• Journal of the Korean Society for Precision Engineering
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• v.20 no.6
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• pp.71-80
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• 2003

This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

• International Journal of Precision Engineering and Manufacturing
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• v.4 no.6
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• pp.29-37
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• 2003

This paper presents a two-stage electrohydraulic servovalve with a nozzle-flapper pilot stage, which is controlled by stack-type piezoelectric elements. The flapper moving mechanism developed in this research can compensate for the hysteresis problem and thermal expansion of the piezoelectric elements. The experimental result shows that this flapper moving mechanism has the frequency response of about 600 Hz. And a simplified servovalve system using this flapper moving mechanism has the frequency response of about 300 Hz at the supply pressure of 210 bar.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2006.05a
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• pp.821-826
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezo actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• Proceedings of the KIEE Conference
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• 2007.07a
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• pp.1576-1577
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• 2007

As a intelligent valve piezoelectric valve is to applied to various fields of application. Piezoelectric valves have fast response time and good linearity for pressure control but its hysteresis displacement by its stack actuator influences on pressure control in electro-hydraulic braking. Solenoid valves are traditional element to control hydraulic pressure but this paper proposes piezoelectric valve for brake pressure control with hysteresis compensation.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.1023-1024
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• 2010

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2009.06a
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• pp.667-668
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• 2009

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 1996.10a
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• pp.28-33
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• 1996

This paper presents a position control of ultra-precision machine tool post using piezoelectric material. A stack-type piezoelectric actuator is employed in a hinge-type tool holder. An assumed linear transfer function of the practical nonlinear plant is established through the comparison of transfer functions and step responses in the experiments and the simulations. Several types of feedforward/feedback controllers are designed via computer simulations using the assumed linear transfer function, The position tracking control experiments are undertaken to show the control efficiency of each controller.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.505-507
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• 2004

This paper attempts to compensate the nonlinearity between the input voltage and the output displacement of the piezoelectric stack in dynamic actuation by the following two ways. Firstly, the charge steering by circuit configuration reduces the hysteresis of piezoelectric actuator remarkably. However, it makes the ripple in positioning due to the phase lag and noise induced from the elements of the long closed loop. Secondly, the feedforward control by neural network compensates the hysteresis of the piezoelectric actuators effectively with the appropriate selection of the input variables for the training. The improvement of the dynamic performance of the piezoelectric actuators by the developed linearization technique is verified by experiments.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.25 no.3
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• pp.199-206
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• 2015

This paper deals with the vibration characteristics of stacked transducers composed of piezoelectric discs, which are main elements of ultrasonic sensors or actuators. The stacked transducers were devised in the sense of natural frequencies. Two- or three-layer transducers were fabricated with piezoelectric discs of different diameters. The natural frequencies were determined by the finite element analysis and they were verified by comparing them with experimental results. It appeared that the natural frequencies of the stacked piezoelectric transducers include the natural frequencies of the constituent piezoelectric discs and the natural frequencies caused by stacking. Based on these results, it would be possible to predict the vibration characteristics of the stacked piezoelectric transducers in a design process.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.9
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• pp.881-886
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• 2009

This paper presents a manipulation system consisting of a coarse/fine XY positioning system and an out-of-plane manipulator. The object of the system is to conduct tine positioning and manipulation of micro parts. The fine stage and the out-of-plane manipulator have compliant mechanisms with flexure hinges, which are driven by stack-type piezoelectric elements. In the fine stage, the compliant mechanism plays the roles of motion guide and displacement amplification. The out-of-plane manipulator contains three piezo-driven compliant mechanisms for large working range and fine resolution. For large displacement, the compliant mechanism is implemented by a two-step displacement amplification mechanism. The compliant mechanisms are manufactured by wire electro-discharge machining for flexure hinges. Experiments demonstrate that the developed system is applicable to a fine positioning and fine manipulation of micro parts.