• Title/Summary/Keyword: Piezoelectric layer

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Crystal growth of AlN thin films on 3C-SiC buffer layer (3C-SiC 완충층을 이용한 AIN 박막의 결정성장)

  • Lee, Tae-Won;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2007.06a
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    • pp.346-347
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    • 2007
  • Aluminum nitride (AlN) thin films were deposited on Polycrystalline (poly) 3C-SiC buffer layers using pulsed reactive magnetron sputtering. Characteristics of AlN films were investigated experimentally by means of FE-SEM, X-ray diffraction, and FT-IR, respectively. As a result, highly (002) oriented AlN thin films with almost free residual stress were achieved using 3C-SiC buffer layers. Therefore, AlN thin films grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.

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The FEA of the Multy-Layered ultrasonic motor (적층형 초음파 모터의 유한요소해석)

  • Kim, Sung-Hyun;Park, Tae-Gone
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.304-307
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    • 2003
  • In this paper, stacked piezoelectric ceramics were used for obtaining a large vibration for a small ultrasonic motor which is useable for the both linear drive and rotational drive. We studied this motor through the finite element analysis method and the simulated driving characteristics were presented. As results, the displacement of the tip of the stator was increased when the layers of the ceramics were increased. Also, by inserting additional aluminum plates between the ceramics and the aluminum bar, the displacement were amplified. In this model, two voltages which have 90 degree phase difference were applied for the bi-directional movement.

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Frequency characteristics of a multiferroic Piezoelectric/LEMV/CFRP/Piezomagnetic composite hollow cylinder under the influence of rotation and hydrostatic stress

  • Selvamani, R.;Mahesh, S.;Ebrahimi, F.
    • Coupled systems mechanics
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    • v.10 no.2
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    • pp.185-198
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    • 2021
  • An analytical model is consider to scrutinize axisymmetric wave propagation in multiferroic hollow cylinder with rotating and initial stressed forces, where a piezomagnetic (PM) material layer is bonded to a piezoelectric (PE) cylinder together by Linear elastic materials with voids. Both distinct material combos are taken into account. Three displacement potential functions are introduced to uncouple the equations of motion, electric and magnetic induction. The numerical calculations are carried out for the non-dimensional frequency by fixing wave number and thickness. The arrived outputs are plotted as the dispersion curves for different layers. The results obtained in this paper can offer significance to the application of PE/PM composite hollow cylinder via LEMV and CFRP layers for the acoustic wave and microwave technologies.

Experimental performance evaluation and comparison for lightweight piezo-composite actuator LIPCA (압전 복합재료 작동기 LIPCA에 대한 성능 비교실험 및 분석)

  • 김균열;박기훈;윤광준;박훈철
    • Composites Research
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    • v.16 no.2
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    • pp.41-47
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    • 2003
  • This paper is concerned with the performance evaluation and comparison analysis fur several kinds of LIPCA (Lightweight Piezo-Composite Actuator) device system. LIPCA device system is composed of a piezoelectric ceramic layer and fiber reinforced light composite layers, typically a PZT ceramic layer was sandwiched by a top fiber layer with low CTE (coefficient of thermal expansion) and base layers with high CTE. To investigate the effect of lay-up structure of the LIPCA on the actuating performance, four kinds of actuator with different lay-up stacking sequence were designed, manufactured, and tested. The performance of each actuator was evaluated using an actuator test system consisted of an actuator supporting jig, a high voltage actuating power supplier, and a non-contact laser measuring system. From the comparison of the performance of the LIPCA prototypes, it was found that the actuator with higher coefficient of unimorph actuator can generate larger actuating displacement.

Formation of ZnO ZnO thin films 3C-SiC buffer layer (3C-SiC 버퍼층위에 ZnO 박막 형성)

  • Lee, Yun-Myung;Chung, Gwiy-Sang
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.237-237
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    • 2009
  • Zinc oxide (ZnO) thin film was deposited on Si substrates using polycrystalline (poly) 3C-SiC buffer layer, in which the ZnO film was grown by sol-gel method. Physical characteristics of the grown ZnO film was investigated experimentally by means of SEM, XRD, FT-IR (Furier Transform-Infrared spectrum), and AFM. XRD pattern was proved that the grown ZnO film on 3C-SiC layers had highly (002) orientation with low FWHM (Full width of half maxium). These results showed that ZnO thin film grown on 3C-SiC buffer layers can be used for various piezoelectric fields and M/NEMS applications.

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The study on Properties of PZT-5A Probe (PZT-5A 탐촉자의 특성 분석)

  • Kim, Cheol-Su;Kim, Sang-Su;Song, Jun-Tea;Park, Young-Kwan;Lee, Jong-Duck
    • Proceedings of the KIEE Conference
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    • 1997.07d
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    • pp.1427-1429
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    • 1997
  • In this study, piezoelectric transducer were designed and manufactured using PZT-5A which have relatively high electromechanical coefficient. A epoxy is a good material as matching and backing layers. The envelope was reduced 60% as using matching layer and 76% as using matching and backing layer. NDT was successfully carried out for aluminum test pieces. Distance error and resolution of PZT-5A probe were improved as increasing frequency. Envelope was effectively reduced by backing layer but sensitiveness was poor.

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Dynamics Modeling of Plate Treated with Active Constrained Layer Damping (능동 구속층 감쇠 처리된 판의 동적 모델링)

  • Park, C.H.;Kim, W.C.
    • Journal of Power System Engineering
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    • v.1 no.1
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    • pp.124-143
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    • 1997
  • 본 논문은 능동 구속층 감쇠(active constrained layer damping) 처리된 관의 동적 모델링과 정식화를 제시한다. 판의 운동방정식은 Hamilton정리를 이용하여 전개된 판, piezoelectric film 및 점탄성층의 운동방정식을 조합하므로서 유도된다. 이 운동방정식은 외부인가전압의 영향하에서 적층판의 해석적 모델을 제공할 뿐만이 아니라, 판 구조내에서 진동에너지를 감소시킬 수 있는 전단층의 효과에 대한 변위관계식을 나타낸다. 그리고 운동방정식에 대응하는 경계조건도 유도되었다. 또한 판과 능동구속층감쇠계의 동특성을 설명하기 위한 유한요소모델이 유도되었다. 이 모델의 타당성을 실온조건에서 실험적으로 입증하였다. 개발된 이론 및 실험적인 결과들은 판과 능동구속층 감쇠계가 구조진동의 감쇠를 위한 매우 유효한 수단으로 사용될 수 있음을 나타내었다.

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Analytical evaluation and experimental validation of energy harvesting using low-frequency band of piezoelectric bimorph actuator

  • Mishra, Kaushik;Panda, Subrata K.;Kumar, Vikash;Dewangan, Hukum Chand
    • Smart Structures and Systems
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    • v.26 no.3
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    • pp.391-401
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    • 2020
  • The present article reports the feasibility of the electrical energy generation from ambient low-frequency vibration using a piezoelectric material mounted on a bimorph cantilever beam actuator. A corresponding higher-order analytical model is developed using MATLAB in conjunction with finite element method under low-frequency with both damped and undamped conditions. An alternate model is also developed to check the material and dimensional viability of both piezoelectric materials (mainly focussed to PVDF and PZT) and the base material. Also, Genetic Algorithm is implemented to find the optimum dimensions which can produce the higher values of voltage at low-frequency frequencies (≤ 100 Hz). The delamination constraints are employed to avoid inter-laminar stresses and to increase the fracture toughness. The delamination has been done using a Teflon sheet sandwiched in between base plates and the piezo material is stuck to the base plate using adhesives. The analytical model is tested for both homogenous and isotropic material characteristics of the base material and extended to investigate the effect of the different geometrical parameters (base plate dimensions, piezo layer dimensions and placement, delamination thickness and placement, excitation frequency) on the model responses of the bimorph cantilever beam. It has been observed that when the base material characteristics are homogenous, the efficiency of the model remains higher when compared to the condition when it is of isotropic material. The necessary convergence behaviour of the current numerical model has been established and checked for the accuracy by comparing with available published results. Finally, using the results obtained from the model, a prototype is fabricated for the experimental validation via a suitable circuit considering Glass fibre and Aluminium as the bimorph material.

Fabrication and Performance Evaluation of Flat-Type Multilayer Piezoelectric Ceramic Ultrasonic Transmitter (평판형 적층 세라믹 초음파 압전 트랜스미터의 제조와 성능 평가)

  • Na, Yong-hyeon;Lee, Min-seon;Cho, Jeong-ho;Paik, Jong-hoo;Lee, Jung Woo;Jeong, Young-hun
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.32 no.3
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    • pp.207-212
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    • 2019
  • A flat-type piezoelectric ceramic ultrasonic transmitter was successfully fabricated for application in acoustic devices with cone-free diaphragms. The transmitter, possessing a center frequency of 40.6 kHz, exhibited a higher displacement characteristic for a multilayer type compared with a single layer type. Surface roughness treatment of an Al elastic diaphragm influenced a slight increase (1.1 dB) in the sound pressure level (SPL) at $10V_{rms}$ due to the enlarged surface area. The fabricated multilayer piezoelectric ceramic ultrasonic transmitter showed increasing SPL with increasing input voltage, with a maximum SPL of approximately 123.6 dB at $10V_{rms}$. This implies a doubly increased SPL density of $3.6dB/mm^3$, superior to that of a commercial open-type transmitter with a cone.

Numerical Analysis of Bragg Reflector Type Film Bulk Acoustic Wave Resonator (수치적 계산을 이용한 Bragg Reflector형 탄성파 공진기의 특성 분석)

  • 김주형;이시형;안진호;주병권;이전국
    • Journal of the Korean Ceramic Society
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    • v.38 no.11
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    • pp.980-986
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    • 2001
  • Bragg reflector type FBAR was fabricated on the Si(100) substrate. We measured a frequency response of the resonator at 5.2 GHz and analyzed it by numerical calculation considering actual acoustic losses of each layer in the structure. We fabricated nine layer Bragg reflector of W-SiO$_2$pairs using r.f. sputtering method and fabricated AlN piezoelectric and Al electrodes using pulsed dc sputtering. The return loss(S$_{11}$) of the fabricated Bragg reflector type FBAR was 12 dB at 5.38 GHz and the series resonance frequency(f$_{s}$) was 5.376 GHz and the parallel resonance frequency(f$_{p}$) was 5.3865 GHz. Effective electro-mechanical coupling constant (K$_{eff{^2}}$) and Quality factors(Q$_{s}$), the Figures of Merit of the resonator, were about 0.48% and 411, respectively. We extracted acoustic parameters of AlN piezoelectric and reflection coefficient of the Bragg reflector by numerical calculation. We could know that material acoustic impedance and wave velocity of AlN piezoelectric decreased for intrinsic value and the electromechanical coupling constant(K$_2$) value was very low owing to the poor quality of the AlN piezoelectric. Reflection coefficient of Bragg reflector was 0.99966 and reflection band was very wide from 2.5 to 9.5 GHz.

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