• Transactions of the Korean Society of Mechanical Engineers A
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• v.33 no.10
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• pp.1045-1053
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• 2009

Precision stages for 6-DOF positioning, actuated by PZT stacks, which are fed back by gap sensors and guided by flexure hinges, have enlarged their application territory in micro/nano manufacturing and measurement area. The precision stages inherently have such limitations as the nonlinearity between input and output in piezoelectric stacks, feedback signal noise in precision capacitive gap sensors and low material damping in precision kinematic linkages of mechanical flexures. To surmount these limitations, the precision stage is modeled with physics-based variables, which are identified by transient response correspondence, and a gain margin calculation algorithm using the Prandtl-Ishlinskii model and describing function is newly developed to assess system performance more precisely than linear controller design schemes. Based on such analyses, a precision positioning controller is designed. Excellent positioning accuracy with rapid settlement accomplished by the controller is shown in step responses of the closed-loop system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.10a
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• pp.799-804
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• 2013

The sensor/actuator active sensor diagnostics procedure, where the sensors/actuators are confirmed to be functioning properly during operation, is a critical component to successfully complete the structural health monitoring (SHM) process with large numbers of active sensors typically installed in a structure. The basis of this process is to track the changes in the capacitive value of piezoelectric materials, which shows up in measured admittance. Due to the temperature dependent nature of piezoelectric materials, we investigated the effects of temperature variations on sensor diagnostic process. The effect of temperature variations found to be remarkable, modifying the measured capacitive values significantly. In addition we analyzed the effect of bonding agents between a PZT patch and a host structure. This paper summarizes considerations needed to develop such sensor diagnostic processes, experimental procedures and results, and additional issues that can be used as guidelines for future investigations.

• Smart Structures and Systems
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• v.17 no.6
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• pp.1055-1065
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• 2016

An anisotropic ultrasonic transducer is proposed for Lamb wave applications, such as passive damage or impact localization based on ultrasonic guided wave theory. This transducer is made from a PMNPT single crystal, and has different piezoelectric coefficients $d_{31}$ and $d_{32}$, which are the same for the conventional piezoelectric materials, such as Lead zirconate titanate (PZT). Different piezoelectric coefficients result in directionality of guided wave generated by this transducer, in other words, it is an anisotropic ultrasonic transducer. And thus, it has different sensitivity in comparison with conventional ultrasonic transducer. The anisotropic one can provide more information related to the direction when it is used as sensors. This paper first shows its detailed properties, including analytical formulae and finite elements simulations. Then, its application is described.

• Journal of Sensor Science and Technology
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• v.8 no.1
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• pp.1-9
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• 1999

A study has been made on the fabrication of a dual mode(a longitudinal and shear mode) ultrasonic sensor using a single PZT piezoelectric ceramic element. We investigated the mechanism of the dual mode sensor that generated both of the longitudinal and the shear waves simultaneously with the single PZT element. Through the analysis of analytic wave propagation equations, all the possible crystal cuts have been examined to determine appropriate Euler transformation angles for efficient excitations of the dual modes. We studied the performance of a PZT element as a function of its rotation angle so that its efficiency is optimized to excite the two waves of equal strength. Experimental examination of the waveform on a delay line(STS303) setup confirms that the ultrasonic sensor can transmit and detect both longitudinal and shear waves simultaneously.

• Journal of the Korean Society for Nondestructive Testing
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• v.29 no.5
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• pp.458-465
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• 2009

In general, ultrasonic guided wave techniques that used for an evaluation of the internal defect have been applied without considering energy loss. It can be found out that the significant attenuation is observed in the signal of structure with defect by the scattering and absorption. Even in the signal acquired from defect-free structure, this attenuation can be also significant. Therefore, it is very essential to determine the Lamb wave propagation characteristics depending on modes because the dispersibility of Lamb wave can be easily influenced by the attenuation effect with frequency and thickness. For this reason, changing the propagation distance, attenuation coefficient of each Lamb wave mode needs to be investigated by the contact pitch-catch method with PZT(piezoelectric) sensors. In this paper, the experimental attenuation coefficient is measured by choosing the following three different variables; mode, thickness and plate materials. As a result, experimental attenuation coefficient is obtained as the function of variables.

• Smart Structures and Systems
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• v.28 no.6
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• pp.761-777
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• 2021

This study presents a numerical investigation on the sensitivity of electromechanical (EM) impedance responses to inner damaged concrete of a prestressed anchorage zone. Firstly, the Ottosen yield criterion is selected to simulate the plasticity behavior of the concrete anchorage zone under the compressive loading. Secondly, several overloading cases are selected to analyze inner damage formations in the concrete of the anchorage zone. Using a finite element (FE) model of the anchorage zone, the relationship between applied forces and stresses is analyzed to illustrate inner plasticity regions in concrete induced by the overloading. Thirdly, EM impedance responses of surface-mounted PZT (lead-zirconate-titanate) sensors are numerically acquired before and after concrete damage occurrence in the anchorage zone. The variation of impedance responses is estimated using the RMSD (root-mean-square-deviation) damage metric to quantify the sensitivity of the signals to inner damaged concrete. Lastly, a novel PZT skin, which can measure impedance signatures in predetermined frequency ranges, is designed for the anchorage zone to sensitively monitor the EM impedance signals of the inner damaged concrete. The feasibility of the proposed method is numerically evaluated for a series of damage cases of the anchorage zone. The results reveal that the proposed impedance-based method is promising for monitoring inner damaged concrete in anchorage zones.

• Transactions of the Society of Information Storage Systems
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• v.3 no.1
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• pp.47-53
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• 2007

In this paper, a thermo-piezoelectric mechanism with integrated heaters and piezoelectric sensors has been studied for low power probe-based data storage. Silicon nitride cantilever integrated with silicon heater and piezoelectric sensor has been developed to improve the uniformity of cantilevers. Data bits of 40 nm in diameter were recorded on PMMA film. The sensitivity of the piezoelectric sensor was 0.615 fC/nm after poling the PZT layer. And, the $34\times34$ probe array integrated with CMOS circuits has been successfully developed by simple one-step bonding process. The process can simplify the process step and reduce tip wear using silicon nitride tip.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.20 no.3
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• pp.218-222
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• 2007

In this study, Acoustic emission(AE) sensors were fabricated using lead-free piezoelectric ceramics for prohibiting environmental pollution. Structure of AE sensors were designed as Langvin type air backing form. Here, the piezoelectic element was used as PZT(EC-65)(AE1) and NKN(AE2), respectively. The measured resonant frequency, the maximum sensitivity frequency and sensitivity of AE sensors were as follows ; 143 kHz, 29.4 kHz and 69.3 dB in AE1 and 179 kHz, 29.4 kHz and 66.3dB in AE2, respectively.

• Journal of Sensor Science and Technology
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• v.28 no.2
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• pp.106-112
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• 2019

Flexible impact force sensors composed of piezoelectric PZT/PDMS composite sandwiched between Al/PET films were fabricated and their voltage signal characteristics were evaluated under varying impact forces for electronic mitt applications. The piezoelectric impact force sensor on an ethylene-vinyl acetate (EVA) substrate exhibited an output voltage difference of no greater than 40 mV a periodical impact test in with the impact load was increased by as much as 240 N by a restoration time of 5 s in a five-time experiment, implying good sensing ability. Moreover, the impact force sensor embedded four electronic mitts showed a reliable sensitivity of less than 1 mV/N and good repeatability under 100 N-impact force during a cycle test executed 10,000 times. This indicated that the fabricated flexible piezoelectric impact sensor could be used in electronic mitt applications. However, the relatively low elastic limit of substrate material such as EVA or poly-urethane slightly deteriorated the sensitivity of the impact sensor embedded electronic mitt at over 200 N-impact forces.

• Proceedings of the Computational Structural Engineering Institute Conference
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• 2009.04a
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• pp.2-5
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• 2009

본 논문에서는 오실레이터 센서와 램파 센서를 결합하여 구조물 손상 진단을 위한 통합된 압전 센서 시스템을 제안한다. 구조물 손상으로 인한 공진주파수 변화를 관측할 수 있는 오실레이터 센서는 손상 정도에 민감하게 반응하고 구조가 단순한 장치이지만 측정 범위가 센서 주위로 제한되는 특성을 가진다. 반면에 램파를 이용한 진단 시스템은 원거리에 위치한 구조물의 손상부를 감지하기에 유용하다. 본 논문에서는 오실레이터 센서를 이용한 취약 지점의 국부적인 손상 진단 방식과 램파를 이용한 광역적인 손상 진단 방식을 결합하여 각 시스템의 장점들을 활용할 수 있는 센서 시스템의 적용가능성을 연구하였다. PZT소자를 알루미늄 판에 적용하여, 알루미늄판의 손상 정도에 따른 오실레이터 공진주파수의 변화와 램파 신호의 Time of flight, 그리고 진폭의 변화를 이용하여 구조물 손상형태의 판별 가능성을 제시하고 실험을 통하여 그 타당성을 검증하였다.