• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.330-330
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• 2008

$Fe_2O_3$ added Pb$(Ni_{1/3}Nb_{2/3})O_3-PbTiO_3-PbZrO_3 $ (PNN-PT-PZ) ceramics were produced in order to use them as a bimoph acturator for energy harvesting. Especially, the 0.25 wt% $Fe_2O_3$ added 0.4PNN-0.357PT-0.243PZ, having the composition of morphotropic phase boundary, showed good piezoelectric properties of $d_{33}$ of 810 pC/N, $k_p$ of 77% and $Q_m$ of 55 along with a high Curie temperature of $210^{\circ}C$. A bimorph actuator, composed of the two piezoelectric layers bonded together with a phosphorous bronze layer as a central metallic electrode, was successfully fabricated. The bimorph actuator, vibrated with a 1.3 mm amplitude at 68 Hz, produced high electric power of approximately 60 mW.

• Advances in nano research
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• v.14 no.2
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• pp.141-154
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• 2023

Effects of viscoelastic foundation on vibration of curved-beam structure with clamped and simply-supported boundary conditions is investigated in this study. In doing so, a micro-scale laminate composite beam with two piezoelectric face layer with a carbon nanotube reinforces composite core is considered. The whole beam structure is laid on a viscoelastic substrate which normally occurred in actual conditions. Due to small scale of the structure non-classical elasticity theory provided more accurate results. Therefore, nonlocal strain gradient theory is employed here to capture both nano-scale effects on carbon nanotubes and microscale effects because of overall scale of the structure. Equivalent homogenous properties of the composite core is obtained using Halpin-Tsai equation. The equations of motion is derived considering energy terms of the beam and variational principle in minimizing total energy. The boundary condition is assumed to be clamped at one end and simply supported at the other end. Due to nonlinear terms in the equations of motion, semi-analytical method of general differential quadrature method is engaged to solve the equations. In addition, due to complexity in developing and solving equations of motion of arches, an artificial neural network is design and implemented to capture effects of different parameters on the inplane vibration of sandwich arches. At the end, effects of several parameters including nonlocal and gradient parameters, geometrical aspect ratios and substrate constants of the structure on the natural frequency and amplitude is derived. It is observed that increasing nonlocal and gradient parameters have contradictory effects of the amplitude and frequency of vibration of the laminate beam.

• Proceedings of the KSR Conference
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• 2011.10a
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• pp.2632-2634
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• 2011

In the Structural Health Monitoring field, the piezoelectric elements are bonded the surface of the structures for generating the guided wave. For this reason, the structures become two-layer beam. It is very important to know precisely the dynamic characteristic of structures and also predict precisely the wave propagation in structures. Because wave propagation is very useful to analysis the dynamic characteristic of structures. In this paper, the governing equations of motion are derived from Hamilton's principle by applying the Timoshenko beam theory and Mindlin-Herrmann rod theory at the first. and then the wave propagations in a composite beams with a surface-bonded piezoelectric are examined.

• JSTS:Journal of Semiconductor Technology and Science
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• v.5 no.1
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• pp.52-57
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• 2005

This paper describes a fabrication method of a circular diaphragm using boron etching stop method. It will be applied to acoustic transducers such as microphones or microspeakers and so on. The sensitivity is expected to be increased with the circular diaphragm through the simulation results to compare with a general rectangular diaphragm. The borondoped layer which is doped with solid source is sufficient for achieving an etching stop in 20 wt% TMAH, and the thickness is about $7.4{\mu}m$. The diameter of the circular silicon nitride diaphragm was measured to be 2 mm with $1{\mu}m$ thickness. The fabrication of piezoelectric acoustic devices was completed.

• Smart Structures and Systems
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• v.16 no.5
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• pp.853-872
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• 2015

Numerical analysis of large amplitude free vibration behaviour of laminated composite spherical shell panel embedded with the piezoelectric layer is presented in this article. For the investigation purpose, a general nonlinear mathematical model has been developed using higher order shear deformation mid-plane kinematics and Green-Lagrange nonlinearity. In addition, all the nonlinear higher order terms are included in the present mathematical model to achieve any general case. The nonlinear governing equation of freely vibrated shell panel is obtained using Hamilton's principle and discretised using isoparametric finite element steps. The desired nonlinear solutions are computed numerically through a direct iterative method. The validity of present nonlinear model has been checked by comparing the responses to those available published literature. In order to examine the efficacy and applicability of the present developed model, few numerical examples are solved for different geometrical parameters (fibre orientation, thickness ratio, aspect ratio, curvature ratio, support conditions and amplitude ratio) with and/or without piezo embedded layers and discussed in details.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2005.05a
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• pp.662-667
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• 2005

Nonlinear dynamics of active piezolaminated plates are investigated with respect to the thermopiezoelastic behaviors. For largely deformed structures with small strain, the incremental total Lagrangian formulation is presented based on the virtual work principles. A multi field layer wise finite shell element is proposed for assuring high accuracy and non-linearity of displacement, electric and thermal fields. For dynamic consideration of thermopiezoelastic snap through phenomena, the implicit Newmark's scheme with the Newton-Raphson iteration is implemented for the transient response of various piezolaminated models with symmetric or eccentric active layers. The bifurcate thermal buckling of symmetric structural models is first investigated and the characteristics of piezoelectric active responses are studied for finding snap through piezoelectric potentials and the load path tracking map. The thermoelastic stable and unstable postbuckling, thermopiezoelastic snap through phenomena with several attractors are proved using the nonlinear time responses for various initial conditions and damping loss factors. Present results show that thermopiezoelastic snap through phenomena can result in the difficulty of buckling and postbuckling control of intelligent structures.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.12
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• pp.597-600
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be made as monolithic integrated devices with compatibility to semiconductor process, leading to small size and low cost, high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible suspended FBAR using surface micromachining. Membrane is composed $Si_3N_4SiO_2Si _3N_4$ multi layer and air gap is about 50${\mu}{\textrm}{m}$. Firstly, We perform one dimensional simulation applying transmission line theorem to verify resonance characteristic of the FBAR. Process of the FBAR is used MEMS technology. Fabricated FBAR resonate at 2.4GHz, $K^2_{eff}$ and Q are 4.1% and 1100.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.156-159
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• 2002

Film Bulk Acoustic wave Resonator (FBAR) using thin piezoelectric films can be fabricated as monolithic integrated devices with compatibility to semiconductor process, leading to small size, low cost and high Q RF circuit elements with wide applications in communications area. This paper presents a MMIC compatible Suspended FBAR using surface micromachining. It is possible to make Si$_3$N$_4$/SiO$_2$/Si$_3$N$_4$membrane by using surface micromachining and its good effect is to remove the substrate silicon loss. FBAR was made on 2$\mu\textrm{m}$ multi-layered membrane using CVD process. According to our result, Fabricated film bulk acoustic wave resonator has two adventages. First, in the respect of device Process, our Process of the resonator using surface micromachining is very simple better than that of resonator using bull micromachining. Second, because of using the multiple layer, thermal expansion coefficient is compensated, so, the stress of thin film is reduced.

• Proceedings of the KIEE Conference
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• 2006.07b
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• pp.1059-1060
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• 2006

In this study, vibration mode multilayer piezoelectric transformer was designed and thickness simulated using ANSYS of finite element method simulator for investigating its optimum conditions ist. As a results, resonant frequency was decreased with the increase of output layer thickness, Output voltage, maximum displacement and maximum stress at 0.34mm thickness transformer were 228.1 V, $0.42{\mu}m,\;8.78[N/m^2]$ respectively.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1998.06a
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• pp.307-310
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• 1998

Finite element analysis was investigated on the stress distribution at the 2-D model of piezoelectric ceramic actuators. The y direction maximum stress decreased with a(internal electrode gap) size until 0.4 mm and is not much difference with c(external electrode thickness) size. The stress distribution with internal layers is almost same, and the stress distribution of load condition is higher than that of no load condition. The y direction maximum stress increased exponentially with the number of layer and saturated at 260 layers. In the case of defective actuator, the stress distribution is smaller than that of normal actuator.