cluster system in this study. The curved shape and pre-stress in the actuator are obtained by the cured curvature analysis. The displacement under the piezoelectric force by an applied voltage is also calculated to compare the performance of curved actuator. The thickness of metal and adhesive, the number of metal layer are chosen as design factors.